Clean Rooms

IPHYS has extensive facilities for micro- and nano-fabrication and characterization, including specialized III/V lab clean rooms, thin films deposition, dry etching, lithography, electron and atomic force microscopy, and photo- and cathodo-luminescence. These are also open for use by interested researchers from other Institutes at EPFL.

Our facilities 

Situation in PH Building  –>–>


Head of clean room                                     

Nicolas Leiser

+41 21 69 33426
[email protected]

Laurence Carlin
+41 21 69 35475
[email protected]

Technical staffs                                

Yoan Trolliet
Damien Trolliet
Adrien Theytaz (apprenti)


Useful links: Center of Micronanotechnology CMI