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rebuiLT
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#404 (no title)
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4D urban model of the city of Sion
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Autonomous car: what future for mobility?
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Toward an innovative mobility for teenagers in Europe
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Urban environments, lifestyles and leisure mobility
Long-distance «reversible» mobilities in Europe
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Nyon Paléo Festival without car
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Real-time pollution monitoring
Interoperability platform between Building Information Modeling and Building Energy Modeling
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Comparison of storage solutions in car batteries
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Energy harvesting from fluid flow for autonomous actuators
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Facility location integrated with vehicle routing based on demand
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Team sports analysis via image-based tracking
Assistive control strategies with lower limb exoskeletons
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Qiagen QiaCube automated DNA/RNA extraction
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Workshop, Nov 24, 2021
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MSE-636 | Scanning Electron Microscopy Techniques
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DUV (λ = 248nm) inline track & stepper
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ASML PAS 5500/350C
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TEL Clean Track ACT-8
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Süss ACS200 GEN3
EVG 150 – AUTOMATIC RESIST PROCESSING CLUSTER
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Hamatech HMR900
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ATMsse OPTIspin SB20
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ATMsse OPTIspin SB20 Manual
Sawatec LSM-250 & HP-200
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Sawatec LSM-250 & HP-200 Manual
Sawatec LSM-200 & HP-401-Z
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Sawatec LSM-200 & HP-401-Z Manual
Sawatec LSM-250 for MISC polymers
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Sawatec LSM-250 MISC Manual
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Heidelberg Instruments VPG200
Heidelberg Instruments MLA150 – 1 & 2
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MLA150 Manual
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Nanoscribe Photonic Professional GT+
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Nanoscribe PPGT+ Manual
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Süss MA6Gen3
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MA6 Gen3 Manual
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Plade Solvent Z01
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Plade Solvent, Lift-off Manual
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YES 310TA, Vacuum cure & HMDS vapor prime oven
Accuplate, hotplate for SU-8 PEB and hardbake
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Accuplate Manual
Dataplate, hotplate for SU-8 softbake, PEB or hardbake
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Dataplate Manual
Heraeus T6060, multipurpose oven
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Ion Beam Etching
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Veeco Nexus IBE350
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STS Multiplex ICP
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Oxford PRS900
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SPTS uEtch
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STEAG MECAPOL 460 – CMP (CHEMICAL MECHANICAL POLISHING)
Alpsitec E460 F – CMP (Chemical Mechanical Polishing)
Post CMP Cleaning System GnP Cleaner 428
DAG810 – AUTOMATIC SURFACE GRINDER
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UFT Piranha
UFT Resist
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Plade Six Sigma KOH
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Protek Protective Stop Layer
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Plade RCA
ATOMIC LAYER DEPOSITION BENEQ TFS200 (ALD 1)
ATOMIC LAYER DEPOSITION BENEQ TFS200 (ALD 2)
RTP JETFIRST 200
ROVAK Flash Lamp Annealing System Semi-Line 3.0
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Alliance-Concept EVA 760
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Leybold Optics LAB 600H
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Alliance-Concept DP 650
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Pulsed Laser Deposition
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Solmates SMP 800
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Available PVD targets in CMi
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Desaules, wet bench for electroplating
Silicet Electroplating unit, Cu
Comelec C-30-S
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Bruker FastScan AFM
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FEI Nova 600 NanoLab
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Tencor Alpha-Step 500
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Krüss DSA-30E
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Krüss DSA-30E Manual
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Sopra GES 5E
Woollam RC2
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Nanospec AFT-6100
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Toho Technology FLX 2320-S
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Electrical measurement
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Filmetrics R50 – 200 – 4PP
AIT CMT-SR2000N 4-Point Probe Measurement System
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Süss PM8 Manual
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Microscopes at CMi
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Leica DM8000
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Süss SB6
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Ebeam Lithography
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ECPS – Laminar-turbulent patterns
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