Method and Device for Determining Plasma Characteristics

Complex Image Method schematic

One idea of the measurement method is to determine the plasma complex conductivity based on a mutual inductance between a measurement probe and the plasma. The mutual inductance results from currents induced in the plasma which are inductively coupled to the probe current and which affect the impedance of the inductive measurement probe in the proximity of the plasma. The Complex Image Method can be used to calculate the mutual inductance between the antenna and the plasma. By measuring the probe impedance, the electrical plasma complex conductivity, plasma parameters, such as the electron density and the electron-neutral collision frequency, can be estimated.