Ion beam thinning for SEM samples

For low energy surface preparation for SEM cross section or planar viewing.

 

 

CIME Ion miller:

1 Gatan ILION II

Features:

  • low incidence angle 0-10°, sectorial rotation of the sample, Voltage: 0,1-8 kV
  • Vacuum load-lock and liquid nitrogen cold stage to provide rapid workflows on beam sensitive samples
  • Real-time observation of the polishing process including an optical microscope with digital imaging; images can be stored and analyzed with DigitalMicrograph® software from Gatan
  • Repeatable results from recipes and operation of the Ilion™ II via a 10″ color touch screen interface
  • Damage-free surfaces for analytical techniques, such as cathodoluminescence and EBSD, where the signal is generated near the surface

 

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