Helios G4 PFIB UXe is dedicated to large volume 3D characterization, cross sectioning, Ga+ free TEM sample preparation and precise micromachining.
- Elstar™ SEM Electron Column with high-current UC+ monochromator technology – ultimate image resolution at
low beam energies - Xenon Plasma FIB (PFIB 2.0) Column
- FIB current range: 10 pA – 2.5 μA
- Gas injection system: C, Pt, W
- Detectors:
- ETD (Everhart Thornley Detector) – secondary electron (SE) and backscatter electron (BSE) mode
- TLD (Through Lens Detector) – SE and BSE collection
- ICE – collects secondary ions (SI) or electrons (SE, BSE)
- ICD (In-Column Detector) – detects BSE scattered close to the electron beam axis, it provides high Z-contrast signal
- UltraDry EDS detector