FEI Teneo SEM

Installed in spring 2015, the Teneo is an advanced Scanning Electron Microscope (SEM) instrument that offers unprecedented contrast and versatility to metals researchers, and nanotechnology researchers working with a variety of materials and devices. Teneo is a Schottky Field Emission SEM that combines high- and low-voltage ultra-high resolution capabilities with a non-immersion lens design together with a low vacuum mode (up to 50Pa) for charge compensation on non-conductive material.

Features and specifications:

Voltage: 0.2-30 keV Schottky FEG

Beam current: 1pA to 400 nA

SEM resolution: 1 nm at 30 kV; 1.6 nm at 1 kV

Pixel density: 768 x 512, 1536 x 1024, 3072 x 2048, 6144 x 4096

Detection:

  • Standard secondary-electron Everhart-Thornley detector (SED)
  • Trinity detection system, comprised of a segmented, lower in-lens detector (T1), an upper in-lens detector (T2) and an in-column detector (T3)
  • Dedicated Low Vacuum secondary electron detector to provide charge-free topographic contrast imaging of non-conductive samples
  • EDX detector (XFlash Silicon drift detector