Publications

2024

Towards standardisation of parameter reporting for melt electrowriting

S. Menke; B. Tandon; J. Brugger 

2024

Performance Comparison of Shape Memory Polymer Structures Printed by Fused Deposition Modeling and Melt Electrowriting

B. Tandon; N. Sabahi; R. Farsi; T. Kangur; G. Boero et al. 

Advanced Materials Technologies. 2024. DOI : 10.1002/admt.202400466.

X-Band Single Chip Integrated Pulsed Electron Spin Resonance Microsystem

R. Farsi; N. Sahin Solmaz; M. Maury; G. Boero 

Analytical Chemistry. 2024. DOI : 10.1021/acs.analchem.4c02769.

Development of core-shell lipid microneedles for sublingual delivery

B. T. M. Vignon 

2024.

Melt Electro-Writing for Wound Repair and Drug Delivery with Lipid Medium

O. Gubelmann 

2024.

Designing of Bridges on Stencils: Calculation and Simulation

M. Oulare 

2024.

Electrowriting of SU-8 Microfibers

D. A. Sandoval Salaiza; N. D. Valsangiacomo; N. U. Dinç; M. Yildirim; P. D. Dalton et al. 

Polymers. 2024. Vol. 16, num. 12. DOI : 10.3390/polym16121630.

Semester Project Report (2024 Spring) Grayscale thermal scanning probe lithography in photonic applications

L. Chang 

2024.

[n]Cycloparaphenylenes as Compatible Fluorophores for Melt Electrowriting

P. C. Hall; H. W. Reid; I. Liashenko; B. Tandon; K. L. O’Neill et al. 

Small. 2024. DOI : 10.1002/smll.202400882.

A continuous-wave and pulsed X-band electron spin resonance spectrometer operating in ultra-high vacuum for the study of low dimensional spin ensembles

F. H. Cho; J. Park; S. Oh; J. Yu; Y. Jeong et al. 

Review Of Scientific Instruments. 2024. Vol. 95, num. 6, p. 063904. DOI : 10.1063/5.0189974.

Near-Room-Temperature Detection of Aromatic Compounds with Inkjet-Printed Plasticized Polymer Composites

M. M. Kiaee; T. Maeder; J. Brugger 

Acs Sensors. 2024. Vol. 9, num. 3, p. 1382 – 1390. DOI : 10.1021/acssensors.3c02406.

First Advanced Bilayer Scaffolds for Tailored Skin Tissue Engineering Produced via Electrospinning and Melt Electrowriting

F. Girard; C. Lajoye; M. Camman; N. Tissot; F. B. Pedurand et al. 

Advanced Functional Materials. 2024. DOI : 10.1002/adfm.202314757.

Tomographic microscopy of functionally graded polymer-derived SiCN ceramics with tunable gradients

L. Hageluken; M. G. Makowska; F. Marone; J. Brugger 

Materialia. 2024. Vol. 33, p. 102025. DOI : 10.1016/j.mtla.2024.102025.

2023

Towards optical MAS magnetic resonance using optical traps

L. Marti; N. S. Solmaz; M. Kern; A. Chu; R. Farsi et al. 

Journal Of Magnetic Resonance Open. 2023. Vol. 18, p. 100145. DOI : 10.1016/j.jmro.2023.100145.

Melt Electrowriting Report

A. Zedgitt 

2023.

Effects of Electrode Design on the Melt Electrowriting of Sinusoidal Structures

B. Tandon; A. B. Zuege; S. Luposchainsky; P. D. Dalton 

Advanced Engineering Materials. 2023. DOI : 10.1002/adem.202300335.

Liquid-in-a-MEMS: Encapsulation of Liquid in a Microcapsule by Inkjet Printing

Jongeon Park 

2023. 

LIQUID-IN-A-MEMS: ENCAPSULATION OF LIQUID IN A MICROCAPSULE BY INKJET PRINTING

J. Park; A. Bertsch; J. Brugger 

2023. 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Kyoto, Japan, 2023-06-25 – 2023-06-29.

Fabrication and Characterization of Lipid Sublingual Drug Delivery Device

N. Zaugg 

2023.

Nanoimprint stamp fabrication by combination of T-SPL and dry etching

G. Pellerin 

2023.

Nanoliter Liquid Packaging in a Bioresorbable Microsystem by Additive Manufacturing and its Application as a Controlled Drug Delivery Device

J. Park; A. Bertsch; C. Martin Olmos; J. Brugger 

Advanced Functional Materials. 2023. num. 2302385. DOI : 10.1002/adfm.202302385.

MEWron: An open-source melt electrowriting platform

A. Reizabal; T. Kangur; P. G. Saiz; S. Menke; C. Moser et al. 

Additive Manufacturing. 2023. Vol. 71, p. 103604. DOI : 10.1016/j.addma.2023.103604.

Biodegradable Implantable Microsystems

J. Park; J. Brugger 

2023. 2022 International Electron Devices Meeting (IEDM), San Francisco, CA, USA, December 3-7, 2022. p. 29.4.1 – 29.4.4. DOI : 10.1109/IEDM45625.2022.10019376.

Single Chip Dynamic Nuclear Polarization Microsystems

N. Sahin Solmaz / G. Boero (Dir.)  

Lausanne, EPFL, 2023. 

One-step fabrication of high refractive index inorganic nanostructures

E. Zanchetta; G. Della Giustina; A. Gandin; V. Auzelyte; G. Brusatin 

Journal Of Sol-Gel Science And Technology. 2023. Vol. 107, p. 122 – 132. DOI : 10.1007/s10971-021-05633-8.

Laser-Induced Forward Transfer of Functional Microdevices

Z. Yang / J. Brugger (Dir.)  

Lausanne, EPFL, 2023. 

Grayscale Nanopatterning by Thermal Scanning Probe Lithography

leonardo cele 

2023.

2022

Fabrication of Lipid Microstructure for Oral Drug Delivery Device

A. Duret 

2022.

Nanobridge Stencil Enabling High Resolution Arbitrarily Shaped Metallic Thin Films on Various Substrates

Y-C. Sun; G. Boero; J. Brugger 

Advanced Materials Technologies. 2022. DOI : 10.1002/admt.202201119.

Comparison of electrical and optical transduction modes of DNA-wrapped SWCNT nanosensors for the reversible detection of neurotransmitters.

P. Clement; J. Ackermann; N. Sahin-Solmaz; S. Herbertz; G. Boero et al. 

Biosensors & Bioelectronics. 2022. Vol. 216, p. 114642. DOI : 10.1016/j.bios.2022.114642.

Edge-Contact MoS2 Transistors Fabricated Using Thermal Scanning Probe Lithography

A. Conde-Rubio; X. Liu; G. Boero; J. Brugger 

Acs Applied Materials & Interfaces. 2022. Vol. 14, num. 37, p. 42328 – 42336. DOI : 10.1021/acsami.2c10150.

Nanopore Generation in Biodegradable Silk/Magnetic Nanoparticle Membranes by an External Magnetic Field for Implantable Drug Delivery

Y. Wang; G. Boero; X. Zhang; J. Brugger 

Acs Applied Materials & Interfaces. 2022. Vol. 14, num. 35, p. 40418 – 40426. DOI : 10.1021/acsami.2c10603.

Multiscale microshaping of functionally graded polymer-derived SiCN ceramics

L. Hagelüken; M. Makowska; J. Brugger 

Ceramics in Europe 2022, Krakow, Poland, 10th – 14th July, 2022.

Ion Implantation for Single Dopant Based Quantum Hardware

Mehmet Kuzey Aydin 

2022.

Nanofabrication of hard mask for single dopant-based quantum hardware

Damien Bertrand 

2022.

Liquid encapsulated drug delivery device for acoustically-controlled release

L. Lacoume 

2022.

Melt Electrowriting of Lipids for drug delivery

H. Calamandrei 

2022.

Study of the enhanced electricity output of a sliding droplet-based triboelectric nanogenerator for droplet sensor design

W. Xu; X. Li; J. Brugger; X. Liu 

Nano Energy. 2022. Vol. 98, p. 107166. DOI : 10.1016/j.nanoen.2022.107166.

SU-8 cantilever with integrated pyrolyzed glass-like carbon piezoresistor

J. Jang; G. Panusa; G. Boero; J. Brugger 

Microsystems & Nanoengineering. 2022. Vol. 8, num. 1, p. 22. DOI : 10.1038/s41378-022-00351-9.

Precise Capillary‐Assisted Nanoparticle Assembly in Reusable Templates

H. Yu; A. Conde Rubio; H-C. Wang; O. Martin; G. Boero et al. 

Particle & Particle Systems Characterization. 2022.  p. 1 – 8, 2100288. DOI : 10.1002/ppsc.202100288.

NMR spectroscopy of a single mammalian early stage embryo

G. Sivelli; G. M. Conley; C. Herrera; K. Marable; K. J. Rodriguez et al. 

Journal Of Magnetic Resonance. 2022. Vol. 335, p. 107142. DOI : 10.1016/j.jmr.2021.107142.

Multiscale 2D/3D microshaping of property-contrast polymer-derived SiCN

L. Hagelüken; M. Makowska; J. Brugger 

46th International Conference and Expo on Advanced Ceramics and Composites (ICACC2022), Virtual, January 24-28, 2022.

Tomographic Volumetric Additive Manufacturing of Silicon Oxycarbide Ceramics

M. Kollep; G. Konstantinou; J. Madrid-Wolff; A. Boniface; L. Hagelüken et al. 

Advanced Engineering Materials. 2022. Vol. 24, num. 7, p. 2101345. DOI : 10.1002/adem.202101345.

FABRICATION OF TRANSFERRED FLEXIBLE PMMA STENCIL LITHOGRAPHY

X. Liu; G. Boero 

2022

Experimental Analysis of Ductile Cutting Regime in Face Milling of Sintered Silicon Carbide

M. Groeb; L. Hagelüken; J. Groeb; W. Ensinger 

Materials. 2022. Vol. 15, num. 7, p. 2409. DOI : 10.3390/ma15072409.

Scalable fabrication of functional nanostructures on stretchable substrates by capillary-assisted particle assembly and adhesion lithography

H. S-C. Yu / J. Brugger (Dir.)  

Lausanne, EPFL, 2022. 

Developing Melt Electrowriting on an Open-Source Fused Filament Fabrication Platform

T. Kangur 

2022.

Multiscale microshaping of functionally graded polymer-derived SiCN ceramics

L. Hagelüken / J. Brugger (Dir.)  

Lausanne, EPFL, 2022. 

Development of stencil lithography for stretchable interconnects

Y-C. Sun / J. Brugger (Dir.)  

Lausanne, EPFL, 2022. 

SPONTANEOUS FORMATION AND PROGRAMMABLE ORIENTATION OF SURFACE WRINKLES ON THERMOSENSITIVE RESIST

X. Liu; J. Brugger 

2022

2021

Multiscale 2D/3D microshaping and property tuning of polymer-derived SiCN ceramics

L. Hagelüken; P. V. Warriam Sasikumar; H-Y. Lee; D. Di Stadio; Y. Chandorkar et al. 

Journal of the European Ceramic Society. 2021. Vol. 42, num. 5, p. 1963 – 1970. DOI : 10.1016/j.jeurceramsoc.2021.12.044.

Stretchable Conductors Fabricated by Stencil Lithography and Centrifugal Force-Assisted Patterning of Liquid Metal

Y-C. Sun; G. Boero; J. Brugger 

ACS Applied Electronic Materials. 2021. Vol. 3, num. 12, p. 5423 – 5432. DOI : 10.1021/acsaelm.1c00884.

Spontaneous formation of ordered micro-wrinkles on a thermosensitive resist

X. Liu; M. Rostami; A. Conde Rubio; G. Boero; J. Brugger 

47th Micro and Nano Engineering Conference (MNE 2021), Turin, Italy, September 20-23, 2021.

High resolution meandering metal patterns enabled by nano-bridge stencil

Y-C. Sun; G. Boero; J. Brugger 

47th international Conference on Micro and Nano Engineering (MNE2021), Turin, Italy, September 20-23, 2021.

Freeform Microstructuring of Cast Polymer-Derived Ceramics by Sacrificial Direct Laser Writing

L. Hagelüken; Ho-Yun Lee; David di Stadio; J. Brugger 

47th international Conference on Micro and Nano Engineering (MNE2021), Turin, Italy, September 20-23, 2021.

Edge-contact MoS2 transistors made by thermal scanning probe lithography

A. Conde Rubio; X. Liu; G. Boero; J. Brugger 

Micro and Nano Engineering Conference, Turin, Italy, September 20th – 23rd, 2021.

Laser-induced forward transfer of functional SU-8 microparts

Z. Yang; G. Boero 

47th international Conference on Micro and Nano Engineering (MNE2021), Turin, Italy, September 20-23, 2021.

Precise Capillary-Assisted Nanoparticle assembly in Reusable Templates

H. S. YU; A. Conde Rubio 

47th Micro and Nano Engineering Conference (MNE 2021), Turin, Italy, September 20-23, 2021.

A Low Power 35 GHz HEMT Oscillator for Electron Spin Resonance Spectroscopy

N. Sahin-Solmaz; A. V. Matheoud; G. Boero 

2021. 2021 IEEE Radio Frequency Integrated Circuits Symposium (RFIC), Atlanta, GA, USA, June 7-9, 2021. p. 19 – 22. DOI : 10.1109/RFIC51843.2021.9490487.

Thermal scanning probe lithography for 2D material-based gas sensing

B. Erbas 

2021.

Fabrication of biocompatible metallic structures on biodegradable polymer films by stencil lithography

L. Cacheur 

2021.

Optimization of MEW instrument components and their assembly

J. Mao 

2021.

Recent progress in silk fibroin-based flexible electronics

D-L. Wen; D-H. Sun; P. Huang; W. Huang; M. Su et al. 

Microsystems & Nanoengineering. 2021. Vol. 7, num. 1, p. 35. DOI : 10.1038/s41378-021-00261-2.

Next Generation Cell Culture Tools Featuring Micro- and Nanotopographies for Biological Screening

J. Carthew; H. H. Abdelmaksoud; K. J. Cowley; M. Hodgson-Garms; R. Elnathan et al. 

Advanced Functional Materials. 2021.  p. 2100881. DOI : 10.1002/adfm.202100881.

Printed Polymer Composite Sensors for Low-Power, Near Room-Temperature Detection and Classification of VOCS

M. Mahdi Kiaee; T. Maeder; J. Brugger 

2021. 34th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021), Gainesville, FL, USA (virtual event), January 25-29, 2021. p. 274 – 277. DOI : 10.1109/MEMS51782.2021.9375208.

Precision Surface Microtopography Regulates Cell Fate via Changes to Actomyosin Contractility and Nuclear Architecture

J. Carthew; H. H. Abdelmaksoud; M. Hodgson-Garms; S. Aslanoglou; S. Ghavamian et al. 

Advanced Science. 2021. Vol. 8, num. 6, p. 2003186. DOI : 10.1002/advs.202003186.

Capillary assisted particle assembly for high aspect ratio nanorods

B. Leis 

2021.

PDC microfabrication through KOH-etched Si mould casting

D. Di Stadio 

2021.

2D material-based gas sensing device

E. Gajo 

2021.

Experimental study of the strain patterned in 2D materials using thermal nanoimprint lithography

J. Lemonde 

2021.

Microfabricated nanomotion detectors for rapid cells viability tests

A. Malovichko / G. Boero; S. Kasas (Dir.)  

Lausanne, EPFL, 2021. 

A Glass-Like Carbon Mems Strain Sensor

J. Jang; G. Panusa; G. Boero; J. Brugger 

2021. 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), ELECTR NETWORK, Jun 20-25, 2021. p. 871 – 874. DOI : 10.1109/TRANSDUCERS50396.2021.9495726.

Thermomechanical nanocutting and nanostraining of 2D materials

X. Liu; J. Brugger 

Heidelberg Instruments NanoFrazor Webinar series, 2021-02-09.

Inkjet-printed polymer composites for the detection of volatile organic compounds

M. Kiaee / J. Brugger; T. Maeder (Dir.)  

Lausanne, EPFL, 2021. 

Hierarchical Micromold Structuring via 2PP Micro-Stereolithography

H-Y. Lee 

2021.

2020

Inkjet‐Printed Composites for Room‐Temperature VOC Sensing: From Ink Formulation to Sensor Characterization

M. Kiaee; T. Maeder; J. Brugger 

Advanced Materials Technologies. 2020.  p. 1 – 11, 2000929. DOI : 10.1002/admt.202000929.

Electrochemical performance of polymer-derived SiOC and SiTiOC ceramic electrodes for artificial cardiac pacemaker applications

J. Jang; P. V. Warriam Sasikumar; F. Navaee; L. Hagelüken; G. Blugan et al. 

Ceramics International. 2020. Vol. 47, num. 6, p. 7593 – 7601. DOI : 10.1016/j.ceramint.2020.11.098.

Designs and Characterization of Subunit Ebola GP Vaccine Candidates: Implications for Immunogenicity

V. Agnolon; D. Kiseljak; M. J. Wurm; F. M. Wurm; C. Foissard et al. 

Frontiers In Immunology. 2020. Vol. 11, p. 586595. DOI : 10.3389/fimmu.2020.586595.

NMR microsystem for label-free characterization of 3D nanoliter microtissues

M. Grisi; G. M. Conley; K. J. Rodriguez; E. Riva; L. Egli et al. 

Scientific Reports. 2020. Vol. 10, p. 1 – 9, 18306. DOI : 10.1038/s41598-020-75480-0.

