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EPFL Research Facilities
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Center of MicroNanoTechnology
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Ebeam lithography
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III/V Lab - IPHYS
Optical microscopy
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Ebeam lithography
Photolithography
Etching
Thin films
Metrology
Packaging – Miscellaneous
III/V Lab - IPHYS
Microscopes at CMi
Nikon Eclipse LV150 microscope
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Leica DM8000
Nikon Optiphot 200, inspection microscope
Nikon Optiphot 150, inspection microscope
Nikon MM 40, inspection and 2-D metrology microscope
Mitutoyo, inspection microscope
Nikon Eclipse LV150 microscope
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Nikon Eclipse LV150 microscope
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