Bruker Dektak XT

RESERVATIONS RULES AND BILLING POLICY:

  1. Booking : No restriction
  2. Reservtion names must be correspond to operators
  3. Billing : Processing time
  4. No penalty fees in case of user’s no show

CONTENTS:

I. Equipement_description

II. Quick measurement (2D)

III. 3D measurement

IV. User manuel

V. Gallery

I. Equipement description

The DektakXT stylus surface profiler is an advanced thin and thick film step height measurement tool with the following characteristics:

  • Equipment compatible with 2”, 4”, 6” and 8” wafers
  • Selectable magnification, 1 to 4mm FOV
  • Scan Length Range 55 mm with stitching option
  • Vertical range 1 mm
  • Step-height repeatability of 5A
  • N-Lite+ Low Force with 0.03 to 15mg
  • 3D stress and 3D mapping

II. Quick measurement (2D)

III. 3D measurement

IV. User manuel

V. Gallery