Thermomechanical Nanostraining of Two-Dimensional Materials

X. Liu; A. K. Sachan; S. T. Howell; A. Conde-Rubio; A. W. Knoll et al. 

Nano Letters. 2020. Vol. 20, num. 11, p. 8250 – 8257. DOI : 10.1021/acs.nanolett.0c03358.

Reversible Drug Delivery: Thermal and pH Sensitive Composite Membrane for On‐Demand Drug Delivery by Applying an Alternating Magnetic Field (Adv. Mater. Interfaces 17/2020)

Y. Wang; G. Boero; X. Zhang; J. Brugger 

Advanced Materials Interfaces. 2020. Vol. 7, num. 17, p. 2070095. DOI : 10.1002/admi.202070095.

On the effect of linear feedback and parametric pumping on a resonator’s frequency stability

Z. Mohammadi; T. L. Heugel; J. M. L. Miller; D. D. Shin; H-K. Kwon et al. 

New Journal Of Physics. 2020. Vol. 22, num. 9, p. 093049. DOI : 10.1088/1367-2630/abb1dd.

Electrical Conductivity Tuning of Polysilazane-Derived Silicon Carbonitride Ceramics

L. Hagelüken; P. Vallachira Warriam Sasikumar; G. Blugan 

Electroceramics XVII, Online (Darmstadt, Germany), Août 24-27, 2020.

Analysis of volumetric mass transfer coefficient (k(L)a) in small- (250 mL) to large-scale (2500 L) orbitally shaken bioreactors

L. Zhu; B. Xu; X. Wu; J. Lei; D. L. Hacker et al. 

3 Biotech. 2020. Vol. 10, num. 9, p. 397. DOI : 10.1007/s13205-020-02352-9.

Cracks, porosity and microstructure of Ti modified polymer-derived SiOC revealed by absorption-, XRD- and XRF-contrast 2D and 3D imaging

M. Makowska; P. V. W. Sasikumar; L. Hagelüken; D. F. Sanchez; N. Casati et al. 

Acta Materialia. 2020. Vol. 198, p. 134 – 144. DOI : 10.1016/j.actamat.2020.07.067.

Simulation of silicon KOH and dry etching methods for micromould fabrication

L. Tribolet 

2020.

Microfabrication on bioresorbable materials

A. Poidevin 

2020.

Review of Liquid-Solid Triboelectric Generator

S-L. Wang 

2020.

Part I. Effect of plasticizer on the sensing performance of inkjet-printed PVP/CB composite Part II. Nanostructuring of 2D materials for improved gas sensing performance

N. Cai 

2020.

Review on Crystallization and Phase Change of Low-Dimensional Materials Using Thermal Probes

F. Hartmann 

2020.

Thermal and pH Sensitive Composite Membrane for On-Demand Drug Delivery by Applying an Alternating Magnetic Field

Y. Wang; G. Boero; X. Zhang; J. Brugger 

Advanced Materials Interfaces. 2020. Vol. 7, num. 17, p. 2000733. DOI : 10.1002/admi.202000733.

The Delivery of alpha 1-Antitrypsin Therapy Through Transepidermal Route: Worthwhile to Explore

S. Tumpara; B. Martinez-Delgado; G. Gomez-Mariano; B. Liu; D. S. DeLuca et al. 

Frontiers In Pharmacology. 2020. Vol. 11, p. 983. DOI : 10.3389/fphar.2020.00983.

Immobilization of single-walled carbon nanotubes by dielectrophoresis using a microfluidic channel

P. Mosser 

2020.

Single chip dynamic nuclear polarization microsystem

N. Sahin Solmaz; M. Grisi; A. V. Matheoud; G. Gualco; G. Boero 

Analytical Chemistry. 2020. Vol. 92, num. 14, p. 9782 – 9789. DOI : 10.1021/acs.analchem.0c01221.

Thermomechanical Nanocutting of 2D Materials

X. Liu; S. T. Howell; A. Conde-Rubio; G. Boero; J. Brugger 

Advanced Materials. 2020.  p. 2001232. DOI : 10.1002/adma.202001232.

Additive micro-manufacturing of crack-free PDCs by two-photon polymerization of a single, low-shrinkage preceramic resin

G. Konstantinou; E. Kakkava; L. Hagelüken; P. V. Warriam Sasikumar; J. Wang et al. 

Additive Manufacturing. 2020.  p. 101343. DOI : 10.1016/j.addma.2020.101343.

In Vitro Cytocompatibility Assessment of Ti-Modified, Silicon-oxycarbide-Based, Polymer-Derived, Ceramic-Implantable Electrodes under Pacing Conditions

P. V. W. Sasikumar; E. Mueller; P. Clement; J. Jang; E. Kakkava et al. 

Acs Applied Materials & Interfaces. 2020. Vol. 12, num. 15, p. 17244 – 17253. DOI : 10.1021/acsami.0c01465.

Thermal scanning probe lithography-a review

S. T. Howell; A. Grushina; F. Holzner; J. Brugger 

Microsystems & Nanoengineering. 2020. Vol. 6, num. 1, p. 21. DOI : 10.1038/s41378-019-0124-8.

Simply Structured Wearable Triboelectric Nanogenerator Based on a Hybrid Composition of Carbon Nanotubes and Polymer Layer

M. Su; J. Brugger; B. Kim 

International Journal Of Precision Engineering And Manufacturing-Green Technology. 2020. Vol. 7, p. 683 – 698. DOI : 10.1007/s40684-020-00212-8.

Na3V2(PO4)(3)-Supported Electrospun Carbon Nanofiber Nonwoven Fabric as Self-Standing Na-Ion Cell Cathode

G. Meligrana; S. Ferrari; L. Lucherini; J. Cele; F. Colo et al. 

Chemelectrochem. 2020. Vol. 7, num. 7, p. 1652 – 1659. DOI : 10.1002/celc.202000345.

3D-Architecture Triboelectric Generator Using Deformable Liquid Metal

J. Shichao 

2020.

Cost-Effective Shape Memory Stamp for Laser Induced-Forward Transfer (LIFT)

W. Cui 

2020.

Level-line moirés by superposition of cylindrical microlens gratings

T. Walger; T. Besson; V. Flauraud; R. D. Hersch; J. Brugger 

Journal of the Optical Society of America. 2020. Vol. A37, num. 2, p. 209 – 218. DOI : 10.1364/JOSAA.37.000209.

Thermal Scanning Probe Lithography for low dimensional materials

L. Rüegg 

2020.

Electron Spin Resonance Magnetometers for Particle Accelerators

A. J. Beaumont / G. Boero; M. Buzio (Dir.)  

Lausanne, EPFL, 2020. 

Design Concerns for In-body Antennas Based on Frequency Analysis of Fundamental Radiation Limitations

Z. Sipus; M. Bosiljevac; D. Nikolayev; A. Skrivervik 

2020. 14th European Conference on Antennas and Propagation (EuCAP), Copenhagen, DENMARK, Mar 15-20, 2020. DOI : 10.23919/EuCAP48036.2020.9135679.

Transient Electronics for Smart Biodegradable Medical Implants

M. J. M. Rüegg / J. Brugger; G. Boero (Dir.)  

Lausanne, EPFL, 2020. 

Thermomechanical nanocutting of 2D materials using thermal scanning probe lithography

X. Liu; S. T. Howell; A. Conde Rubio; G. Boero; J. Brugger 

CMD2020GEFES, 2020 joint conference of the condensed matter divisions of EPS_CMD and RSEF-GEFES, Online, 31st August – 4th September, 2020.

3D-ARCHITECTURE TRIBOELECTRIC GENERATOR USING DEFORMABLE LIQUID METAL

S. Jia; X. Liu; J. Brugger 

2020

Thermal Responsive Silk Composite Membrane for Magnetic Field Triggered Controllable Drug Delivery

Y. Wang / J. Brugger; X. Zhang (Dir.)  

Lausanne, EPFL, 2020. 

Moiré effects produced by superpositions of micro-lens arrays

T. Walger / J. Brugger; R. Hersch (Dir.)  

Lausanne, EPFL, 2020. 

Studying the interactions between electro-magnetic elds and biological tissue

L. Kolly 

2020.

3D Printed Micro-Scaffolds Loaded by Inkjet Printing With in-Precise Amount of Drug

F. Zheng; J. Jang; C. Tse; J. Brugger 

2020. IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS), ELECTR NETWORK, Sep 27-30, 2020. p. 426 – 429. DOI : 10.1109/NEMS50311.2020.9265525.

Miniaturized mr device comprising a cell culture micro-chamber and method for manufacturing such a device

M. Grisi; G. Boero; J. Brugger; G. M. Conley 

ES2961924; JP7423084; EP3857247; EP3857247; US2022026379; JP2022502636; EP3857247; CN113167848; IL281764; WO2020065478.

2020.

2019

1D moiré shapes by superposed layers of micro-lenses

T. Walger; T. Besson; V. Flauraud; R. D. Hersch; J. Brugger 

Optics Express. 2019. Vol. 27, num. 26, p. 37419 – 37434. DOI : 10.1364/OE.27.037419.

Printed silk-fibroin-based triboelectric nanogenerators for multi-functional wearable sensing

D-L. Wen; X. Liu; H-T. Deng; D-H. Sun; H-Y. Qian et al. 

Nano Energy. 2019. Vol. 66, p. 104123. DOI : 10.1016/j.nanoen.2019.104123.

Biodegradable Wireless Microheaters for Transient Biomedical Implants

M. Rüegg; R. Blum; G. Boero; J. Brugger 

NanoBioTech-Montreux, Montreux, Switzerland, November 20, 2019.

Modeling of Total Ionizing Dose Degradation on 180-nm n-MOSFETs Using BSIM3

S. Ilik; A. Kabaoglu; N. S. Solmaz; M. B. Yelten 

Ieee Transactions On Electron Devices. 2019. Vol. 66, num. 11, p. 4617 – 4622. DOI : 10.1109/TED.2019.2926931.

Phase masks for electron microscopy fabricated by thermal scanning probe lithography

S. Hettler; L. Radtke; L. Grünewald; Y. Lisunova; O. Peric et al. 

Micron. 2019. Vol. 127, p. 102753. DOI : 10.1016/j.micron.2019.102753.

A 3D Microscaffold Cochlear Electrode Array for Steroid Elution

J. Jang; J. Kim; Y. C. Kim; S. Kim; N. Chou et al. 

Advanced Healthcare Materials. 2019.  p. 1900379. DOI : 10.1002/adhm.201900379.

Harnessing Poisson Effect to Realize Tunable Tunneling Nanogap Electrodes on PDMS Substrates for Strain Sensing

H. S. Yu; G. Boero; J. Brugger 

2019. 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, Germany, June 23-27, 2019. p. 2368 – 2371. DOI : 10.1109/TRANSDUCERS.2019.8808819.

Microwave inductive proximity sensors with sub-pm/Hz1/2 resolution

A. V. Matheoud; N. Sahin Solmaz; L. Frehner; G. Boero 

Sensors and Actuators A: Physical. 2019. Vol. 295, p. 259 – 265. DOI : 10.1016/j.sna.2019.05.041.

Liquid Assembly of Floating Nanomaterial Sheets for Transparent Electronics

Z. Su; H. S. C. Yu; X. Zhang; J. Brugger; H. Zhang 

Advanced Materials Technologies. 2019.  p. 1900398. DOI : 10.1002/admt.201900398.

Biodegradable Frequency‐Selective Magnesium Radio‐Frequency Microresonators for Transient Biomedical Implants

M. Rüegg; R. Blum; G. Boero; J. Brugger 

Advanced Functional Materials. 2019. Vol. 29, num. 39, p. 1903051. DOI : 10.1002/adfm.201903051.

CMOS and 3D Printing for NMR Spectroscopy at the Single Embryo Scale

M. Grisi; E. Montinaro; F. Vincent; L. Petho; M. C. Letizia et al. 

Chimia. 2019. Vol. 73, num. 7-8, p. 635 – 635. DOI : 10.2533/chimia.2019.635.

Planar plasmonic antenna arrays resolve transient nanoscopic heterogeneities in biological membranes

P. M. Winkler; R. Regmi; V. Flauraud; H. Rigneault; J. Brugger et al. 

2019. Joint 12th EBSA European Biophysics Congress / 10th IUPAP International Conference on Biological Physics (ICBP), Madrid, SPAIN, Jul 20-24, 2019. p. S107 – S107.

Film Morphology Effect on VOC Sensor Performance Fabricated by Drop-On-Demand Inkjet-Printing

M. M. Kiaee; T. Maeder; J. Brugger 

2019. 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS), Berlin, Germany, Jun 23-27, 2019. p. 1361 – 1364. DOI : 10.1109/TRANSDUCERS.2019.8808652.

Optimization of the Bosch process for micro-mold fabrication

S. Stettler 

2019.

Molding of Biodegradable Polymers for Drug Delivery Applications

T. TURNER 

2019.

A Low-Power Microwave HEMT $LC$ Oscillator Operating Down to 1.4 K

A. V. Matheoud; N. Sahin Solmaz; G. Boero 

IEEE Transactions on Microwave Theory and Techniques. 2019. Vol. 67, num. 7, p. 2782 – 2792. DOI : 10.1109/TMTT.2019.2916552.

Analog Control of Retainable Resistance Multistates in HfO2 Resistive-Switching Random Access Memories (ReRAMs)

C. Giovinazzo; J. Sandrini; E. Shahrabi; O. T. Celik; Y. Leblebici et al. 

Acs Applied Electronic Materials. 2019. Vol. 1, num. 6, p. 900 – 909. DOI : 10.1021/acsaelm.9b00094.

Ferrimagnetic resonance field sensors for particle accelerators

A. Beaumont; M. Buzio; G. Boero 

Review Of Scientific Instruments. 2019. Vol. 90, num. 6, p. 065005. DOI : 10.1063/1.5097508.

Self-Charging Energy Harvesting System for Wearables

X. Liu; J. Brugger; X. Wang 

2019.

Integration of SU8 lenses with 1310nm-wavelength wafer-fused vertical cavity surface emitting lasers (VCSELs)

M. Judelewicz; S. Jiguet; A. Caliman; D. Ellafi; A. Mereuta et al. 

LOPEC 2019.

Integration of functionalization layers on lab-on-skin platform by inkjet printing

J. Englert 

2019.

Data logger for vacuum desiccator

É. Clément 

2019.

Inkjet printing of polymer composites for gas sensing applications

C-T. Coen 

2019.

Identifying suitable drugs for inkjet printing

E. Richard 

2019.

FEM Modelisation of membrane deformation

A. Jordan 

2019.

Fabrication of 2D micro-lens arrays for moiré applications

M. Kaeppeli 

2019.

Biodegradable polymer for drug delivery applications

P. Donzier 

2019.

Electron Spin Resonance detectors from 400 MHz to 360 GHz

A. V. Matheoud / G. Boero (Dir.)  

Lausanne, EPFL, 2019. 

A single-chip integrated transceiver for high field NMR magnetometry

M. Grisi; G. M. Conley; P. Sommer; J. Tinembart; G. Boero 

Review Of Scientific Instruments. 2019. Vol. 90, num. 1, p. 015001. DOI : 10.1063/1.5066436.

Multi-ReRAM synapses for artificial neural network training

I. Boybat; C. Giovinazzo; E. Shahrabi; I. Krawczuk; J. Giannopoulos et al. 

2019. IEEE International Symposium on Circuits and Systems (IEEE ISCAS), Sapporo, JAPAN, May 26-29, 2019. DOI : 10.1109/ISCAS.2019.8702714.

Wearable Triboelectric Generator based on a Hybrid Mix of Carbon Nanotube and Polymer Layers

M. Su; J. Brugger; B. J. Kim 

2019. 18th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Daytona Beach, FL, Dec 04-07, 2018. DOI : 10.1088/1742-6596/1407/1/012047.

Transient Electronics: Biodegradable Frequency‐Selective Magnesium Radio‐Frequency Microresonators for Transient Biomedical Implants (Adv. Funct. Mater. 39/2019)

M. Rüegg; R. Blum; G. Boero; J. Brugger 

Advanced Functional Materials. 2019. Vol. 29, num. 39, p. 1970270. DOI : 10.1002/adfm.201970270.

Novel Wearable Triboelectric Generator based on a Hybrid Mix of Carbon Nanotube and Natural Polymer

M. Su; J. Brugger; K. Beomjoon 

MEMS, Seoul, Korea,

Process optimization for thick SU-8 micro mold fabrication

J. Oswald 

2019.

2018

Edge-contacted graphene with slope engineering by stencil lithography

R. Farzad 

2018.

Fast turnaround fabrication of silicon point-contact quantum-dot transistors using combined thermal scanning probe lithography and laser writing

C. Rawlings; Y. K. Ryu; M. Rüegg; N. Lassaline; C. Schwemmer et al. 

Nanotechnology. 2018. Vol. 29, num. 50, p. 505302. DOI : 10.1088/1361-6528/aae3df.

Fabrication of Biodegradable Membrane

R. Zhang 

2018.

Inkjet-printing polymer nanocomposite for detecting VOCs

2018. Eurosensors.

Unusually Long-Lived Photocharges in Helical Organic Semiconductor Nanostructures

R. J. Hafner; L. Tian; J. C. Brauer; T. Schmaltz; A. Sienkiewicz et al. 

Acs Nano. 2018. Vol. 12, num. 9, p. 9116 – 9125. DOI : 10.1021/acsnano.8b03165.

