Zeiss CrossBeam 540 is a new generation of dual beam tools. It is a combination of a high resolution field emission scanning electron microscope (FE-SEM) with the processing ability of a next-generation focused ion beam (FIB).
Operated since 2018.
- standard Everhart-Thornley secondary-electron (SE) detector; Gemini II column with Inlens and EsB (Energy selective BSE) detectors; Oxford Inst. EDX detector
- Gas injection system (GIS) – carbon and platinum
- Kleindiek manipulator