IPHYS has extensive facilities for micro- and nano-fabrication and characterization, including specialized III/V lab clean rooms, thin films deposition, dry etching, lithography, electron and atomic force microscopy. These are also open for use by interested researchers from other Institutes at EPFL.
To use our clean room you must have passed the CMi introduction course
Then you can ask for “training request” and attach your porcess flow to the request, you will find us in zone 50, 51 and 52.
Situation in PH Building –>–>
Head of clean room
Eliott Billy Wunderli (apprenti)
Useful links: Center of Micronanotechnology CMI