A single chip electron spin resonance detector based on a single high electron mobility transistor

A. V. Matheoud; N. Sahin; G. Boero 

Journal of Magnetic Resonance. 2018. Vol. 294, p. 59 – 70. DOI : 10.1016/j.jmr.2018.07.002.

Electronics for integrated oscillators phase noise characterization

L. Frehner 

2018.

Electromechanical behavior of stencil-lithography-fabricated biocompatible gold contacts on PDMS substrates

K-T. Ho 

2018.

Combination of thermal scanning probe lithography and ion etching to fabricate 3D silicon nanopatterns with extremely smooth surface

Y. Lisunova; J. Brugger 

Microelectronic Engineering. 2018. Vol. 193, p. 23 – 27. DOI : 10.1016/j.mee.2018.02.012.

3D printed microchannels for sub-nL NMR spectroscopy

E. Montinaro; M. Grisi; M. C. Letizia; L. Pethö; M. A. M. Gijs et al. 

PLOS ONE. 2018. Vol. 13, num. 5, p. e0192780. DOI : 10.1371/journal.pone.0192780.

Bioresorbable Frequency-Selective Magnesium Microresonators Fabricated by Ion Beam Etching

M. Rüegg; R. Blum 

Microtechnologies in Medicine and Biology, Monterey, USA, 26-28 March 2018.

Growth of Large-Area 2D MoS2 Arrays at Pre-Defined Locations Using Stencil Mask Lithography

I. Sharma; Y. Batra; V. Flauraud; J. Brugger; B. R. Mehta 

Journal of Nanoscience and Nanotechnology. 2018. Vol. 18, num. 3, p. 1824 – 1832. DOI : 10.1166/jnn.2018.14265.

Characterization of a Piezoelectric AlN Beam Array in Air and Fluid for an Artificial Basilar Membrane

H. Jeon; J. Jang; S. Kim; H. Choi 

Electronic Materials Letters. 2018. Vol. 14, num. 2, p. 101 – 111. DOI : 10.1007/s13391-018-0012-7.

Nanostructured surface topographies have an effect on bactericidal activity

S. Wu; F. Zuber; K. Maniura-Weber; J. Brugger; Q. Ren 

Journal of Nanobiotechnology. 2018. Vol. 16, num. 1, p. 20. DOI : 10.1186/s12951-018-0347-0.

All-fiber hybrid piezoelectric-enhanced triboelectric nanogenerator for wearable gesture monitoring

Y. Guo; X. Zhang; Y. Wang; W. Gong; Q. Zhang et al. 

Nano Energy. 2018. Vol. 48, p. 152 – 160. DOI : 10.1016/j.nanoen.2018.03.033.

Characterization of Biodegradable Magnesium Resonators

R. Blum 

2018.

PZE-transduced Suspended Microchannel Resonators for sensing applications

A. De Pastina / L. G. Villanueva Torrijo (Dir.)  

Lausanne, EPFL, 2018. 

Frame structure for thin-film piezoelectric-on-silicon resonator to greatly enhance quality factor and suppress spurious modes

F. Bao; L. Bao; X. Zhang; C. Zhang; X. Li et al. 

SENSORS AND ACTUATORS A-PHYSICAL. 2018. Vol. 274, p. 101 – 108. DOI : 10.1016/j.sna.2018.03.012.

Tin Acetylacetonate as a Precursor for Producing Gas-Sensing SnO2 Thin Films

E. Simonenko; N. Simonenko; A. Mokrushin; A. Vasiliev; I. Vlasov et al. 

RUSSIAN JOURNAL OF INORGANIC CHEMISTRY. 2018. Vol. 63, num. 7, p. 851 – 860. DOI : 10.1134/S0036023618070197.

Unipolar Charging of Aerosol Particles in the Size Range of 75-500 nm by Needle-plate Corona Charger

A. Efimov; P. Arsenov; T. Maeder; V. Ivanov 

ORIENTAL JOURNAL OF CHEMISTRY. 2018. Vol. 34, num. 1, p. 214 – 221. DOI : 10.13005/ojc/340124.

All-in-one self-powered flexible microsystems based on triboelectric nanogenerators

X-S. Zhang; M. Han; B. Kim; J-F. Bao; J. Brugger et al. 

Nano Energy. 2018. Vol. 47, p. 410 – 426. DOI : 10.1016/j.nanoen.2018.02.046.

Applications of antibodies in microfluidics-based analytical systems: challenges and strategies for success

R. O’Kennedy; J. Fitzgerald; A. Cassedy; A. Crawley; X. Zhang et al. 

Journal of Micromechanics and Microengineering. 2018. Vol. 28, num. 6, p. 063001. DOI : 10.1088/1361-6439/aab225.

Synthesis and Investigation of Electrical Properties of Carbon Nanotube – Porous Matrix Composites near the Percolation Threshold

A. Varfolomeev; V. Solovey; I. Volkov; T. Maeder 

ORIENTAL JOURNAL OF CHEMISTRY. 2018. Vol. 34, num. 1, p. 24 – 29. DOI : 10.13005/ojc/340102.

The key impact of incorporated Al2O3 barrier layer on W-based ReRAM switching performance

E. Shahrabi; C. Giovinazzo; J. Sandrini; Y. Leblebici 

2018. 15th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD) / 14th Conference on PhD Research in Microelectronics and Electronics (PRIME), Prague, CZECH REPUBLIC, Jul 02-05, 2018. p. 69 – 72. DOI : 10.1109/PRIME.2018.8430371.

Study of Gd-induced shift of luminescence spectra of YGAG:Ce micropowders as a function of grain size

S. Lisovskii; V. Ivanov; E. Korostylev; A. Meganov; M. Urazov et al. 

Journal of Luminescence. 2018. Vol. 196, p. 94 – 99. DOI : 10.1016/j.jlumin.2017.11.033.

Integration of SU8 lenses with 1310nm-wavelength wafer-fused vertical cavity surface emitting lasers (VCSELs)

M. Judelewicz; S. Jiguet; A. Caliman; D. Ellafi; A. Mereuta et al. 

NANO.IL.2018.

Optical Antenna-Based Fluorescence Correlation Spectroscopy to Probe the Nanoscale Dynamics of Biological Membranes

P. Winkler; R. Regmi; V. Flauraud; J. Brugger; H. Rigneault et al. 

The Journal of Physical Chemistry Letters. 2018. num. 9, p. 110 – 119. DOI : 10.1021/acs.jpclett.7b02818.

Fabrication and Characterization of Biodegradable, Thermal-Responsive Silk Composite Membrane

Y. Wang; X. Zhang; J. Brugger 

2018. The International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Singapore, 22-26, April 2018. p. 479 – 482. DOI : 10.1109/NEMS.2018.8556951.

Nanoscale Lithography and Thermometry with Thermal Scanning Probes

S. T. Zimmermann / J. Brugger (Dir.)  

Lausanne, EPFL, 2018. 

2017

Micro-molding of biodegradable polymer for drug delivery applications

G. Feuvray 

2017.

Nanoparticle Manipulation with an AFM Probe

P. Oberholzer 

2017.

Micro-moirés combining metallic patterns and micro-lenses

T. Walger; R. Hersch; J. Brugger 

Micro and Nano Engineering (MNE), Braga, Portugal, September 18-22, 2017.

The role of inkjet printing in tissue engineering

C. C. W. Tse 

InPrint 2017, Munich, November 14-16, 2017.

Broadband IQ CMOS transceivers for compact and ultra-compact NMR probes

2017. 58th Experimental Nuclear Magnetic Resonance Conference.

Broadband single-chip transceivers for compact NMR probes

M. Grisi / G. Boero (Dir.)  

Lausanne, EPFL, 2017. 

In-Plane Plasmonic Antenna Arrays with Surface Nanogaps for Giant Fluorescence Enhancement

V. Flauraud; R. Regmi; P. M. Winkler; D. T. L. Alexander; H. Rigneault et al. 

Nano Letters. 2017. Vol. 17, num. 3, p. 1703 – 1710. DOI : 10.1021/acs.nanolett.6b04978.

NMR spectroscopy of single sub-nL ova with inductive ultra-compact single-chip probes

M. Grisi; F. Vincent; B. Volpe; R. Guidetti; N. Harris et al. 

Scientific Reports. 2017. Vol. 7, p. 44670. DOI : 10.1038/srep44670.

Nanopatterning of a Stimuli-Responsive Fluorescent Supramolecular Polymer by Thermal Scanning Probe Lithography

S. T. Zimmermann; D. W. H. Balkenende; A. Lavrenova; C. Weder; J. Brugger 

ACS Applied Materials and Interfaces. 2017. Vol. 9, num. 47, p. 41454 – 41461. DOI : 10.1021/acsami.7b13672.

Mode Coupling in Plasmonic Heterodimers Probed with Electron Energy Loss Spectroscopy

V. Flauraud; G. D. Bernasconi; J. Butet; D. T. L. Alexander; O. J. F. Martin et al. 

ACS Nano. 2017. Vol. 11, num. 4, p. 3485 – 3495. DOI : 10.1021/acsnano.6b08589.

Transient Nanoscopic Phase Separation in Biological Lipid Membranes Resolved by Planar Plasmonic Antennas

P. M. Winkler; R. Regmi; V. Flauraud; J. Brugger; H. Rigneault et al. 

ACS Nano. 2017. Vol. 11, num. 7, p. 7241 – 7250. DOI : 10.1021/acsnano.7b03177.

Methods and microfabrication techniques for subnanoliter magnetic resonance spectroscopy

E. Montinaro / G. Boero; J. Brugger (Dir.)  

Lausanne, EPFL, 2017. 

High-aspect ratio nanopatterning via combined thermal scanning probe lithography and dry etching

Y. Lisunova; M. Spieser; R. Juttin; F. Holzner; J. Brugger 

Microelectronic Engineering. 2017. Vol. 180, p. 20 – 24. DOI : 10.1016/j.mee.2017.04.006.

Penciling a triboelectric nanogenerator on paper for autonomous power MEMS applications

X. Zhang; M. Su; J. Brugger; B. Kim 

Nano Energy. 2017. Vol. 33, p. 393 – 401. DOI : 10.1016/j.nanoen.2017.01.053.

Inkjet Printing of Functional Polymer Composites for Chemiresistive Gas Sensors

M. Kiaee; T. Maeder; J. Brugger 

EDMI Day, EPFL, Lausanne, Switzerland,

Flexible fabric-based wearable solid-state supercapacitor

J-H. Huang; Y. Song; X-X. Chen; X. Zhang; L-M. Miao et al. 

2017. IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Los Angeles, CA, USA, April 9-12, 2017. p. 169 – 172. DOI : 10.1109/NEMS.2017.8016998.

Silicon nanostructures for bright field full color prints

V. Flauraud; M. Reyes; R. Paniagua-Dominguez; A. Kuznetsov; J. Brugger 

ACS Photonics. 2017. Vol. 4, num. 8, p. 1913 – 1919. DOI : 10.1021/acsphotonics.6b01021.

Silk Fibroin as a Resist for Thermal Scanning Probe Lithography

S. Zimmermann; Y. Wang; X. Zhang; J. Brugger 

43rd Micro and Nano Engineering Conference, Braga, Portugal, September 18-22, 2017.

DOD Inkjet printing of functional polymers

M. Kiaee; T. Maeder; J. Brugger 

CMI Day, EPFL, Lausanne, Switzerland,

Printing wax to create scaffolds for tissue engineering applications

C. C. W. Tse 

Swiss ePrint 2107, Basel, September 26-27, 2017.

Novel manufacturing methods for optical antennas : controlling light down to the single nanometer scale

V. Flauraud / J. Brugger (Dir.)  

Lausanne, EPFL, 2017. 

A transparent silk-fibroin-based triboelectric microgenerator for airflow energy harvesting

X. Zhang; Y. Guo; Y. Wang; H. Zhang; J. Brugger 

2017. IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Los Angeles, CA, USA, April 9-12, 2017. p. 65 – 68. DOI : 10.1109/NEMS.2017.8016975.

Shape Memory Micro- and Nanowire Libraries for the High-Throughput Investigation of Scaling Effects

T. Oellers; D. Koenig; A. Kostka; S. Xie; J. Brugger et al. 

Acs Combinatorial Science. 2017. Vol. 19, num. 9, p. 574 – 584. DOI : 10.1021/acscombsci.7b00065.

Preceramic Polymers as Precursor for implantable MEMS Applications

L. Hagelüken 

11th NAMIS International Autumn School “Micro & nano systems engineering: from fundamentals to industrial applications”, Freiburg, Germany, October 2-6, 2017.

Growth Of Organic Semiconductor Thin Films with Multi-Micron Domain Size and Fabrication of Organic Transistors Using a Stencil Nanosieve

P. Fesenko; V. Flauraud; S. Xie; E. Kang; T. Uemura et al. 

ACS Applied Materials & Interfaces. 2017. Vol. 9, num. 28, p. 23314 – 23318. DOI : 10.1021/acsami.7b06584.

Drop-on-Demand Inkjet Printing of Functional Composites

M. Kiaee; T. Maeder; J. Brugger 

Swiss ePrint 2017 The Swiss Conference on Printed Electronics and Functional Materials, Basel, Switzerland, September 26-27, 2017.

Thermal-responsive biodegradable composite membrane for drug delivery application

Y. Wang 

11th NAMIS international Autumn school “Micro & nano systems engineering: from fundamentals to industrial applications”, Freiburg, Germany, October 2-6, 2017.

Planar Optical Nanoantennas Resolve Cholesterol-Dependent Nanoscale Heterogeneities in the Plasma Membrane of Living Cells

R. Regmi; P. M. Winkler; V. Flauraud; K. J. E. Borgman; C. Manzo et al. 

Nano Letters. 2017. Vol. 17, num. 10, p. 6295 – 6302. DOI : 10.1021/acs.nanolett.7b02973.

Control of the interaction strength of photonic molecules by nanometer precise 3D fabrication

C. D. Rawlings; M. Zientek; M. Spieser; D. Urbonas; T. Stöferle et al. 

Scientific Reports. 2017. Vol. 7, num. 1, p. 16502. DOI : 10.1038/s41598-017-16496-x.

Synthesis of superposition shape images by light interacting with layers of lenslets

R. D. Hersch; T. Walger; V. Flauraud; J. Brugger; T. Besson 

CH713112; AU2016344585; EP3368332; US10899161; SE543208; RU2018119314; RU2018119314; PL426607; US10286716; CL2018001115; US2018311990; BR112018008671; GB2561731; CN108541238; EP3368332; MX2018005369; KR20180095802; AT519643; DE112016004552; GB201806957; SE1850632; AU2016344585; CA3002906; WO2017072566; US2017113481.

2017.

High sensitivity field asymmetric ion mobility spectrometer

M. A. Chavarria; A. V. Matheoud; P. Marmillod; Y. Liu; D. Kong et al. 

Review of Scientific Instruments. 2017. Vol. 88, num. 3, p. 035115 – 1. DOI : 10.1063/1.4978960.

Thermal Probe Nanopatterning Enables Nanoparticle Assembly on PDMS Substrates

H. Yu; S. T. Zimmermann 

43rd International Conference on Micro and NanoEngineering, Braga, Portugal, September 18-22, 2017.

Single-chip electron spin resonance detectors operating at 50 GHz, 92 GHz, and 146 GHz

A. V. Matheoud; G. Gualco; M. Jeong; I. Zivkovic; J. Brugger et al. 

Journal of Magnetic Resonance. 2017. Vol. 278, p. 113 – 121. DOI : 10.1016/j.jmr.2017.03.013.

Self-assembly of micro/nanosystems across scales and interfaces

M. Mastrangeli 

2017. 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017), Kaohsiung, Taiwan, June 18-22, 2017. p. 676 – 681. DOI : 10.1109/TRANSDUCERS.2017.7994139.

Mode Evolution in Strongly Coupled Plasmonic Dolmens Fabricated by Templated Assembly

V. Flauraud; G. D. Bernasconi; J. Butet; M. Mastrangeli; D. T. L. Alexander et al. 

ACS Photonics. 2017. Vol. 4, num. 7, p. 1661 – 1668. DOI : 10.1021/acsphotonics.6b01026.

Nanoscale topographical control of capillary assembly of nanoparticles

V. Flauraud; M. Mastrangeli; G. D. Bernasconi; J. Butet; D. T. L. Alexander et al. 

Nature Nanotechnology. 2017. Vol. 12, num. 1, p. 73 – 80. DOI : 10.1038/nnano.2016.179.

Nanoscale topography determines the capillary assembly of nanoparticles

V. Flauraud; M. Mastrangeli; G. D. Bernasconi; J. Butet; D. Alexander et al. 

13th Zsigmondy Colloquium of the German Colloidal Society, Saarbrücken, DE, April 5-7, 2017.

2016

Capillary assembly of nanoparticles Diamonds in antennas & durable Ag samples

B. Ghadiani 

2016.

Evaluation of thermal scanning probe lithography patterns

V. PARATTE 

2016.

Fabrication d’antennes plasmoniques pour mesurer au TEM

L. Conti 

2016.

NMR spectroscopy of subnanoliter ova with ultra-compact inductive probes

2016. EUROMAR 2016.

Spark discharge synthesis of semiconductor nanoparticles for thick-film metal oxide gas sensors

A. A. Efimov; I. A. Volkov; V. Ivanov; A. A. Vasiliev; A. Varfolomeev et al. 

2016. 30th Eurosensors Conference, Eurosensors 2016, Budapest (HU), 4-7.9.2016. p. 1036 – 1039. DOI : 10.1016/j.proeng.2016.11.334.

