Sawatec LSM-250 for MISC polymers

To be read first:

  • SOP validation: Any material that is being spin-coated on the Sawatec coater must be approved by the CMi Staff! A standard operating procedure (SOP) is required and must be validated to use any new material on the system.
  • Cross-Contamination: Different materials with non-compatible chemistry are being coated on the Sawatec coater. Make sure to clean the chuck after each working session. A dedicated trash-bin is available to throw away contaminated material.

  • Please immediately inform the CMi staff in case of problems with the equipment.


  1. No booking restrictions.
  2. 24/7 booking/use is possible with CMi+1 extended access.
  3. Reservation names must correspond to operators.


  1. Introduction
  2. Equipement description
  3. Users manuals
  4. Links
  5. Pictures gallery

I. Introduction

The Sawatec coater line for MISC polymers is equipped with a bench-mounted LSM-250 spin-coating unit and two Präzitherm PZ 28-2 ET / PR 5 SR hotplate & controller units from Harry Gestigkeit GMBH. One hotplate is equipped with a cover and input for nitrogen gas for baking under N2 flow.

This coating line is dedicated to the coating of non-standard (i.e. other than novolak-based photoresists) thin films. This includes but is not restricted to:

  • Polymer molecules in aqueous solution for sacrificial layer applications: DEXTRAN, PAA, PSS, PVA, …
  • Spin-on dielectrics/glass, spin-on dopants (boron, phosphorous, etc…)
  • Conductive polymers: PEDOT:PSS, Nafion
  • Unsafe polymer/photoresists diluted with non-traditional, unsafe solvent: BCB Cyclotene, Omnicoat, ELPAC PA-5500 H, Solvene/PVDF, …

II. Equipment description

Sawatec manual coater:

  • Compact spin-coater with in-deck configuration
  • Handle wafers up to 8″ diameter
  • Minimum chip size: 10mm * 10mm
  • Rotation speeds up to 6’000 RPM
  • Spin programs with up to 24 steps.

Available chucks:

Two chucks, one for 4 inch wafers, one for chips (minimum 10mm * 10mm), are available directly at the equipment. Please contact the staff if your samples are not compatible with these two chucks.

Präzitherm hotplates:

  • Precision hotplates PTZ 28-2 ET combined with PR 5 SR controller
  • Maximum tempearture 350 °C, precision +/- 0.5 °C
  • Hotplate surface 280 mm x 200 mm
  • Programmable temperature ramps with up to 5 steps
  • Second hotplate equipped with cover and N2 line for nitrogen ambiant curing

III. User manuals

IV. Links

V. Pictures gallery