Zeiss Merlin

The Zeiss Merlin is an ultra-high resolution FE-SEM (Field Emission SEM). The Gemini II column allows scanning modes with different probe currents; from few pA for high resolution imaging up to 300 nA for analytical purposes.

Equipped with: standard Everhart-Thornley secondary-electron (SE) detector; Gemini II column with Inlens and EsB (Energy selective BSE) detectors; insertable 4 quadrant backscattered electron (BSE) detector; insertable annular dark and bright STEM detector; two Oxford Inst. EDX detectors