A low-power high-sensitivity single-chip receiver for NMR microscopy

J. Anders; J. Handwerker; M. Ortmanns; G. Boero 

Journal Of Magnetic Resonance. 2016. Vol. 266, p. 41 – 50. DOI : 10.1016/j.jmr.2016.03.004.

Electrical Investigation of Porous Silicon/p-Si Heterojunction Prepared by Electrochemical Etching

M. A. Chavarria; F. Fonthal 

Ecs Journal Of Solid State Science And Technology. 2016. Vol. 5, num. 4, p. P3172 – P3175. DOI : 10.1149/2.0241604jss.

Impedance spectroscopy study of carbon nanotube–glass microfiber composites

I. Volkov; A. Varfolomeev; S. Krasnoselsky; V. Ivanov; T. Maeder 

Oriental Journal of Chemistry. 2016. Vol. 32, num. 6, p. 2857 – 2861. DOI : 10.13005/ojc/320603.

Rapid carbon nanotubes suspension in organic solvents using organosilicon polymers

F. Dalcanale; J. Grossenbacher; G. Blugan; M. Gullo; J. Brugger et al. 

Journal of Colloid and Interface Science. 2016. Vol. 470, num. 15, p. 123 – 131. DOI : 10.1016/j.jcis.2016.02.050.

High sensitivity field asymmetric ion mobility spectrometer

M. A. Chavarría Varón / J. Brugger; G. Boero (Dir.)  

Lausanne, EPFL, 2016. 

Thermal scanning probe lithography on a glassy supramolecular film creates a combination of topogrpahy and fluroescent nanostructures

S. T. Zimmermann; D. Balkenende; A. Lavrenova; C. Weder; J. Brugger 

42nd Micro and Nano Engineering Conference, Vienna, Austria, September 20-23, 2016.

Plasmonic photo-current in freestanding monolayered gold nanoparticle membranes

M. Gauvin; T. Alnasser; E. Terver; I. Abid; A. Mlayah et al. 

Nanoscale. 2016. Vol. 8, num. 36, p. 16162 – 16167. DOI : 10.1039/c6nr05091c.

Exploring Nanoscale Electrical Properties of CuO-Graphene Based Hybrid Interfaced Memory Device by Conductive Atomic Force Microscopy

B. Singh; B. Mehta; D. Varandani; A. V. Savu; J. Brugger 

Journal of Nanoscience and Nanotechnology. 2016. Vol. 16, num. 4, p. 4044 – 4051. DOI : 10.1166/jnn.2016.10713.

Antibacterial Au nanostructured surfaces

S. Wu; F. Zuber; J. Brugger; K. Maniura-Weber; Q. Ren 

Nanoscale. 2016. Vol. 8, num. 5, p. 2620 – 2625. DOI : 10.1039/C5NR06157A.

Harnessing the damping properties of materials for high-speed atomic force microscopy

J. Adams; B. Erickson; J. Grossenbacher; J. Brugger; A. P. Nievergelt et al. 

Nature Nanotechnology. 2016. Vol. 11, p. 147 – 151. DOI : 10.1038/NNANO.2015.254.

Highly efficient and gentle trapping of single cells in large microfluidic arrays for time-lapse experiments

F. Yesilkoy; R. Ueno; B. Desbiolles; M. Grisi; Y. Sakai et al. 

Biomicrofluidics – Fundamentals, Perspectives & Applications. 2016. Vol. 10, num. 1, p. 014120. DOI : 10.1063/1.4942457.

Plasmonic photoconductance in free-standing monolayered gold nanoparticle membranes

E. Terver; M. Gauvin; T. Alnasser; I. Abid; A. Mlayah et al. 

2016. 11th IEEE Nanotechnology Materials and Devices Conference (NMDC), Toulouse, FRANCE, OCT 09-12, 2016. DOI : 10.1109/NMDC.2016.7777131.

3D nanostructures fabricated by advanced stencil lithography

F. Yesilkoy; V. Flauraud; M. Rüegg; B. Kim; J. Brugger 

Nanoscale. 2016. Vol. 9, p. 4945 – 4950. DOI : 10.1039/C5NR08444J.

Bi-directional AC electrothermal micropump for on-chip biological applications

R. H. Vafaie; H. B. Ghavifekr; H. Van Lintel; J. Brugger; P. Renaud 

ELECTROPHORESIS. 2016. Vol. 37, num. 5-6, p. 719 – 726. DOI : 10.1002/elps.201500404.

Electro-mechanical sensing in freestanding monolayered gold nanoparticle membranes

M. Gauvin; J. Grisolia; T. Alnasser; B. Viallet; S. Xie et al. 

Nanoscale. 2016. Vol. 8, num. 22, p. 11363 – 11370. DOI : 10.1039/C6NR02004F.

Penciling A Triboelectric Power Source On Paper

X. Zhang; J. Brugger; B. Kim 

2016. 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, PEOPLES R CHINA, JAN 24-28, 2016. p. 1169 – 1172. DOI : 10.1109/MEMSYS.2016.7421844.

Arrays of Pentacene Single Crystals by Stencil Evaporation

P. Fesenko; V. Flauraud; S. Xie; J. Brugger; J. Genoe et al. 

Crystal Growth & Design. 2016. Vol. 16, p. 4694−4700. DOI : 10.1021/acs.cgd.6b00765.

A silk-fibroin-based transparent triboelectric generator suitable for autonomous sensor network

X. Zhang; J. Brugger; B. Kim 

Nano Energy. 2016. Vol. 20, p. 37 – 47. DOI : 10.1016/j.nanoen.2015.11.036.

Scanning thermal probe microscope method for the determination of thermal diffusivity of nanocomposite thin films

D. Varandani; K. Agarwal; J. Brugger; B. R. Mehta 

Review Of Scientific Instruments. 2016. Vol. 87, num. 8, p. 084903. DOI : 10.1063/1.4960332.

2015

AFM Tips for Measurements and Manipulation of Fluid Interfaces

M. J. I. Airaghi Leccardi 

2015.

DESIGN, FABRICATION, AND CHARACTERIZATION OF AFM TIPS FOR TENSIONS MEASUREMENT AND MANIPULATION OF FLUID INTERFACES

M. J. I. Airaghi Leccardi 

2015.

Fabrication and Replication of Microlens Arrays for Confocal Microscopy

M. Neuenschwander 

2015.

Investigation of liquid pinning on surface nanoscale topography

Y. Mottas 

2015.

Cryogenic single chip electron spin resonance detectors

G. Gualco / G. Boero (Dir.)  

Lausanne, EPFL, 2015. 

A broadband single-chip transceiver for multi-nuclear NMR probes

M. Grisi; G. Gualco; G. Boero 

Review Of Scientific Instruments. 2015. Vol. 86, num. 4, p. 044703. DOI : 10.1063/1.4916206.

Effects of the Discharge Parameters on the Efficiency and Stability of Ambient Metastable-Induced Desorption Ionization

X. Zhang; C. Chen; Y. Liu; H. Wang; L. Zhang et al. 

Plasma Science & Technology. 2015. Vol. 17, num. 12, p. 1048 – 1052. DOI : 10.1088/1009-0630/17/12/12.

Fabrication of complex oxide microstructures by combinatorial chemical beam vapour deposition through stencil masks

E. Wagner; C. S. Sandu; S. Harada; G. Benvenuti; V. Savu et al. 

Thin Solid Films. 2015. Vol. 586, p. 64 – 69. DOI : 10.1016/j.tsf.2015.04.021.

Composite hydrogel-loaded alumina membranes for nanofluidic molecular filtration

S. Wu; T. M. Braschler; R. Anker; F. Wildhaber; A. Bertsch et al. 

Journal of Membrane Science. 2015. Vol. 477, num. 1, p. 151 – 156. DOI : 10.1016/j.memsci.2014.12.023.

Transflective holographic film for head worn display

C. Moser; J. Brugger; V. Cadarso; J. Grossenbacher; M. Guillaumée et al. 

US2015362734; WO2014115095; WO2014115095.

2015.

On the micrometre precise mould filling of liquid polymer derived ceramic precursor for 300-µm-thick high aspect ratio ceramic MEMS

J. Grossenbacher; R. M. Gullo; V. Bakumov; G. Blugan; J. Kuebler et al. 

Ceramics International. 2015. Vol. 41, num. 1, p. 623 – 629. DOI : 10.1016/j.ceramint.2014.08.112.

Impedance sensing of DNA immobilization and hybridization by microfabricated alumina nanopore membranes

S. Wu; W. Ye; M. Yang; M. Taghipoor; R. Meissner et al. 

Sensors and Actuators B: Chemical. 2015. Vol. 216, p. 105 – 112. DOI : 10.1016/j.snb.2015.03.094.

Resistless nanofabrication by stencil lithography: A review

O. Vazquez-Mena; L. Gross; S. Xie; L. G. Villanueva; J. Brugger 

Microelectronic Engineering. 2015. Vol. 132, p. 236 – 254. DOI : 10.1016/j.mee.2014.08.003.

Large-Scale Arrays of Bowtie Nanoaperture Antennas for Nanoscale Dynamics in Living Cell Membranes

V. Flauraud; T. S. van Zanten; M. Mivelle; C. Manzo; M. F. Garcia Parajo et al. 

Nano Letters. 2015. Vol. 15, num. 6, p. 4176 – 4182. DOI : 10.1021/acs.nanolett.5b01335.

FUTURE POWER POWERING FUTURE: HIGH-PERFORMANCE TRIBOELECTRIC NANOGENERATOR FOR WEARABLE ELECTRONICS

2015. 2015 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2015).

CNT and PDCs: A fruitful association? Study of a polycarbosilane–MWCNT composite

F. Dalcanale; J. Grossenbacher; G. Blugan; M. R. Gullo; J. Brugger et al. 

Journal of the European Ceramic Society. 2015. Vol. 35, num. 8, p. 2215 – 2224. DOI : 10.1016/j.jeurceramsoc.2015.02.016.

Electrical Property of Platinum Micro Heater for Thermal Analysis of Microfluidic Device

R. Ueno; F. Yesilköy; J. Brugger; B. Kim 

IEEJ Transactions on Sensors and Micromachines. 2015. Vol. 135, num. 8, p. 338 – 342. DOI : 10.1541/ieejsmas.135.338.

Development of Implantable Electrodes Based on Polymer Derived Ceramics

J. Grossenbacher / J. Brugger; R. M. Gullo (Dir.)  

Lausanne, EPFL, 2015. 

Cytotoxicity evaluation of polymer-derived ceramics for pacemaker electrode applications

J. Grossenbacher; M. Gullo; F. Dalcanale; G. Blugan; J. Kuebler et al. 

Journal of Biomedical Materials Research Part A. 2015. Vol. 103, num. 11, p. 3625 – 3632. DOI : 10.1002/jbm.a.35477.

Organic-inorganic-hybrid-polymer microlens arrays with tailored optical characteristics and multi-focal properties

L. Jacot-Descombes; V. J. Cadarso; A. Schleunitz; S. Gruetzner; J. J. Klein et al. 

Optics Express. 2015. Vol. 23, num. 19, p. 25365 – 25376. DOI : 10.1364/OE.23.025365.

Foil-to-Foil System Integration Through Capillary Self-Alignment Directed by Laser Patterning

G. Arutinov; M. Mastrangeli; E. C. P. Smits; G. van Heck; J. M. J. den Toonder et al. 

Journal of Microelectromechanical Systems. 2015. Vol. 24, num. 1, p. 126 – 133. DOI : 10.1109/JMEMS.2014.2321013.

2014

Nanoparticle assembly : scalable process development from nanoscale molding to hardware/software implementation

K. Müller 

2014.

Microfluidic cell trapping structures for single-cell experiments

B. Desbiolles 

2014.

Capillary particle assembly (CAPA) for plasmonic devices

E. Shahrabi 

2014.

Frequency jumps in single chip microwave LC oscillators

G. Gualco; M. Grisi; G. Boero 

Applied Physics Letters. 2014. Vol. 105, num. 24, p. 242102. DOI : 10.1063/1.4904417.

Grazing angle X-ray fluorescence from periodic structures on silicon and silica surfaces

S. H. Nowak; D. Banas; W. Blchucki; W. Cao; J. -C. Dousse et al. 

2014. 15th International Conference on Total Reflection X-ray Fluorescence Analysis and Related Methods / 49th Annual Conference on X-ray Chemical Analysis (TXRF), Osaka, JAPAN, SEP 23-27, 2013. p. 65 – 75. DOI : 10.1016/j.sab.2014.03.015.

Influence of carbon enrichment on electrical conductivity and processing of polycarbosilane derived ceramic for MEMS applications

F. Dalcanale; J. Grossenbacher; G. Blugan; R. M. Gullo; A. Lauria et al. 

Journal of the European Ceramic Society. 2014. Vol. 34, num. 15, p. 3559 – 3570. DOI : 10.1016/j.jeurceramsoc.2014.06.002.

LOCALIZED EXPRESSION OF HEAT SHOCK PROTEIN IN CELL POPULATION BY MICRO HEATER DEVICE

U. Ryohei; F. Yesilköy; J. Brugger; A. Taniguchi; Y. Sakai et al. 

MICROTAS 2014, TX 78205, USA, October 26-30, 2014.

Curved Holographic Combiner for Color Head Worn Display

M. Guillaumee; S. P. Vahdati; E. Tremblay; A. Mader; G. Bernasconi et al. 

Journal Of Display Technology. 2014. Vol. 10, num. 6, p. 444 – 449. DOI : 10.1109/Jdt.2013.2277933.

Single-Cell 3D Bio-Mems Environment With Engineered Geometry And Physiologically Relevant Stiffnesses

M. Marelli; N. Gadhari; G. Boero; M. Chiquet; J. Brugger 

2014. 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, CA, JAN 26-30, 2014. p. 177 – 180. DOI : 10.1109/MEMSYS.2014.6765603.

Direct imprinting of organic-inorganic hybrid materials into high aspect ratio sub-100 nm structures

V. J. Cadarso; T. Kiefer; V. Auzelyte; H. Atasoy; G. Gruetzner et al. 

Microsystem Technologies-Micro-And Nanosystems-Information Storage And Processing Systems. 2014. Vol. 20, num. 10-11, p. 1961 – 1966. DOI : 10.1007/s00542-013-2016-4.

UV-Imprinting and Inkjet Printing – A Technology Synergy for Microlens Manufacturing

2014. 13th International Conference on Nanoimprint and Nanoprint Technology (NNT 2014).

Cell force measurements in 3D microfabricated environments based on compliant cantilevers

M. Marelli; N. Gadhari; G. Boero; M. Chiquet; J. Brugger 

Lab on a Chip. 2014. Vol. 14, num. 2, p. 286 – 293. DOI : 10.1039/c3lc51021b.

PDMS-based, magnetically actuated variable optical attenuators obtained by soft lithography and inkjet printing technologies

S. De Pedro; V. J. Cadarso; X. Munoz-Berbel; J. A. Plaza; J. Sort et al. 

Sensors And Actuators A-Physical. 2014. Vol. 215, p. 30 – 35. DOI : 10.1016/j.sna.2014.01.021.

Thermal analysis, design and fabrication of microfluidic device with local temperature controls

2014. The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies.

Actuated MEMS and NEMS for cell force spectroscopy and gas sensing applications

J. G. Henriksson / J. Brugger; G. Boero (Dir.)  

Lausanne, EPFL, 2014. 

Three Dimensional Microstructures for Cell Culture with Engineered Stiffness and Geometry

M. Marelli / J. Brugger (Dir.)  

Lausanne, EPFL, 2014. 

Polymeric variable optical attenuators based on magnetic sensitive stimuli materials

S. De Pedro; V. J. Cadarso; T. N. Ackermann; X. Munoz-Berbel; J. A. Plaza et al. 

Journal Of Micromechanics And Microengineering. 2014. Vol. 24, num. 12, p. 125008. DOI : 10.1088/0960-1317/24/12/125008.

Microdrop generation and deposition of ionic liquids

V. J. Cadarso; J. Perera-Nunez; A. Mendez-Vilas; L. Labajos-Broncano; M-L. Gonzalez-Martin et al. 

Journal Of Materials Research. 2014. Vol. 29, num. 17, p. 2100 – 2107. DOI : 10.1557/jmr.2014.162.

Fabrication of HepG2 Cell Laden Collagen Microspheres using Inkjet Printing

J. Ho Choi; Y. Ho Kim; L. Jacot-Descombes; J. Brugger; G. Man Kim 

Journal of the Korean Society for Precision Engineering. 2014. Vol. 31, num. 8, p. 743 – 747. DOI : 10.7736/KSPE.2014.31.8.743.

UV-patternable polymers with selective spectral response (vol 98, pg 234, 2013)

S. De Pedro; A. Voigt; V. J. Cadarso; J. Vila-Planas; J. Brugger et al. 

Microelectronic Engineering. 2014. Vol. 115, p. 1 – 1. DOI : 10.1016/j.mee.2013.10.019.

UV-Imprint Resists Generated from Polymerizable Ionic Liquids and Titania Nanoparticles

A. Gopakumar; Z. Fei; E. Paunescu; V. Auzelyte; J. Brugger et al. 

The Journal of Physical Chemistry. 2014. Vol. 118, p. 16743−16748. DOI : 10.1021/jp412722y.

Shift Dynamics of Capillary Self-Alignment

G. Arutinov; M. Mastrangeli; E. C. P. Smits; G. van Heck; H. F. M. Schoo et al. 

2014. International Precision Assembly Seminar (IPAS 2014), Chamonix, FR, February 16-18, 2014. p. 61 – 68. DOI : 10.1007/978-3-662-45586-9_9.

