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Workshop, Nov 24, 2021
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MSE-636 | Scanning Electron Microscopy Techniques
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Sawatec LSM-250 MISC Manual
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Nanoscribe Photonic Professional GT+
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Süss MA6Gen3
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Plade Solvent Z01
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Plade Solvent, Lift-off Manual
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YES 310TA, Vacuum cure & HMDS vapor prime oven
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Accuplate Manual
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Ion Beam Etching
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STS Multiplex ICP
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SPTS uEtch
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STEAG MECAPOL 460 – CMP (CHEMICAL MECHANICAL POLISHING)
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Post CMP Cleaning System GnP Cleaner 428
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UFT Piranha
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Protek Protective Stop Layer
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Plade RCA
ATOMIC LAYER DEPOSITION BENEQ TFS200 (ALD 1)
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RTP JETFIRST 200
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PECVD
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Oxford Instruments PlasmaPro 100 ICPCVD
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Alliance-Concept EVA 760
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Solmates SMP 800
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Desaules, wet bench for electroplating
Silicet Electroplating unit, Cu
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Bruker FastScan AFM
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Tencor Alpha-Step 500
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Krüss DSA-30E
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Süss PM8 Manual
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Microscopes at CMi
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Leica DM8000
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Süss SB6
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ECPS – Laminar-turbulent patterns
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EPFL Day of International Research 2022
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