Selected the technique wanted for film deposition:
Evaporation
- EB : E-Beam evaporation.
- RH : Resistance Heated Evaporation
- RH1 : Materials supplied by CMi.
- RH2 : Materials that must be ordered through the CMi user interface.
- RH3 : Authorized materials, but not supplied by CMi.
- RH4 : Materials that can be supplied by CMi in small quantities.
Element | LAB 600 H | EVA 600 | EVA 760 | VACO 250 | VACOTEC |
Ag | EB [99.99%] | RH2 [99.999%] | EB [99.99%] | RH2 [99.99%] | |
AgCl | RH3 | ||||
Ag2O | |||||
Al | EB [99.999%] | EB [99.999%] | EB [99.999%] | RH2 [99.999%] | |
Al:Cu:Si 4%,1% (95:4:1) | |||||
Al2O3 | EB [99.99%] | ||||
AlN | |||||
AlSc 6.4 at% (Sc 10.2 wt%) | |||||
AlSc 17.5 at% (Sc 26.1 wt%) | |||||
AlSc 40.0 at% (Sc 52.6 wt%) | |||||
AlScN | |||||
Al:Si 0.5% | |||||
Al:Si 0.8% | |||||
Al:Si 1.0% | |||||
Al:Si 1.2% | |||||
Al:Si 1.5% | |||||
Al:Si 2.0% | |||||
Al:Si 4.0% | |||||
Au | EB [99.99%] | RH2 [99.99%] | EB [99.99%] | ||
AuGe12% | RH3 | ||||
AZO ZnO:Al2O3 98:2 (wt%) | |||||
Bi | RH1 [99.999%] | RH4 [99.999%] | |||
Ca | RH3 | ||||
Co | EB [99.95%] | EB [99.95%] | |||
Cr | EB [99.6%] | EB [99.6%] | EB [99.6%] | RH2 [99.6%] | |
Cu | RH1 [99.99%] | EB [99.99%] | RH2 [99.99%] | ||
Fe | RH1 | ||||
Fe2O3 | |||||
Fe:Co:B 60:20:20 (at%) | |||||
Ga | RH4 [99.99%] | ||||
Ge | EB [99.999%] | ||||
GeO2 | |||||
Ge:Sn 80:20 (at%) | |||||
Ge:Sn 84:16 (at%) | |||||
Ge:Sn 90:10 (at%) | |||||
Ge:Sn 94:6 (at%) | |||||
Hf | |||||
HfOx | |||||
HfO2:Gd 96.5:3.5 (%at) | |||||
HZO | |||||
IGZO InGaZnOx | |||||
In | EB [99.999%] | RH2 [99.999%] | RH2 [99.999%] | ||
Ir | |||||
IrOx | |||||
ITO 90:10 wt% In2O3 – SnO2 | EB [99.99%] | ||||
ITZO In,Zn,Sn | |||||
IWO In,W | |||||
IZO In,Zn | |||||
LNO LaNiO3 | |||||
La2O3 | EB [99.99%] | ||||
LiF | RH3 | ||||
Mg | RH3 | RH3 | |||
MgF2 | EB [99.99%] | ||||
MgO | EB [99.5%] | ||||
Mo | EB [99.95%] | ||||
MoOx | |||||
MoO3 | RH3 | RH3 | |||
Mo:Si 75:25 (at%) | |||||
Nb | EB [99.9%] (Nb + Ta) Ta = 530ppm | ||||
NbO | |||||
Nb:Ti 50:50 (at%) | |||||
Nb:Ti 85:15 (at%) | |||||
NbTiN | |||||
Ni | EB [99.95%] | EB [99.95%] | EB [99.95%] | ||
NiCr 19% | EB Ni = 74.8% Cr = 19.6% Fe = 4.2% Mn=0.4%, Ti=0.4% Cu=0.2%, Si=0.2% | ||||
Ni:Cu 50:50 (at%) | |||||
NiCuOx | |||||
NiFe 19% | EB [99.9%] | EB [99.9%] | |||
NiO | |||||
NiO/Li 91/9 (%at) | |||||
NiO/Li 85/15 (%at) | |||||
NiO/Li 75/25 (%at) | |||||
Pb | RH3 | ||||
PbSn | RH3 | ||||
PBZT Pb(Zrx,Ti1-x)O3 (Ba 10.0 wt%) | |||||
Pd | EB [99.95%] | ||||
Polyethylene C2H4 | RH3 | ||||
Polypropylene C3H6 | RH3 | ||||
Polystyrene_ butadiene (C8H8)n (C4H6)m | RH3 | ||||
PMMA Poly(methyl methacrylate) [CH2C(CH3 (CO2CH3)]n | RH3 | ||||
Pt | EB [99.95%] | EB [99.95%] | |||
Ru | |||||