Cryogenic single-chip electron spin resonance detector

G. Gualco; J. Anders; A. Sienkiewicz; S. Alberti; L. Forro et al. 

Journal of Magnetic Resonance. 2014. Vol. 247, p. 96 – 103. DOI : 10.1016/j.jmr.2014.08.013.

Liquid-Filled Sealed Mems Capsules Fabricated By Fluidic Self-Assembly

M. Mastrangeli; L. Jacot-Descombes; M. R. Gullo; J. Brugger 

2014. IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014), San Francisco (USA), January 26-30, 2014. p. 56 – 59. DOI : 10.1109/MEMSYS.2014.6765572.

Three-dimensional polymeric microtiles for optically-tracked fluidic self-assembly

M. Mastrangeli; A. Martinoli; J. Brugger 

Microelectronic Engineering. 2014. Vol. 124, p. 1 – 7. DOI : 10.1016/j.mee.2014.04.017.

Inkjet Printing of High Aspect Ratio Superparamagnetic SU-8 Microstructures with Preferential Magnetic Directions

L. Jacot-Descombes; M. R. Gullo; V. J. Cadarso; M. Mastrangeli; O. Ergeneman et al. 

Micromachines. 2014. Vol. 5, p. 583 – 593. DOI : 10.3390/mi5030583.

Automated Real-Time Control of Fluidic Self-Assembly of Microparticles

M. Mastrangeli; F. S. Schill; J. Goldowsky; H. Knapp; J. Brugger et al. 

2014. 2014 IEEE International Conference on Robotics and Automation (ICRA 2014), Hong Kong (China), May 31 – June 7, 2014. p. 5860 – 5865. DOI : 10.1109/ICRA.2014.6907721.

Inkjet printed superparamagnetic polymer composite hemispheres with programmed magnetic anisotropy

O. Ergeneman; C. Peters; M. R. Gullo; L. Jacot-Descombes; S. Gervasoni et al. 

Nanoscale. 2014. Vol. 6, p. 10495 – 10499. DOI : 10.1039/C3NR06442E.

High-yield and high-precision nanoparticle assembly: towards complex plasmonic antennas

V. Flauraud; M. Mastrangeli; E. Shahrabi; J. Brugger 

40th International Conference on Micro and Nano Engineering (MNE 2014), Lausanne, CH, September 22-26, 2014.

2013

Fabrication of transparent moiré based optically variable devices

T. Besson 

2013.

Study, design and testing of cryogenic electronics for EPR spectroscopy

P. O. Paccaud 

2013.

Reconfigurable MEMS modules for 2D (self-)assembly

C. Gabry 

2013.

Design iterations on Lego R – like MEMS bricks

T. Cieslewski 

2013.

Light spectral filtering based on spatial adiabatic passage

R. Menchon-Enrich; A. Llobera; J. Vila-Planas; V. J. Cadarso; J. Mompart et al. 

Light-Science & Applications. 2013. Vol. 2, p. e90. DOI : 10.1038/lsa.2013.46.

Single Superparamagnetic Bead Detection and Direct Tracing of Bead Position Using Novel Nanocomposite Nano-Hall Sensors

M. S. Gabureac; L. Bernau; G. Boero; I. Utke 

Ieee Transactions On Nanotechnology. 2013. Vol. 12, num. 5, p. 668 – 673. DOI : 10.1109/Tnano.2013.2266733.

Hot Stencils : A New Path for Resistless Nanopatterning

S. Xie / J. Brugger; A. V. Savu (Dir.)  

Lausanne, EPFL, 2013. 

Fluid-mediated self-assembly of MEMS micro-capsules for liquid encapsulation and release

L. Jacot-Descombes / J. Brugger; R. M. Gullo (Dir.)  

Lausanne, EPFL, 2013. 

Heated mask

S. Xie; A. Savu; J. Brugger 

WO2012164546; WO2012164546.

2013.

Application of stencil masks for ion beam lithographic patterning

S. Brun; V. Savu; S. Schintke; E. Guibert; H. Keppner et al. 

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 2013. Vol. 306, p. 292 – 295. DOI : 10.1016/j.nimb.2012.12.064.

Field effect modulated nanofluidic diode membrane based on Al2O3/W heterogeneous nanopore arrays

S. Wu; F. Wildhaber; A. Bertsch; J. Brugger; P. Renaud 

Applied Physics Letters. 2013. Vol. 102, num. 21, p. 213108.1 – 4. DOI : 10.1063/1.4807781.

Al2O3/W hetero-structured nanopore membranes: From native to tunable nanofluidic diodes

S. Wu; F. Wildhaber; A. Bertsch; J. Brugger; P. Renaud 

2013. 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Suzhou, China, April 7-10, 2013. p. 998 – 1001. DOI : 10.1109/NEMS.2013.6559890.

Cell shape-dependent early responses of fibroblasts to cyclic strain

N. Gadhari; M. Chamley; M. Marelli; J. Brugger; M. Chiquet 

Biochimica et Biophysica Acta (BBA) – Molecular Cell Research. 2013. Vol. 1833, num. 12, p. 3415 – 3425. DOI : 10.1016/j.bbamcr.2013.10.012.

Simulation of Electrical Discharge Initiated by a Nanometer-Sized Probe in Atmospheric Conditions

R. Chen; C. Chen; Y. Liu; H. Wang; Y. Ma et al. 

Plasma Science & Technology. 2013. Vol. 15, num. 9, p. 845. DOI : 10.1088/1009-0630/15/9/02.

Room temperature strong coupling between a microwave oscillator and an ensemble of electron spins

G. Boero; G. Gualco; R. Lisowski; J. Anders; D. Suter et al. 

Journal Of Magnetic Resonance. 2013. Vol. 231, p. 133 – 140. DOI : 10.1016/j.jmr.2013.04.004.

Special Issue on Selected Papers From the 11th IEEE Sensors Conference 2012

W. Fang; M. Esashi; R. Ghodssi; J. Brugger 

Ieee Sensors Journal. 2013. Vol. 13, num. 8, p. 2809 – 2809. DOI : 10.1109/Jsen.2013.2268687.

High aspect ratio etching of nanopores in PECVD SiC through AAO mask

S. Wu; M-O. Bammatter; W. Tang; V. Auzelyte; H. X. Zhang et al. 

2013. 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Suzhou, China, April 7-10, 2013. p. 986 – 989. DOI : 10.1109/NEMS.2013.6559887.

Large-Area Gold/Parylene Plasmonic Nanostructures Fabricated by Direct Nanocutting

V. Auzelyte; B. Gallinet; V. Flauraud; C. Santschi; S. Dutta-Gupta et al. 

Advanced Optical Materials. 2013. Vol. 1, num. 1, p. 50 – 54. DOI : 10.1002/adom.201200017.

Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography

L. G. Villanueva; O. Vazquez-Mena; C. Martin-Olmos; A. V. Savu; K. Sidler et al. 

Micromachines. 2013. Vol. 4, p. 370 – 377. DOI : 10.3390/mi4040370.

In-liquid MEMS assembly by optical trapping

M. R. Gullo; L. Jacot-Descombes; J. Brugger 

2013. 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), Taipei, Taiwan, 20-24 01 2013. p. 78 – 81. DOI : 10.1109/MEMSYS.2013.6474181.

Preface: Special Issue: Euromat 2011-European Congress and Exhibition on Advanced Materials and Processes: Symposium A53 MEMS/NEMS for Sensorial and Actorial Materials

D. Lehmhus; J. Brugger; P. Muralt; S. Pane; O. Ergeneman et al. 

Journal Of Intelligent Material Systems And Structures. 2013. Vol. 24, num. 18, p. 2171 – 2171. DOI : 10.1177/1045389X13507157.

Individually actuated cantilever arrays for cell force spectroscopy

J. Henriksson; R. M. Gullo; J. Brugger 

Nano-Tera annual plenary meeting, Bern, Switzerland, May 30-31, 2013.

Simple and easily controllable parabolic-shaped microlenses printed on polymeric mesas

J. Y. Kim; C. Martin-Olmos; N. S. Baek; J. Brugger 

Journal Of Materials Chemistry C. 2013. Vol. 1, num. 11, p. 2152 – 2157. DOI : 10.1039/c3tc00632h.

High-resolution 1D moirés as counterfeit security features

V. J. Cadarso; S. Chosson; K. Sidler; R. D. Hersch; J. Brugger 

Light: Science & Applications. 2013. Vol. 2, num. 7, p. e86. DOI : 10.1038/lsa.2013.42.

Integrated long-range thermal bimorph actuators for parallelizable bio-AFM applications

J. Henriksson; R. M. Gullo; J. Brugger 

IEEE Sensors Journal. 2013. Vol. 13, num. 8, p. 2849 – 2856. DOI : 10.1109/JSEN.2013.2261293.

Structural and optical properties of the Cu2ZnSnSe4 thin films grown by nano-ink coating and selenization

Y. Liu; D-Y. Kong; H. You; C-L. Chen; X-H. Lin et al. 

Journal Of Materials Science-Materials In Electronics. 2013. Vol. 24, num. 2, p. 529 – 535. DOI : 10.1007/s10854-012-0970-8.

Stencil-Nanopatterned Back Reflectors for Thin-Film Amorphous Silicon n-i-p Solar Cells

C. Pahud; V. Savu; M. Klein; O. Vazquez-Mena; F-J. Haug et al. 

Ieee Journal Of Photovoltaics. 2013. Vol. 3, num. 1, p. 22 – 26. DOI : 10.1109/Jphotov.2012.2213583.

Surface tension-driven self-assembly

M. Mastrangeli 

Surface tension in microsystems; Berlin Heidelberg: Springer, 2013. p. 227 – 253.

Lateral capillary forces

M. Mastrangeli; P. Lambert 

Surface tension in microsystems; Springer, 2013. p. 45 – 69.

Dynamics of capillary self-alignment for mesoscopic foil devices

G. Arutinov; M. Mastrangeli; E. C. P. Smiths; H. F. M. Schoo; J. Brugger et al. 

Applied Physics Letters. 2013. Vol. 102, p. 144101. DOI : 10.1063/1.4801088.

Fluid-mediated parallel self-assembly of polymeric micro-capsules for liquid encapsulation and release

L. Jacot-Descombes; C. Martin-Olmos; M. R. Gullo; V. J. Cadarso; G. Mermoud et al. 

Soft Matter. 2013. Vol. 9, p. 9931 – 9938. DOI : 10.1039/c3sm51923f.

Acousto-fluidic system assisting in-liquid self-assembly of microcomponents

J. Goldowsky; M. Mastrangeli; L. Jacot-Descombes; R. M. Gullo; G. Mermoud et al. 

Journal of Micromechanics and Microengineering. 2013. Vol. 23, num. 12, p. 125026. DOI : 10.1088/0960-1317/23/12/125026.

Three-dimensional SU-8 microtiles for fluidic self-assembly

2013. 39th International Conference on Micro and Nano Engineering (MNE 2013).

Inkjet-printed SU-8 Hemispherical Microcapsules and Silicon chip Embedding

L. Jacot-Descombes; R. M. Gullo; M. Mastrangeli; V. J. Cadarso; J. Brugger 

IET Micro & Nano Letters. 2013. Vol. 8, num. 10, p. 633 – 636. DOI : 10.1049/mnl.2013.0241.

Polymeric hemispherical pico-liter micro cups fabricated by inkjet printing

L. Jacot-Descombes; M. R. Gullo; V. J. Cadarso; M. Mastrangeli; J. Brugger 

2013. 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Suzhou, China, 7-10 04 2013. p. 1119 – 1122. DOI : 10.1109/NEMS.2013.6559918.

2012

High Aspect Ratio Microstructures

J. Béguin 

2012.

Miniaturized Ag/AgCl electrodes made by inkjet printing

L. Hartman Paolillo Cendon 

2012.

Heated membranes for stencil lithography application

S. Boujnah 

2012.

Nano-channel fabrication by electrostatic inkjet printing for the study of proton conductivity

V. Flauraud 

2012.

Fabrication & Characterization of Thermally Actuated MEMS

M. Raad 

2012.

Atomic Force Measurements of Hydrophobic Interactions

J. Perroset 

2012.

Simulation of Optical Nanostructures

N. Besse 

2012.

Modélisation du comportement non-linéaire des spins électroniques couplés à un oscillateur électrique

R. Lisowski 

2012.

Integrated active tracking detector for MRI-guided interventions

J. Anders; P. SanGiorgio; X. Deligianni; F. Santini; K. Scheffler et al. 

Magnetic Resonance In Medicine. 2012. Vol. 67, p. 290 – 296. DOI : 10.1002/mrm.23112.

K-band single-chip electron spin resonance detector

J. Anders; A. Angerhofer; G. Boer 

Journal Of Magnetic Resonance. 2012. Vol. 217, p. 19 – 26. DOI : 10.1016/j.jmr.2012.02.003.

Active Integrated Tracking Detectors for MRI-Guided Interventions

J. Anders; M. Ortmanns; K. Scheffler; G. Boero 

Biomedical Engineering-Biomedizinische Technik. 2012. Vol. 57, p. 907. DOI : 10.1515/bmt-2012-4407.

Highly inorganic titania based sol–gel as directly patternable resist for micro- and nano- structured surfaces

E. Zanchetta; V. Auzelyte; J. Brugger; A. V. Savegnago; G. Della Giustina et al. 

Microelectronic Engineering. 2012. Vol. 98, p. 176 – 179. DOI : 10.1016/j.mee.2012.07.043.

Biomimetic soft lithography on curved nanostructured surfaces

V. Auzelyte; V. Flauraud; C. Busto; V. Javier; T. Kiefer et al. 

2012. September 19-23, Berlin, Germany, p. 269 – 271. DOI : 10.1016/j.mee.2012.03.013.

Fabrication of epoxy spherical microstructures by controlled drop-on-demand inkjet printing

L. Jacot-Descombes; R. M. Gullo; C. Busto; V. Javier; J. Brugger 

Journal of Micromechanics and Microengineering. 2012. Vol. 22, num. 7, p. 074012. DOI : 10.1088/0960-1317/22/7/074012.

Hydrodynamic Trap for Directed Self-Assembly of MEMS

2012. The 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

Directly fabricated multi-scale microlens arrays on a hydrophobic flat surface by a simple ink-jet printing technique

J. Y. Kim; K. Pfeiffer; A. Voigt; G. Gruetzner; J. Brugger 

Journal of Materials Chemistry. 2012. Vol. 22, num. 7, p. 3053 – 3058. DOI : 10.1039/c2jm15576a.

Nanocomposites based on highly luminescent nanocrystals and semiconducting conjugated polymer for inkjet printing

E. Binetti; C. Ingrosso; M. Striccoli; P. Cosma; A. Agostiano et al. 

Nanotechnology. 2012. Vol. 23, num. 7, p. 075701. DOI : 10.1088/0957-4484/23/7/075701.

Thermal control extends heated stencil’s life-time

2012. The 56th International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication.

Facile fabrication of nanofluidic diode membranes using anodic aluminium oxide

S. Wu; F. Wildhaber; O. Vazquez-Mena; A. Bertsch; J. Brugger et al. 

Nanoscale. 2012. Vol. 4, num. 18, p. 5718 – 5723. DOI : 10.1039/c2nr31243c.

OPTIMIZATION OF THE PHOTOPOLYMERIZATION OF A POLYMER DERIVED CERAMIC

2012. 38th International Micro & Nano Engineering Conference.

CAFM investigations of filamentary conduction in Cu2O ReRAM devices fabricated using stencil lithography technique

B. Singh; B. R. Mehta; D. Varandani; A. V. Savu; J. Brugger 

Nanotechnology. 2012. Vol. 23, num. 49, p. 495707. DOI : 10.1088/0957-4484/23/49/495707.

Inkjet printing for MEMS

K. Pataky; V. Auzelyte; J. Brugger 

Inkjet-based Micromanufacturing; Germany: Wiley-VCH, 2012. p. 331 – 346.

Design, Modeling and Optimization of Stochastic Reactive Distributed Robotic Systems

G. Mermoud / A. Martinoli; J. Brugger (Dir.)  

Lausanne, EPFL, 2012. 

Microdrop Printing of Hydrogel Bioinks into 3D Tissue-Like Geometries

K. Pataky; T. Braschler; A. Negro; P. Renaud; M. P. Lutolf et al. 

Advanced Materials. 2012. Vol. 24, num. 3, p. 391 – 396. DOI : 10.1002/adma.201102800.

High-Resolution Resistless Nanopatterning on Polymer and Flexible Substrates for Plasmonic Biosensing Using Stencil Masks

O. Vazquez Mena; T. Sannomiya; M. Tosun; G. Villanueva; A. V. Savu et al. 

ACS Nano. 2012. Vol. 6, num. 6, p. 5474 – 5481. DOI : 10.1021/nn301358n.

Conductivity of SU-8 Thin Films through Atomic Force Microscopy Nano-Patterning

C. Martin-Olmos; G. Villanueva; P. van der Wal; A. Llobera; N. de Rooij et al. 

Advanced Functional Materials. 2012. Vol. 22, num. 7, p. 1482 – 1488. DOI : 10.1002/adfm.201102789.

All-stencil transistor fabrication on 3D silicon substrates

G. Villanueva; O. Vazquez-Mena; C. Martin-Olmos; V. Savu; K. Sidler et al. 

Journal of Micromechanics and Microengineering. 2012. Vol. 22, num. 9, p. 095022. DOI : 10.1088/0960-1317/22/9/095022.

