Ebeam – Operation Manuals

Control Computer

Description of the working environments on the main ebeam tool control computer in zone 7 of the cleanroom.

Loading & Unloading

Procedure for safe loading and unloading of a sample holder to and from the ebeam tool.

Alignment Microscope

Checking the sample height and measuring the writing position prior to loading of the holder into the ebeam tool.


Available holders for substrates: 50mm, 75mm, 100mm, 150mm, 5inch mask, piece-parts