RuO2 | |||||
Sb | |||||
Se | RH4 [99.999%] | ||||
Si | EB [99.999%] | ||||
SiO | |||||
SiO2 | EB [99.99%] | ||||
Sn | RH1 [99.999%] | RH4 [99.999%] | |||
Ta | EB [99.9%] | ||||
TaN | |||||
TaO | |||||
Ta2O5 | |||||
Ti | EB [99.9%] | EB [99.9%] | EB [99.9%] | ||
TiC | |||||
TiO | |||||
TiO2 | |||||
TiO2:Cr 87:13 (%at) | |||||
TiO2:Cr 74:26 (%at) | |||||
Ti2O3 | EB [99.5%] | ||||
Ti3O5 | EB [99.5%] | ||||
TiN | |||||
V2O3 | |||||
V2O5 | |||||
V2O5:Ge 96:4 (%at) | |||||
V2O5:Ge 94.5:5.5 (%at) | |||||
V2O5:Ge 94:6 (%at) | |||||
V2O5:Ge 93.5:6.5 (%at) | |||||
V2O5:Ge 92.5:7.5 (%at) | |||||
W | |||||
WOx | |||||
WSi2 | |||||
W:Ti 10% (wt%) | |||||
Y | EB [99.9%] | RH1 [99.9%] | |||
Y2O3 | EB [99.99%] | ||||
Zn | |||||
ZrOx | |||||
ZrO2 | EB [99.3%] | ||||
ZTO Zn,Sn |
Sputtering / Laser ablation
- SP : Sputtering
- SP-DC : DC
- SP-RF : RF
- SP-PDC : Pulsed DC
- RSP : Reactive Sputtering
- LA : Laser Ablation
- LA1 : PLD Chamber n°1
- LA2 : PLD Chamber n°2
Element | SPIDER 600 | DP 650 | BAS 450 | PLD | OERLIKON CLUSTERLINE at CSEM | UNIVEX at PV-LAB |
Ag | SP-DC [99.99%] | |||||
AgCl | ||||||
Ag2O | RSP Ag [99.99%] | |||||
Al | SP-DC or SP-PDC [99.9995%] | SP-DC [99.9995%] | SP-DC | |||
Al:Cu:Si 4%,1% (95:4:1) | SP-DC | |||||
Al2O3 | SP-RF [99.99%] | |||||
AlN | RSP Al [99.9995%] | SP | ||||
AlSc 6.4 at% (Sc 10.2 wt%) | SP-PDC [99.9%] | |||||
AlSc 17.5 at% (Sc 26.1 wt%) | SP-PDC [99.99%] | |||||
AlSc 40.0 at% (Sc 52.6 wt%) | SP-PDC [99.9%] | |||||
AlScN | RSP AlSc 6.4 at% [99.9%] AlSc 17.5 at% [99.99%] AlSc 40.0 at% [99.9%] | |||||
Al:Si 0.5% | SP-DC | |||||
Al:Si 0.8% | SP-DC | |||||
Al:Si 1.0% | SP-DC [99.9995%] | SP-DC [99.999%] | SP-DC [99.999%] | |||
Al:Si 1.2% | SP-DC | |||||
Al:Si 1.5% | SP-DC | |||||
Al:Si 2.0% | SP-DC [99.9995%] (Si 1.95 wt% photometry) | |||||
Al:Si 4.0% | SP-DC [99.9995%] (Si 3.82 wt% photometry) | |||||
Au | SP-DC [99.99%] | SP-DC [99.99%] | ||||
AuGe12% | ||||||
AZO ZnO:Al2O3 98:2 (wt%) | SP-RF [99.99%] | SP (often installed) | ||||
Bi | SP-DC | |||||
Ca | ||||||
Co | ||||||
Cr | SP-DC [99.95%] | SP-DC | ||||
Cu | SP-DC [99.995%] | SP-DC | ||||
Fe | SP-RF [99.99%] | |||||
Fe2O3 | SP-RF [99.5%] | |||||
Fe:Co:B 60:20:20 (at%) | SP-RF [99.9%] | |||||
Ga | ||||||
Ge | Sp-DC [99.999%] | |||||
GeO2 | SP-RF [99.99%] | |||||
Ge:Sn 80:20 (at%) | SP-DC [99.99%] | |||||
Ge:Sn 84:16 (at%) | SP-DC [99.99%] | |||||
Ge:Sn 90:10 (at%) | SP-DC [99.99%] | |||||
Ge:Sn 94:6 (at%) | SP-DC [99.99%] | |||||
Hf | SP-DC | |||||
HfOx | RSP | |||||
HfO2:Gd 96.5:3.5 (%at) | LA1 | |||||
HZO | LA1 | |||||
IGZO InGaZnOx | SP-RF [99.99%] | SP | ||||
In | ||||||
Ir | SP-DC 99.9%] | |||||
IrOx | RSP Ir [99.9%] | |||||
ITO 90:10 wt% In2O3 – SnO2 | SP-RF [99.99%] | SP (often installed) | ||||