Ultra-low power hydrogen sensing based on a palladium-coated nanomechanical beam resonator

J. Henriksson; L. G. Villanueva; J. Brugger 

Nanoscale. 2012. Vol. 4, num. 16, p. 5059 – 5064. DOI : 10.1039/C2NR30639E.

Highly ordered palladium nanodot patterns for full concentration range hydrogen sensing

L. G. Villanueva; F. Fargier; T. Kiefer; M. Ramonda; J. Brugger et al. 

Nanoscale. 2012. Vol. 4, p. 1964 – 1967. DOI : 10.1039/C2NR11983H.

Compliant membranes improve resolution in full-wafer micro/nanostencil lithography

K. Sidler; G. Villanueva; O. Vazquez-Mena; V. Savu; J. Brugger 

Nanoscale. 2012. Vol. 4, p. 773 – 778. DOI : 10.1039/c2nr11609j.

Effects of tensile stress on electrical parameters of thin film conductive wires fabricated on a flexible substrate using stencil lithography

M. Frantlović; I. Jokić; V. Savu; S. Xie; J. Brugger 

Microelectronic Engineering. 2012. Vol. 98, p. 230 – 233. DOI : 10.1016/j.mee.2012.07.016.

UV-patternable polymers with selective spectral response

S. De Pedro; A. Voigt; V. J. Cadarso; J. Vila-Planas; J. Brugger et al. 

Microelectronic Engineering. 2012. Vol. 98, p. 234 – 237. DOI : 10.1016/j.mee.2012.07.013.

Integrated long-range thermal bimorph actuators for parallelizable bio-AFM applications

J. Henriksson; R. M. Gullo; J. Brugger 

2012. 11th IEEE Sensors Conference, Taipei, Taiwan, October 28-31, 2012. p. 789 – 792. DOI : 10.1109/ICSENS.2012.6411507.

Vertically-stacked gate-all-around polysilicon nanowire FETs with sub-μm gates patterned by nanostencil lithography

D. Sacchetto; S. Xie; V. Savu; M. Zervas; G. De Micheli et al. 

Microelectronic Engineering. 2012. Vol. 98, p. 355 – 358. DOI : 10.1016/j.mee.2012.07.048.

The Solution of Nonlinear Function of Ion Mobility Based on FAIMS Spectrum Peak Position

D-L. Wang; C-L. Chen; C. Zhao; J. Gao; D-Y. Kong et al. 

Spectroscopy And Spectral Analysis. 2012. Vol. 32, num. 8, p. 2050 – 2055. DOI : 10.3964/j.issn.1000-0593(2012)08-2050-06.

In-situ actuated gap reduction and clogging-free apertures for quasi-dynamic stencil lithography

2012. The 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

Sub micrometer ceramic structures fabricated by molding a polymer-derived ceramic

J. Grossenbacher; R. M. Gullo; R. Grandjean; T. Kiefer; J. Brugger 

2012. Micro- and Nano-Engineering (MNE) 2011, Berlin, Germany, September 19-23, 2011. p. 272 – 275. DOI : 10.1016/j.mee.2012.04.024.

Mechanical and tribological properties of polymer-derived Si/C/N sub-millimetre thick miniaturized components fabricated by direct casting

V. Bakumov; G. Blugan; S. Roos; T. Graule; V. Fakhfouri et al. 

Journal of the European Ceramic Society. 2012. Vol. 32, num. 8, p. 1759 – 1767. DOI : 10.1016/j.jeurceramsoc.2012.01.007.

Phenyl-bridged polysilsesquioxane positive and negative resist for electron beam lithography

L. Brigo; V. Auzelyte; K. Lister; J. Brugger; G. Brusatin 

Nanotechnology. 2012. Vol. 23, p. 325302. DOI : 10.1088/0957-4484/23/32/325302.

Streched organic transistors maintain mobility on flexible substrates

K. Sidler; N. V. Cvetkovic; D. Tsamados; A. M. Ionescu; J. Brugger et al. 

Microelectronic Engineering. 2012. Vol. 98, p. 508 – 511. DOI : 10.1016/j.mee.2012.07.080.

Organic half-wave rectifier fabricated by stencil lithography on flexible substrate

N. V. Cvetkovic; K. Sidler; V. Savu; J. Brugger; D. Tsamados et al. 

Microelectronic Engineering. 2012. Vol. 100, p. 47 – 50. DOI : 10.1016/j.mee.2012.07.110.

Heterogeneous material micro-transfer by ink-jet print assisted mould filling

J. V. Cadarso; G. Smolik; V. Auzelyte; L. Jacot-Descombes; J. Brugger 

Microelectronic Engineering. 2012. Vol. 98, p. 619 – 622. DOI : 10.1016/j.mee.2012.04.025.

Capteur pour la detection d’hydrogene et procede de fabrication d’un tel capteur

J. F. Ranjard; F. Favier; J. Brugger 

FR2921159; FR2921159.

2012.

3D hybrid microcomponents self-assembled in liquid

2012. 38th International Conference on Micro and Nano Engineering.

Stencil-nanopatterned back reflectors for thin-film amorphous silicon n-i-p solar cells

C. Pahud; V. Savu; M. Klein; O. Vazquez-Mena; K. Soederstroem et al. 

2012. 38th IEEE Photovoltaic Specialists Conference (PVSC). p. 694 – 696. DOI : 10.1109/PVSC.2012.6317704.

Capillary Self-Alignment of Mesoscopic Foil Components for Sensor-Systems-in-Foil

G. Arutinov; E. C. P. Smits; M. Mastrangeli; G. van Heck; J. van den Brand et al. 

Journal of Micromechanics and Microengineering. 2012. Vol. 22, p. 115022. DOI : 10.1088/0960-1317/22/11/115022.

Failure Modes in Capillary Self-Assembly

M. Mastrangeli; J. Brugger 

Micromanipulation for micro-nano systems, Femto-ST, Besancon, FR, April 11, 2012.

2011

Inkjet printing of SU-8 based superparamagnetic composite

M. A. FREIDY 

2011.

Coating high aspect-ratio channels of multi-aperture vision sensor using Micromoulding in Capillaries (MIMIC)

G. Safar 

2011.

3D cell-cages for cell micro-environment engineering

P. Biro 

2011.

Magnetic Nano-particles for Self-assembly in Liquid

J. Chen 

2011.

Fabrication and characterization of Silicon Carbide nanostencils

C. OUGIER SIMONIN 

2011.

A fully integrated IQ-receiver for NMR microscopy

J. Anders; P. SanGiorgio; G. Boero 

Journal Of Magnetic Resonance. 2011. Vol. 209, p. 1 – 7. DOI : 10.1016/j.jmr.2010.12.005.

Photon energy dependence of the light pressure exerted onto a thin silicon slab

F. K. Reinhart; G. Boero 

Physical Review B – Condensed Matter and Materials Physics. 2011. Vol. 83, num. 16, p. 165321. DOI : 10.1103/PhysRevB.83.165321.

Use of Vertically-Aligned Carbon Nanotube Array to Enhance the Performance of Electrochemical Capacitors

M. Guittet; A. I. Aria; M. Gharib 

2011. IEEE Nano, Portland, Oregon, USA, August 15-18 2011. p. 80 – 85. DOI : 10.1109/NANO.2011.6144354.

Compound fabrication for in-liquid selective Self-Assembly

L. Jacot-Descombes; R. M. Gullo; J. Brugger 

Nano-Tera Annual Plenary Meeting, Bern, CH, May 12-13, 2011.

3D Patterning of Hydrogels and Cells by Multi-Component Inkjet Printing

A. Negro; K. Pataky; J. Brugger; M. Lutolf 

Swiss-eprint, Basel, Switzerland, December, 1-2, 2011.

Robust PECVD SiC membrane made for stencil lithography

S. Xie; V. Savu; W. Tang; O. Vazquez Mena; K. Sidler et al. 

2011. 36th International Conference on Micro & Nano Engineering (MNE), Genoa, Italy, September 19-22, 2010. p. 2790 – 2793. DOI : 10.1016/j.mee.2010.11.056.

Three-level stencil alignment fabrication of a high-k gate stack organic thin film transistor

N. V. Cvetkovic; K. Sidler; V. Savu; J. Brugger; D. Tsamados et al. 

2011. 36th International Conference on Micro & Nano Engineering (MNE), Genoa, Italy, September 19-22, 2010. p. 2496 – 2499. DOI : 10.1016/j.mee.2010.12.086.

Nanostructured high refractive index titanium oxide films

V. Auzelyte; A. V. Savegnago; G. Della Giustina; G. Brusatin; J. Brugger 

E-MRS ICAM IUMRS 2011 Spring Meeting, France, Nice, May 9-13, 2011.

Link between Alginate Reaction Front Propagation and General Reaction Diffusion Theory

T. Braschler; A. Valero; L. Colella; K. Pataky; J. Brugger et al. 

Analytical Chemistry. 2011. Vol. 83, num. 6, p. 2234 – 2242. DOI : 10.1021/ac103118r.

Vertically aligned carbon nanotubes for supercapacitor and the effect of surface functionalization to its performance

M. Guittet 

2011.

Microlenses with defined contour shapes

V. J. Cadarso Busto; J. Perera-Núñez; L. Jacot-Descombes; K. Pfeiffer; U. Ostrzinski et al. 

Optics Express. 2011. Vol. 19, num. 19, p. 18665. DOI : 10.1364/OE.19.018665.

Stencil Lithography and Inkjet Printing as New Tools for Life Sciences Research

K. Pataky / J. Brugger (Dir.)  

Lausanne, EPFL, 2011. 

Heated membranes prevent clogging of apertures in nanostencil lithography

S. Xie; A. V. Savu; J. Brugger 

2011. The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’11 ), Beijing, China, June 5-9, 2011. p. 998 – 1001. DOI : 10.1109/TRANSDUCERS.2011.5969501.

Fabrication of polymeric micro structures by controlled drop on demand inkjet printing

L. Jacot-Descombes; R. M. Gullo; V. J. Cadarso Busto; J. Brugger 

2011. 22nd Micromechanics and Micro systems Europe Workshop, Toensberg, Norway, June 19-22, 2011. p. 97 – 100.

Ambipolar silicon nanowire FETs with stenciled-deposited metal gate

D. Sacchetto; V. Savu; G. De Micheli; J. Brugger; Y. Leblebici 

Microelectronic Engineering. 2011. Vol. 88, num. 8, p. 2732 – 2735. DOI : 10.1016/j.mee.2010.12.117.

New inks for the direct drop-on-demand fabrication of polymer lenses

A. Voigt; U. Ostrzinski; K. Pfeiffer; J. Y. Kim; V. Fakhfouri et al. 

2011. 36th International Conference on Micro & Nano Engineering (MNE), Genoa, Italy, September 19-22, 2010. p. 2174 – 2179. DOI : 10.1016/j.mee.2010.12.004.

Inkjet printing of SU-8 for high-aspect ratio spherical polymeric microstructures

L. Jacot-Descombes; R. M. Gullo; V. J. Cadarso Busto; J. Brugger 

Swiss-eprint, Basel, Switzerland, December, 1-2, 2011.

Drawing with Nanostencils on Flexible Substrates

A. V. Savu; O. Peric; J. Brugger 

The 55th International conference on electron, ion, and photon beam technology and nanofabrication” (EIPBN), Las Vegas, NE, USA, May 31 -June 3, 2011.

Hybrid polymer microlens arrays with high numerical apertures fabricated using simple ink-jet printing technique

J. Y. Kim; N. B. Brauer; V. Fakhfouri; D. Boiko; E. Charbon et al. 

Optical Materials Express. 2011. Vol. 1, num. 2, p. 259 – 269. DOI : 10.1364/OME.1.000259.

Reliable and Improved Nanoscale Stencil Lithography by Membrane Stabilization, Blurring and Clogging Corrections

O. Vazquez-Mena; K. Sidler; V. Savu; C. W. Park; L. G. Villanueva et al. 

IEEE Transactions on Nanotechnology. 2011. Vol. 10, num. 2, p. 352 – 357. DOI : 10.1109/TNANO.2010.2042724.

Metallic Nanodot Arrays by Stencil Lithography for Plasmonic Biosensing Applications

O. Vazquez-Mena; T. Sannomiya; L. G. Villanueva; J. Voros; J. Brugger 

ACS Nano. 2011. Vol. 5, num. 2, p. 844 – 853. DOI : 10.1021/nn1019253.

Localized Ion Implantation Through Micro/Nanostencil Masks

G. Villanueva; C. Martin Olmos; O. Vazquez Mena; J. Montserrat; P. Langlet et al. 

IEEE Transactions on Nanotechnology. 2011. Vol. 10, num. 5, p. 940 – 946. DOI : 10.1109/TNANO.2010.2090171.

Ultra-low power palladium-coated MEMS resonators for hydrogen detection under ambient conditions

J. Henriksson; L. G. Villanueva; J. Brugger 

2011. 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Beijing, China, 5-9 June, 2011. p. 787 – 790. DOI : 10.1109/TRANSDUCERS.2011.5969266.

Nanoelectromechanical systems (NEMS)

V. Auzelyte; G. Villanueva; N. Barniol; F. Perez-Murano; W. J. Venstra et al. 

E-nano newsletter. 2011. Vol. 24, p. 37 – 59.

The effects of channel length and film microstructure on the performance of pentacene transistors

F. D. Fleischli; K. Sidler; M. Schaer; V. Savu; J. Brugger et al. 

Organic Electronics. 2011. Vol. 12, num. 2, p. 336 – 340. DOI : 10.1016/j.orgel.2010.12.004.

GOLD MEMBRANES WITH LARGE ARRAYS OF SUB-µm HOLES FABRICATED BY WAFER-SCALE NANOSPHERE LITHOGRAPHY

M. J. K. Klein; R. Eckert; M. Guillaumée; L. A. Dunbar; H. Heinzelmann et al. 

The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, Beijing, China, June 5-9, 2011.

Vertically-Stacked Si Nanowire FETs with sub-micrometer Gate-All-Around polysilicon gates patterned by nanostencil lithography

D. Sacchetto; S. Xie; A. V. Savu; M. Zervas; G. De Micheli et al. 

2011. 37th International Conference on Micro and Nano Engineering (MNE), Berlin, Germany, September 19-23, 2011.

Characterization of Hydrophobic Forces for in Liquid Self-Assembly of Micron-Sized Functional Building Blocks

R. M. Gullo; L. Jacot-Descombes; L. Aeschimann; J. Brugger 

2011. 2010 MRS Fall Meeting, Boston, Massachusetts, USA, November 30-December 2, 2010. DOI : 10.1557/opl.2011.466.

High Throughput Nanofabrication of Silicon Nanowire and Carbon Nanotube Tips on AFM Probes by Stencil-Deposited Catalysts

D. S. Engstrom; V. Savu; X. Zhu; I. Y. Y. Bu; W. I. Milne et al. 

Nano Letters. 2011. Vol. 11, num. 4, p. 1568 – 1574. DOI : 10.1021/nl104384b.

Micro-beams with tunable stiffness and curvature for mechano-sensitive cell culture substrates

M. Marelli; N. Gadhari; P. Biro; M. Chiquet; J. Brugger 

37th International Conference on Micro and Nano Engineering, Berlin, Germany, September 19-23, 2011.

Integrated MEMS actuation for force spectroscopy in liquid

J. Henriksson; R. M. Gullo; J. Brugger 

Nano-Tera Annual Plenary Meeting, Bern, CH, May 12-13, 2011.

Solid-state Nanopore Array Membranes Patterned by Electron Beam Lithography, Nanosphere Lithography and Aluminum Anodization

S. Wu; M. J. K. Klein; O. Vazquez-Mena; V. Auzelyte; V. Savu et al. 

2011. 8th International Conference on Multi-Material Micro Manufacture (4M 2011)’, u’8th International Conference on Multi-Material Micro Manufacture (4M 2011)’]. p. 225 – 229. DOI : 10.3850/978-981-07-0319-6_200.

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

M. J. K. Klein; F. Montagne; N. Blondiaux; O. Vazquez-Mena; H. Heinzelmann et al. 

Journal of Vacuum Science & Technology B. 2011. Vol. 29, num. 2, p. 021012/1 – 5. DOI : 10.1116/1.3554404.

Ink-jet printing assisted micro-transfer moulding

V. J. Cadarso Busto; G. Smolik; V. Auzelyte; L. Jacot-Descombes; J. Brugger 

MNE 2011, Berlin, September 19-23.

Solid-state nanopore array membranes patterned by electron beam lithography, nanosphere lithography and aluminum anodization

S. Wu; M. J. K. Klein; O. Vazquez-Mena; V. Auzelyte; A. V. Savu et al. 

4M 2011 Conference, Stuttgart, Germany, November 8-10, 2011.

Oxide nanocrystal based nanocomposites for fabricating photoplastic AFM probes

C. Ingrosso; C. Martin-Olmos; A. Llobera; C. Innocenti; C. Sangregorio et al. 

Nanoscale. 2011. Vol. 3, p. 4632 – 4639. DOI : 10.1039/c1nr10487j.

Robust PECVD SiC membrane made for stencil lithography

S. Xie; V. Savu; W. Tang; O. Vazquez-Mena; K. Sidler et al. 

Microelectronic Engineering. 2011. Vol. 88, p. 2790 – 2793. DOI : 10.1016/j.mee.2010.11.056.

Advances in Nanostenciling: resistless nanopatterning enables new applications

A. V. Savu; J. Brugger 

Swiss NanoConvention, Baden, Switzerland, May 18-19, 2011.

