Zeiss CrossBeam


Zeiss CrossBeam 540 is a new generation of dual beam tools. It is a combination of a high resolution field emission scanning electron microscope (FE-SEM) with the processing ability of a next-generation focused ion beam (FIB).

This tool is dedicated especially for 3D tomography; cross sectioning and TEM lamella preparation.

Operated since 2018.

Equipped with:

  • standard Everhart-Thornley secondary-electron (SE) detector; Gemini II column with Inlens and EsB (Energy selective BSE) detectors; Oxford Inst. EDX detector
  • Gas injection system (GIS) – carbon and platinum
  • Kleindiek manipulator