Hamatech HMR900

To be read first:

  • Chucks did not use vacuum clamping. Only mechanical edge stops hold plates during processing. Take care for correct substrate loading loading
  • Please immediately inform the CMi staff in case of problems with the equipment.


  1. No booking restrictions.
  2. Reservation names must correspond to operators.


  1. Introduction
  2. Equipement description
  3. Users manuals
  4. Main recipe listing
  5. Pictures gallery

I. Introduction

The Hamatech HMR900 is a tool dedicated for Cr-plate wet processing or cleanning. Three dedicated medias are installed for successive chemical treatment of standard Cr-blanks (developing exposed resist – Cr wet etching – resist striping) with intermediate DI water rinse and final drying.

The tool is designed to handle square plates up to 7” x 7” (Cr-blank for mask aligner or reticule for DUV stepper)

II. Equipment description

Technical characteristics:

Hamatech HMR900 mask processor:

  • Manual loading and unloading of the substrates
  • Multi-size chuck for square plate 4” x 4” ¦ 5” x 5” ¦ 6” x 6”
  • Chuck for 7” x 7” square plate
  • Mechanical side edge substrate fixation
  • Smooth acceleration and speed occuracy  +/-1rpm
  • Direct and reverse rotation   (CW, CCW)
  • 20 recipes with 50 steps each can be programmed

III. User manual

IV. Nozzle & Programs Examples

V. Pictures gallery