KLA Tencor D600

RESERVATIONS RULES AND BILLING POLICY:

  1. Booking : No restriction
  2. Reservtion names must be correspond to operators
  3. Billing : Processing time
  4. No penalty fees in case of user’s no show

CONTENTS:

I. Equipement description

II. Quick measurement

III. User_manuel

I. Equipement description

The D600 stylus surface profiler is an advanced thin and thick film step height measurement tool with the following characteristics:

  • Equipment compatible with 2”, 4”, 6” and 8’’ wafers
  • 3780 x 3120 um FOV
  • x4 digital zoom
  • Scan Length Range 55 mm with stitching option
  • Vertical range 1 mm
  • Step-height repeatability of 5A
  • Force range 0.03 to 15mg

II. Quick measurement

III. User manual

D Series User Manual