ITZO In,Zn,Sn | SP | |||||
IWO In,W | SP (often installed) | |||||
IZO In,Zn | SP | SP | ||||
LNO LaNiO3 | SP-RF [99.9%] | LA2 | ||||
La2O3 | ||||||
LiF | ||||||
Mg | ||||||
MgF2 | SP | |||||
MgO | SP-RF [99.95%] | |||||
Mo | SP-DC [99.99%] | SP-DC [99.95%] | SP-DC | |||
MoO3 | ||||||
MoOx | SP | |||||
Mo:Si 75:25 (at%) | SP-DC [99.9%] | |||||
Nb | SP-DC [99.9%] Ta = 334ppm | SP-DC [99.9%] | ||||
NbO | SP | |||||
Nb:Ti 50:50 (at%) | SP-DC [99.9%] | |||||
Nb:Ti 85:15 (at%) | SP-DC [99.9%] | |||||
NbTiN | RSP Nb:Ti 50:50 [99.9%] Nb:Ti 85:15 [99.9%] | |||||
Ni | SP-RF [99.95%] | |||||
NiCr 19% | ||||||
Ni:Cu 50:50 (at%) | SP-RF [99.95%] | |||||
NiCuOx | RSP Ni:Cu 50:50 at% [99.95%] | |||||
NiFe 19% | ||||||
NiO | RSP Ni [99.95%] SP-RF [99.9%] | SP | ||||
NiO/Li 91/9 (%at) | LA2 | |||||
NiO/Li 85/15 (%at) | LA2 | |||||
NiO/Li 75/25 (%at) | LA2 | |||||
Pb | ||||||
PbSn | ||||||
PBZT Pb(Zrx,Ti1-x)O3 (Ba 10.0 wt%) | LA2 | |||||
Pd | SP-DC [99.95%] | |||||
Polyethylene C2H4 | ||||||
Polypropylene C3H6 | ||||||
Polystyrene_ butadiene (C8H8)n (C4H6)m | ||||||
PMMA Poly(methyl methacrylate) [CH2C(CH3 (CO2CH3)]n | ||||||
Pt | SP-DC [99.95%] | SP-DC [99.99%] | SP-DC | |||
Ru | SP-DC [99.95%] | |||||
RuO2 | SP-RF Ru [99.95%] | |||||
Sb | SP-DC [99.999%] | SP-DC | ||||
Se | ||||||
Si | SP-DC Boron doped 5-30 mΩ.cm 2.1019 – 1018 at/cm3 [99.9999%] | SP-DC Boron doped 5-30 mΩ.cm [99.9999%] | SP-RF | |||
SiO | SP | |||||
SiO2 | SP-RF [99.99%] | SP-RF | ||||
Sn | SP-DC [99.998%] | |||||
Ta | SP-DC [99.98%] | SP-DC [99.99%] | SP-DC | |||
TaN | SP-RF [99.95%] | |||||
TaO | SP | |||||
Ta2O5 | SP-RF [99.99%] | |||||
Ti | SP-DC [99.995%] | SP-DC [99.995%] | SP-DC [99.995%] | SP | ||
TiC | SP-RF [99.5%] | |||||
TiO | SP | |||||
TiO2 | RSP Ti [99.995%] SP-RF [99.5%] | SP-RF [99.99%] | SP-RF | |||
TiO2:Cr 87:13 (%at) | LA2 [99.9%] (no process available!) | |||||
TiO2:Cr 74:26 (%at) | LA2 [99.9%] (no process available!) | |||||
Ti2O3 | ||||||
Ti3O5 | ||||||
TiN | RSP Ti [99.995%] | SP-RF [99.5%] | LA1 [99.5%] (no process available!) | |||
V2O3 | LA1 | |||||
V2O5 | SP-RF [99.9%] | LA1 | ||||
V2O5:Ge 96:4 (%at) | LA1 [99.9%] | |||||
V2O5:Ge 94.5:5.5 (%at) | LA1 [99.9%] | |||||
V2O5:Ge 94:6 (%at) | LA1 [99.9%] | |||||
V2O5:Ge 93.5:6.5 (%at) | LA1 [99.9%] | |||||
V2O5:Ge 92.5:7.5 (%at) | LA1 [99.9%] | |||||
W | SP-DC [99.95%] | SP-DC [99.95%] | SP-DC [99.95%] | |||
WOx | RSP W [99.95%] | |||||
WSi2 | SP-DC [99.5%] | |||||
W:Ti 10% (wt%) | SP-DC [99.99%] | SP-DC [99.99%] | SP-DC [99.99%] | |||
Y | ||||||
Y2O3 | ||||||
Zn | SP-DC [99.99%] | |||||
Zr | SP-DC [99.2%] (Zr + Hf) Hf < 4.5% | |||||
ZrOx | RSP Zr [99.2%] (Zr + Hf) Hf < 4.5% | |||||
ZrO2 | ||||||
ZTO Zn,Sn | SP |