Vertically-Aligned Carbon Nanotubes for Supercapacitor and the Effect of Surface Functionalization to its Performance

M. Guittet; A. I. Aria; M. Gharib; J. Brugger 

Hydrophobic Forces in Liquid Selfassembly

R. M. Gullo; L. Jacot-Descombes; J. Brugger 

Nano-Tera Annual Plenary Meeting, Bern, CH, May 12-13, 2011.

Containers assembled in fluid and corresponding production

J. Brugger; C. Martin-olmos; A. Martinoli; G. Mermoud 

US2012145572; WO2010122499; WO2010122499.

2011.

Fluorophore-doped xerogel antiresonant reflecting optical waveguides

A. Llobera; V. J. Cadarso Busto; E. Carregal-Romero; J. Brugger; C. Domínguez et al. 

Optics Express. 2011. Vol. 19, num. 6, p. 5026 – 5039. DOI : 10.1364/OE.19.005026.

GOLD MEMBRANES WITH LARGE ARRAYS OF SUB-µm HOLES FABRICATED BY WAFER-SCALE NANOSPHERE LITHOGRAPHY

2011. The 16th International Conference on Solid-State Sensors, Actuators and Microsystems.

100 mm dynamic stencils pattern sub-micrometre structures

A. V. Savu; S. Xie; J. Brugger 

Nanoscale. 2011. Vol. 3, num. 7, p. 2739. DOI : 10.1039/c1nr10083a.

Dynamic stencil lithography on flexible substrates on full wafer scale

O. Peric 

2011.

2010

Stress Engineered Thin Films For Life Science Applications

P. M. Sabat 

2010.

Design and characterization of low aspectratio nanopore arrays

L. Coulot 

2010.

High-resolution microscopy and photolithography devices using focusing micromirrors

B. Rachet; F. Merenda; R. Salathe 

EP2389606; US2016091799; US9075227; US2011300490; EP2389606; WO2010084478; WO2010084478.

2010.

Granular Co-C nano-Hall sensors by focused-beam-induced deposition

M. Gabureac; L. Bernau; I. Utke; G. Boero 

Nanotechnology. 2010. Vol. 21, num. 11, p. 115503. DOI : 10.1088/0957-4484/21/11/115503.

Use of Force Spectroscopy to Investigate the Adhesion of Living Adherent Cells

G. Weber; N. Blondiaux; M. Giazzon; N. Matthey; M. J. K. Klein et al. 

Langmuir. 2010. Vol. 26, num. 11, p. 8180 – 8186. DOI : 10.1021/la904526u.

SPM Measurements of Hydrophobic Interactions

R. M. Gullo; G. Mermoud; J. Y. Kim; L. Jacot-Descombes; A. Martinoli et al. 

Nano-Tera.ch Annual Plenary Meeting, Bern, Switzerland, April 29, 2010.

Organic Thin Film Transistors on Flexible Polyimide Substrates Fabricated by Full Wafer Stencil Lithography

K. Sidler; N. Cvetkovic; A. V. Savu; D. Tsamados; M. A. Ionescu et al. 

Sensors and Actuators A. 2010. Vol. 162, num. 2, p. 155 – 159. DOI : 10.1016/j.sna.2010.04.016.

Direct polymer patterning by high energy reactive ion beam through stencil masks

S. Brun; E. Guibert; A. V. Savu; O. Vazquez Mena; J. Brugger et al. 

2010. Micro and Nano Engineering (MNE) 2010, Genova, Italy, September 19-22, 2010.

Development of stencil lithography for nanopatterning and for electronic and biosensing applications

O. Vazquez Mena / J. Brugger (Dir.)  

Lausanne, EPFL, 2010. 

Sputtering of (001)AlN thin films: Control of polarity by a seed layer

E. Milyutin; S. Harada; D. Martin; J. F. Carlin; N. Grandjean et al. 

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 2010. Vol. 28, num. 6, p. L61. DOI : 10.1116/1.3501117.

Fabrication of Metallic Nanodots by Stencil Lithography for Localized Surface Plasmon Resonance Biosensing

O. Vazquez-Mena; T. Sannomiya; L. G. Villanueva; J. Voros; J. Brugger 

Functionalized Plasmonic Nanostructures for Biosensing, Ascona, Switzerland, April 18-23, 2010.

Fast and robust hydrogen sensors based on discontinuous palladium films on polyimide, fabricated on a wafer scale

T. Kiefer; G. Villanueva; F. Fargier; F. G. Favier; J. Brugger 

Nanotechnology. 2010. Vol. 21, num. 50, p. 505501. DOI : 10.1088/0957-4484/21/50/505501.

Large arrays of chemo-mechanical nanoswitches for ultralow-power hydrogen sensing

T. Kiefer; A. Salette; G. Villanueva; J. Brugger 

Journal of Micromechanics and Microengineering. 2010. Vol. 20, p. 105019. DOI : 10.1088/0960-1317/20/10/105019.

Stenciled conducting bismuth nanowires

V. Savu; S. Neuser; G. Villanueva; O. Vazquez-Mena; K. Sidler et al. 

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 2010. Vol. 28, num. 1, p. 169 – 172. DOI : 10.1116/1.3292630.

Pd-functionalized MEMS resonator for hydrogen gas sensing at ambient pressure

J. Henriksson; L. G. Villanueva; T. Kiefer; J. Brugger 

7th International Workshop on Nanomechanical Cantilever Sensors, Banff, Canada., May 26-28, 2010.

Very Large Scale Arrays of Chemo-Mechanical Nano-Switches for Ultralow Power Hydrogen Sensing

T. Kiefer; A. Salette; L. G. Villanueva; J. Brugger 

2010. 23rd International IEEE Conference on Micro Electro Mechanical Systems MEMS’2010, Hong Kong, 24-28 January, 2010. DOI : 10.1109/MEMSYS.2010.5442547.

Mechanically tuneable microoptical structure based on PDMS

V. J. Cadarso; A. Llobera; G. Villanueva; J. A. Plaza; J. Brugger et al. 

Sensors and Actuators a-Physical. 2010. Vol. 162, num. 2, p. 260 – 266. DOI : 10.1016/j.sna.2010.02.025.

Metallic Nanodot Arrays Fabricated by Stencil Lithography on SiO2 and Polymer Substrates

O. Vazquez-Mena; T. Sannomiya; L. G. Villanueva; V. Savu; K. Sidler et al. 

The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication, Anchorage, Alaska, U.S.A., June 1-4, 2010.

Pd-functionalized MEMS resonator for hydrogen gas sensing

J. Henriksson; L. G. Villanueva; T. Kiefer; J. Brugger 

Nano-Tera Annual Plenary Meeting, Bern, Switzerland, April 29, 2010.

Flexible Membranes Improve Resolution in Stencil Lithography

K. Sidler; O. Vazquez-Mena; L. G. Villanueva; V. Savu; J. Brugger 

The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication, Anchorage, Alaska, U.S.A., June 1- 4, 2010.

The transition in hydrogen sensing behavior in non-continuous palladium films

T. Kiefer; G. Villanueva; F. Fargier; F. Favier; J. Brugger 

Applied Physics Letters. 2010. Vol. 97, num. 12, p. 121911. DOI : 10.1063/1.3491263.

MAGNETIC NANOCRYSTAL MODIFIED EPOXY PHOTORESIST FOR MICROFABRICATION OF AFM PROBES

C. Ingrosso; C. Martin-Olmos; A. Llobera; C. Innocenti; C. Sangregorio et al. 

MEMSWAVES 2010 and MEMS, Italy, 2010.

Surface-Tension-Driven Self-Assembly of Filled Cylinders with Different Geometry

L. Jacot-Descombes; G. Mermoud; R. M. Gullo; A. Martinoli; J. Brugger 

Nano-Tera.ch Annual Plenary Meeting, Bern, Switzerland, April 29, 2010.

High-density, high-aspect ratio epoxy microstructures by Direct Write Laser Patterning

V. J. Cadarso; K. Pfeiffer; U. Ostrzinski; J-B. Bureau; G-A. Racine et al. 

2010. 36th International Conference on Micro & Nano Engineering (MNE), Genoa, Italy, September 19-22, 2010.

Wafer-Scale Fabrication of Thin SiN Membranes and Au Films and Membranes with Arrays of Sub-um Holes Using Nanosphere Lithography

M. J. K. Klein / J. Brugger; R. Pugin (Dir.)  

Lausanne, EPFL, 2010. 

Fluidic microstructuring of alginate hydrogels for the single cell niche

T. Braschler; A. Valero; L. Colella; K. Pataky; J. Brugger et al. 

Lab on a Chip. 2010. Vol. 10, num. 20, p. 2771 – 2777. DOI : 10.1039/c004988c.

Organic Pentacene Thin Film Transistors on Flexible Substrates Fabricated by Stencil Lithography

K. Sidler Arnet / J. Brugger (Dir.)  

Lausanne, EPFL, 2010. 

System for aligning patterns on a substrate using stencil lithography

F. Perez Murano; J. Arcamone; M. Sansa; J. Bruegger; M. Van D N Boogart et al. 

ES2332082; WO2010010224; ES2332082.

2010.

Modeling Self-Assembly at All Scales

G. Mermoud; L. Jacot-Descombes; R. M. Gullo; J. Brugger; A. Martinoli 

Nano-Tera.ch Annual Plenary Meeting, Bern, Switzerland, April 29, 2010.

Double-gate pentacene thin-film transistor with improved control in sub-threshold region

D. Tsamados; N. V. Cvetkovic; K. Sidler; J. Bhandari; V. Savu et al. 

Solid-State Electronics. 2010. Vol. 54, num. 9, p. 1003 – 1009. DOI : 10.1016/j.sse.2010.04.019.

Three-level Stencil Alignment Fabrication of a High-k Gate Stack Organic Thin Film Transistor

N. Cvetkovic; K. Sidler Arnet; A. V. Savu; J. Brugger; D. Tsamados et al. 

36th International Conference on Micro & Nano Engineering (MNE), Genoa, Italy, September 19-22, 2010.

Inexpensive and fast wafer-scale fabrication of nanohole arrays in thin gold films for plasmonics

M. J. K. Klein; M. Guillaumée; B. Wenger; A. Dunbar; J. Brugger et al. 

Nanotechnology. 2010. Vol. 21, num. 20, p. 205301. DOI : 10.1088/0957-4484/21/20/205301.

Direct writing laser of high aspect ratio epoxy microstructures

V. J. Cadarso; K. Pfeiffer; U. Ostrzinski; J. B. Bureau; G. A. Racine et al. 

Journal of Micromechanics and Microengineering. 2010. Vol. 21, num. 1, p. 017003. DOI : 10.1088/0960-1317/21/1/017003.

Optical transmission properties of corrugated nanoscale hole arrays in thin gold films

2010. Micro and Nano Engineering (MNE) 2010.

Nanoporous SiN membranes patterned by wafer-scale nanosphere lithography

V. Savu; M. J. K. Klein; F. Montagne; O. Vazquez-Mena; J. Brugger et al. 

2010. EIPBN’2010. The 54th International Confrence on Electron, Ion, Photon Beam Technology and Nanofabrication., Anchorage, Alaska, U.S.A., June 1-4, 2010.

Ambipolar silicon nanowire FETs with stenciled sub-µm metal gate

D. Sacchetto; V. Savu; G. De Micheli; J. Brugger; Y. Leblebici 

2010. 36th International Conference on Micro and Nano Engineering (MNE 2010), Genova, Italy, September 19-22, 2010.

Silicon nanowire AFM tips grown on released scanning probe cantilevers from stencil-deposited catalysts

A. V. Savu; D. Engstrom; X. Zhu; W. Milne; P. Boggild et al. 

2010. M36th International Conference on Micro & Nano Engineering (MNE’2010), Genova, Italy, September 19-22, 2010.

Magnetic nanocrystal modified epoxy photoresist for microfabrication of AFM probes

C. Ingrosso; C. Martin Olmos; A. Llobera; C. Innocenti; C. Sangregorio et al. 

2010. MEMSWAVES 2010 and MEMS, Italy, 2010. p. 580 – 584.

Direct write laser at visible wavelength for patterning of high aspect ratio epoxy materials

V. J. Cadarso; K. Pfeiffer; U. Ostrizinski; A. Voigt; G. Gruetzner et al. 

2010. EIPBN- The 54th International Confrence on Electron, Ion, Photon Beam Technology and Nanofabrication, Anchorage, Alaska, USA, June 1-4, 2010.

Millimeter waves for NMR enhancement

A. Macor; E. de Rijk; G. Boero; J-P. Ansermet; S. Alberti 

2010. 35th Int. Conference on Infrared, Millemeter and Terahertz Waves (IRMMW-THz 2010), 2010. DOI : 10.1109/ICIMW.2010.5612362.

2009

Mechanical Hydrogen Sensing

J. G. Henriksson 

2009.

A Low-Noise CMOS Receiver Frontend for NMR-based Surgical Guidance

J. Anders; S. Reymond; G. Boero; K. Scheffler 

2009. 13th International Conference on Biomedical Engineering (ICBME), Singapore, SINGAPORE, Dec 03-06, 2008. p. 89 – 93. DOI : 10.1007/978-3-540-92841-6_22.

Double-resonant x-ray and microwave absorption: Atomic spectroscopy of precessional orbital and spin dynamics

G. Boero; S. Rusponi; P. Bencok; R. Meckenstock; J-U. Thiele et al. 

Physical Review B. 2009. Vol. 79, num. 22, p. 224425. DOI : 10.1103/PhysRevB.79.224425.

Longitudinal detection of ferromagnetic resonance using x-ray transmission measurements

G. Boero; S. Rusponi; J. Kavich; A. L. Rizzini; C. Piamonteze et al. 

Review of Scientific Instruments. 2009. Vol. 80, num. 12, p. 123902. DOI : 10.1063/1.3267192.

A single-chip array of NMR receivers

J. Anders; G. Chiaramonte; P. SanGiorgio; G. Boero 

Journal Of Magnetic Resonance. 2009. Vol. 201, p. 239 – 249. DOI : 10.1016/j.jmr.2009.09.019.

Fluidic-mediated self-assembly for hybrid functional micro/nanosystems (SELFSYS)

L. Jacot-Descombes; C. Martin Olmos; G. Mermoud; E. Le-Caignec; A. Martinoli et al. 

Atelier LEA à Arc-et-Senans, Arc-et-Senans, France, September 8-9, 2009.

Structured ZnO-based contacts deposited by non-reactive rf magnetron sputtering on ultra-thin SiO2/Si through a stencil mask

A. Bernabé; M. Lalanne; L. Presmanes; J. Soon; P. Tailhades et al. 

2009. 2nd International Symposium on Transparent Conductive Oxides, Hersonissos, Crete, Greece, October 22 – 26 2008. p. 1044 – 1047. DOI : 10.1016/j.tsf.2009.03.232.

Drop-on-demand inkjet printing of highly luminescent CdS and CdSe@ZnS nanocrystal based nanocomposites

C. Ingrosso; J. Y. Kim; E. Binetti; V. Fakhfouri; M. Striccoli et al. 

Microelectronic Engineering. 2009. Vol. 86, p. 1124 – 1126. DOI : 10.1016/j.mee.2008.11.028.

High-Fidelity Printing Strategies for Printing 3D Vascular Hydrogel Structures

K. Pataky; M. Ackermann; T. Braschler; M. Lutolf; P. Renaud et al. 

2009. 25th International Conference on Digital Printing Technologies, Louisville, KY, Sep 20-24, 2009. p. 411 – 414.

Large area hole arrays fabricated by a templating method for refractive index sensing

M. J. K. Klein; B. Wenger; M. Guillaumée; J. Brugger; H. Heinzelmann et al. 

Fourth International Conference on Surface Plasmon Photonics (SPP4), Amsterdam, The Netherlands, June 21-26, 2009.

Nanomechanical mass sensor for monitoring deposition rates through confined apertures

J. Arcamone; M. Sansa; J. Verd; A. Uranga; G. Abadal et al. 

The 4th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Shenzhen, China, January 5-8, 2009.

Minimized Blurring in Stencil Lithography using a Compliant Membrane

K. Sidler; G. Villanueva; O. Vazquez-Mena; J. Brugger 

2009. 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Denver, USA, 2009.. DOI : 10.1109/SENSOR.2009.5285768.

Mechanically tuneable microoptical structure based on PDMS

V. J. Cadarso; A. Llobera; G. Villanueva; J. A. Plaza; J. Brugger et al. 

2009. XXIII Eurosensors Conference, Lausanne, Switzerland, September 6-9, 2009.. p. 560 – 563. DOI : 10.1016/j.proche.2009.07.140.

Stencilled Conducting Bismuth Nanowires

V. Savu; S. Neuser; L. G. Villanueva; O. Vazquez-Mena; K. Sidler et al. 

2009. 53rd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Marco Island, FL, USA, May 26-29, 2009. DOI : 10.1116/1.3292630.

Microcollimator for Micrometer-Wide Stripe Irradiation of Cells Using 20–30 keV X Rays

K. Pataky; L. G. Villanueva; A. Liani; O. Zgheib; N. Jenkins et al. 

Radiation Research. 2009. Vol. 172, num. 2, p. 252 – 259. DOI : 10.1667/RR1483.1.

Analysis of the blurring in stencil lithography

O. Vazquez-Mena; L. G. Villanueva; V. Savu; K. Sidler; P. Langlet et al. 

Nanotechnology. 2009. Vol. 20, num. 41, p. 415303. DOI : 10.1088/0957-4484/20/41/415303.

Direct Etching of High Aspect structures through a Stencil

G. Villanueva; O. Vazquez-Mena; C. Hibert; J. Brugger 

2009. MEMS 2009, Sorrento, Italy, January 25-29, 2009. DOI : 10.1109/MEMSYS.2009.4805339.

Analysis and Applications of Nanostructures Created by Stencil Lithography

O. Vazquez-Mena; T. Sannomiya; M. Tosun; J. Voros; G. Villanueva et al. 

2009. 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Denver, USA, 2009. DOI : 10.1109/SENSOR.2009.5285463.

Stress and aging minimization in photoplastic AFM probes

C. Martin; A. Llobera; G. Villanueva; A. Voigt; G. Gruetzner et al. 

Microelectronic Engineering. 2009. Vol. 86, num. 4-6, p. 1226 – 1229. DOI : 10.1016/j.mee.2008.12.033.

Analysis and Applications of Nanostructures Created by Stencil Lithography

O. Vázquez-Mena; T. Sannomiya; M. Tosun; J. Voros; G. Villanueva et al. 

The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25, 2009.

Conduction in rectangular quasi-one-dimensional and two-dimensional random resistor networks away from the percolation threshold

T. Kiefer; G. Villanueva; J. Brugger 

Physical Review E. 2009. Vol. 80, num. 2, p. 021104. DOI : 10.1103/Physreve.80.021104.

Minimized Blurring in Stencil Lithography using a Compliant Membrane

K. Sidler; G. Villanueva; O. Vazquez-Mena; J. Brugger 

The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25 2009.

All through stencil MOSFET fabrication

L. G. Villanueva; O. Vazquez-Mena; J. Montserrat; V. Savu; K. Sidler et al. 

Fall meeting of the American Vacuum Society (AVS), San Jose, CA, USA, 2009.

Direct Fabrication of Polymer Micro lens Arrays having Tunable Optical Properties using Drop-On-Demand Ink-Jet Printing Technology

J. Y. Kim; V. Fakhfouri; K. Pfeiffer; A. Voigt; M. Fink et al. 

2009. 25th International Conference on Digital Printing Technologies, Louisville, KY, Sep 20-24, 2009. p. 803 – 805.

NEMS/CMOS sensor for monitoring deposition rates in stencil lithography

M. Sansa; J. Arcamone; J. Verd; A. Uranga; G. Abadal et al. 

2009. Eurosensor XXIII conference, Lausanne, Switzerland, September 6-9, 2009. p. 425 – 428. DOI : 10.1016/j.proche.2009.07.106.

Drop-On-Demand Inkjet Printing of SU-8 Polymer

V. Fakhfouri; G. Mermoud; J. Y. Kim; A. Martinoli; J. Brugger 

Micro and Nanosystems. 2009. Vol. 1, num. 1, p. 63 – 67. DOI : 10.2174/1876402910901010063.

Focused Ion Beam: A Versatile Technique for the Fabrication of Nano-Devices

C. Santschi; J. Przybylska; M. Guillaumee; O. Vazquez-Mena; J. Brugger et al. 

Praktische Metallographie-Practical Metallography. 2009. Vol. 46, num. 3, p. 154 – 156.

Nanomechanical Mass Sensor for Spatially Resolved Ultrasensitive Monitoring of Deposition Rates in Stencil Lithography

J. Arcamone; M. Sansa; J. Verd; A. Uranga; G. Abadal et al. 

Small. 2009. Vol. 5, p. 176 – 180. DOI : 10.1002/smll.200990007.

Inkjet-Printed Multicolor Arrays of Highly Luminescent Nanocrystal-Based Nanocomposites

J. Y. Kim; C. Ingrosso; V. Fakhfouri; M. Striccoli; A. Agostiano et al. 

Small. 2009. Vol. 5, p. 1051 – 1057. DOI : 10.1002/smll.200801315.

An Oligomerized 53BP1 Tudor Domain Suffices for Recognition of DNA Double-Strand Breaks

O. Zgheib; K. Pataky; J. Brugger; T. D. Halazonetis 

Molecular and Cellular Biology. 2009. Vol. 29, p. 1050 – 1058. DOI : 10.1128/MCB.01011-08.

Quick and Clean: Stencil Lithography for Wafer-Scale Fabrication of Superconducting Tunnel Junctions

V. Savu; J. Kivioja; J. Ahopelto; J. Brugger 

IEEE Transactions on Applied Superconductivity. 2009. Vol. 19, num. 3, p. 242 – 244. DOI : 10.1109/TASC.2009.2019075.

Double-Gate Pentacene TFTs with Improved Control in Subthreshold Region

N. V. Cvetkovic; D. Tsamados; K. Sidler; J. Bhandari; V. Savu et al. 

2009. 39th European Solid-State Device Research Conference (ESSDERC), Athens, Greece, September 14-18, 2009. p. 205 – 208. DOI : 10.1109/ESSDERC.2009.5331352.

Hydrogen sensors based on palladium micro- and nanostructures for fuel cell applications

T. Kiefer / J. Brugger (Dir.)  

Lausanne, EPFL, 2009. 

Nanotechnology impact on sensors

J. Brugger 

NANOTECHNOLOGY. 2009. Vol. 20, num. 43, p. 430206. DOI : 10.1088/0957-4484/20/43/430206.

Nanostencil and InkJet Printing for Bionanotechnology Applications

K. Pataky; O. Vazquez-Mena; J. Brugger 

2009. Nano-Net 2009, 4th International ICST Conference on Nano-Networks, Luzern, Switzerland, October 18-20, 2009..

99% random telegraph signal-like noise in gold nanoparticle mu-stripes

J. Grisolia; B. Viallet; C. Amiens; S. Baster; A. Cordan et al. 

Nanotechnology. 2009. Vol. 20, num. 35, p. 355303. DOI : 10.1088/0957-4484/20/35/355303.

Organic Thin Film Transistors on Flexible Polyimide Substrates Fabricated by Full Wafer Stencil Lithography

K. Sidler; N. V. Cvetkovic; V. Savu; D. Tsamados; A. M. Ionescu et al. 

2009. XXIII Eurosensors Conference, Lausanne, Switzerland, September 6-9, 2009.. DOI : 10.1016/j.proche.2009.07.190.

2008

Development of novel SU-8 based nanoimprint lithography

S-Q. Xie; B-R. Lu; J. Wan; R. Yang; Y. Chen et al. 

2008. The 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT), Beijing, China, October 20-23, 2008.

Fabrication of 150 nm half-pitch grating templates for nanoimprint lithography

S-Q. Xie; B-R. Lu; Y. Sun; Y. Chen; X-P. Qu et al. 

Journal of Nanoscience and Nanotechnology. 2008. Vol. 9, num. 2, p. 1437 – 1440. DOI : 10.1166/jnn.2009.C173.

Element-resolved x-ray ferrimagnetic and ferromagnetic resonance spectroscopy

G. Boero; S. Mouaziz; S. Rusponi; P. Bencok; F. Nolting et al. 

New journal of physics. 2008. Vol. 10, p. 013011. DOI : 10.1088/1367-2630/10/1/013011.

Detection of bacteria based on the thermomechanical noise of a nanomechanical resonator: origin of the response and detection limits

D. Ramos; J. Tamayo; J. Mertens; M. Calleja; G. Villanueva et al. 

Nanotechnology. 2008. Vol. 19, num. 3, p. 035503. DOI : 10.1088/0957-4484/19/03/035503.

Nanophotonic crystals with chiral elements by a hot embossing process in SU-8

B-R. Lu; J. Wan; S-Q. Xie; Z. Shu; Y. Sun et al. 

Microelectronic Engineering. 2008. Vol. 85, p. 866 – 869. DOI : 10.1016/j.mee.2007.12.085.

A nanoimprint lithography for fabricating SU-8 gratings for near-infrared to deep-UV application

S-Q. Xie; J. Wan; B-R. Lu; Y. Sun; Y. Chen et al. 

Microelectronic Engineering. 2008. Vol. 85, p. 914 – 917. DOI : 10.1016/j.mee.2008.01.072.

UV-curable nanoimprint resin with enhanced anti-sticking property

J. Y. Kim; D-G. Choi; J-H. Jeong; E-S. Lee 

Applied Surface Science. 2008. Vol. 254, p. 4793 – 4796. DOI : 10.1016/j.apsusc.2008.01.095.

Electron counting at room temperature in an avalanche bipolar transistor

M. Lany; G. Boero; R. Popovic 

Applied Physics Letters. 2008. Vol. 92, num. 2, p. 022111. DOI : 10.1063/1.2830015.

Single-chip detector for electron spin resonance spectroscopy

T. Yalcin; G. Boero 

Review Of Scientific Instruments. 2008. Vol. 79, p. 094105. DOI : 10.1063/1.2969657.

Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces

G. Villanueva; J. A. Plaza; J. Montserrat; F. Perez-Murano; J. Bausells 

Microelectronic Engineering. 2008. Vol. 85, num. 5-6, p. 1120 – 1123. DOI : 10.1016/j.mee.2008.01.082.

Pentacene – SiO2 interface: Role of the environment prior to pentacene deposition and its impact on TFT DC characteristics

N. V. Cvetkovic; D. Tsamados; K. Sidler; J. Brugger; A. M. Ionescu 

2008. 26th International Conference on Microelectronics (MIEL 2008), Nis, Serbia, May 11-14, 2008. DOI : 10.1109/ICMEL.2008.4559282.

Ink-jet printing of highly luminescent nanocrystal/polymer nanocomposites for microstructure fabrication: effect of the ink parameters

C. Ingrosso; J. Y. Kim; V. Fakhfouri; M. Striccoli; E. Binetti et al. 

34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.

KFM detection of quantified charges injected into a thin SiO2 layer containing Si nps embedded by ultra low energy ion implantation using stencil lithography

C. Dumas; L. Ressier; J. Grisolia; A. Arbouet; V. Paillard et al. 

2008. European Materials Research Society (EMRS 2008): Symposium H: Materials and emerging technologies for non-volatile-memory devices, Strasbourg, France, June 26-30 2008..

Inkjet printing of SU-8 for polymer-based MEMS: A case study for microlenses

V. Fakhfouri; N. Cantale; G. Mermoud; J. Y. Kim; D. Boiko et al. 

21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, USA, 13-17 January, 2008.

Pentacene – SiO2 interface: role of the environment prior to pentacene deposition and its impact on TFT DC characteristics

N. V. Cvetković; D. Tsamados; K. Sidler; J. Brugger; A. M. Ionescu 

26th International Conference on Microelectronics, Nis, Serbia, May 11-14 2008.

Full-wafer fabrication by nanostencil lithography of micro/nanomechanical mass sensors monolithically integrated with CMOS

J. Arcamone; M. van den Boogaart; F. Serra-Graells; J. Fraxedas; J. Brugger et al. 

Nanotechnology. 2008. Vol. 19, num. 30, p. 305302. DOI : 10.1088/0957-4484/19/30/305302.

Optical Transmission Properties of Corrugated Nanoscale Hole Arrays in Thin Gold Films

M. Klein; M. Guillaumée; L. A. Dunbar; R. Eckert; H. Heinzelmann et al. 

2008. 34th International Conference on Micro- and Nano Engineering 2008, Athens, Greece, Sept 15-18, 2008.

Silicon nanoparticles synthesized in SiO2 pockets by stencil-masked low energy ion implantation and thermal annealing

J. Grisolia; C. Dumas; G. Ben Assayag; C. Bonafos; S. Schamm et al. 

2008. Meeting of the European-Materials-Research-Society, Strasbourg, FRANCE, May 28-Jun 01, 2007. p. 395 – 401. DOI : 10.1016/j.spmi.2007.12.013.

Two-dimensional magnetic resonance force microscopy using full-volume Fourier and Hadamard encoding

K. W. Eberhardt; A. Hunkeler; U. Meier; J. Tharian; S. Mouaziz et al. 

Physical Review B. 2008. Vol. 78, p. 214401 (5 pages). DOI : 10.1103/PhysRevB.78.214401.

Compact CMOS current conveyor for integrated NEMS resonators

J. Arcamone; B. Misischi; F. Serra-Graells; M. A. F. van den Boogaart; J. Brugger et al. 

Iet Circuits Devices & Systems. 2008. Vol. 2, p. 317 – 323. DOI : 10.1049/iet-cds:20070320.

Inkjet printing and high aspect ratio structuring for polymer-based micro and nano systems

V. Fakhfouri / J. Brugger (Dir.)  

Lausanne, EPFL, 2008. 

Stencil assisted reactive ion etching for micro and nano patterning

B. Viallet; J. Grisolia; L. Ressier; M. Van Den Boogaart; J. Brugger et al. 

Microelectronics Engineering. 2008. Vol. 85, num. 8, p. 1705 – 1708. DOI : 10.1016/j.mee.2008.04.027.

Drop-on-demand Ink-jet printing of functional materials: Case studies of SU-8 and NCs-embedded Polymer nanocomposites

J. Y. KIM; V. Fakhfouri; C. Ingrosso; M. Striccoli; M. L. Curri et al. 

International Conference on Digital Fabrication Technologies, Pittsburgh, Pennsylvania, USA, September 7-12, 2008.

Tunable, high aspect ratio pillars on diverse substrates using copolymer micelle lithography: an interesting platform for applications

S. Krishnamoorthy; Y. Gerbig; C. Hibert; R. Pugin; C. Hinderling et al. 

Nanotechnology. 2008. Vol. 19, num. 28, p. 285301. DOI : 10.1088/0957-4484/19/28/285301.

Inkjet printing of SU-8 for polymer-based MEMS a case study for microlenses

V. Fakhfouri; N. Cantale; G. Mermoud; J. Y. Kim; D. Boiko et al. 

2008. 21st IEEE International Conference on Micro Electro Mechanical Systems 2008, Tucson, Arizona, USA, Jan 13-17, 2008. p. 407 – 410. DOI : 10.1109/MEMSYS.2008.4443679.

Quick and Clean: Stencil Lithography for Wafer-Scale Fabrication of Superconducting Tunnel Junctions

V. Savu; J. Brugger; J. Kivioja; J. Ahopelto 

Applied Superconductivity Conference 2008 (ASC 2008), Chicago, Illinois USA, August 17-22 2008.

Drop-on-demand Ink-jet printing of functional materials: Case studies of SU-8 and NCs-embedded Polymer nanocomposites

J. Y. KIM; V. Fakhfouri; C. Ingrosso; M. Striccoli; M. L. Curri et al. 

2008. International Conference on Digital Fabrication Technologies, Pittsburgh, Pennsylvania, USA, September 7-12, 2008..

Magnetic Nanocrystals Modified Epoxy Photoresist for fabrication of NEMS and MEMS

C. Martin; C. Ingrosso; A. Llobera; F. Perez-Murano; C. Sangregorio et al. 

2008. 34th International Conference on Micro and Nano Engineering (MNE’2008), Athens, Greece, September 15-18, 2008.

The systematic tunability of nanoparticle dimensions through the controlled loading of surface-deposited diblock copolymer micelles

S. Krishnamoorthy; R. Pugin; C. Hinderling; J. Brugger; H. Heinzelmann 

Nanotechnology. 2008. Vol. 19, p. 175301. DOI : 10.1088/0957-4484/19/17/175301.

A single nanotrench in a palladium microwire for hydrogen detection

T. Kiefer; F. Favier; O. Vazquez; G. Villanueva; J. Brugger 

Nanotechnology. 2008. Vol. 19, num. 12, p. 125502. DOI : 10.1088/0957-4484/19/12/125502.

Research activities at LMIS1-EPFL

T. Kiefer; O. Vazquez Mena; K. Sidler Arnet; V. Fakhfouri; K. Pataky et al. 

5th NAMIS International workshop, Freiburg, Germany, April 4th-5th, 2008.

Fabrication of Highly Ordered Vertical Nanogap Arrays and Networks on a Large Scale

T. Kiefer; G. Villanueva; .. Brugger 

34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.

Metallic Nanowires by Full Wafer Stencil Lithography

O. Vazquez Mena; G. Villanueva; V. Savu; K. Sidler; M. A. F. van den Boogaart et al. 

Nano Letters. 2008. Vol. 8, num. 11, p. 3675 – 3682. DOI : 10.1021/nl801778t.

Design and optimization of nanogap array sensors

T. Kiefer; L. G. Villanueva; J. Brugger 

Eurosensors XXII, Dresden, Germany, September 7-10, 2008.

Direct fabrication of NIL stamps using Stencil Lithography

G. Villanueva; O. Vazquez-Mena; T. Kiefer; J. Brugger 

Eurosensors XXII, Dresden, Germany, September 7-10, 2008.

Hydrogen Sensors based on Nanoscaled Discontinuities in Palladium

T. Kiefer; F. Favier; L. G. Villanueva; O. Vazquez Mena; A. Salette et al. 

NAMIS International autumn school, Tokyo, Japan, September 2008.

Design and optimization of nanogap array sensors

T. Kiefer; G. Villanueva; J. Brugger 

Eurosensors XXII, Dresden, Germany, October 7-10, 2008.

Stencil Lithography: Quick and Clean

G. Villanueva; J. Brugger 

Smart Systems Integration (SSI), Barcelona, Spain, 2008.

Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching

O. Vazquez-Mena; G. Villanueva; M. A. F. van den Boogaart; V. Savu; J. Brugger 

Microelectronic Engineering. 2008. Vol. 85, num. 5-6, p. 1237 – 1240. DOI : 10.1016/j.mee.2007.12.083.

Direct fabrication of NEMS by etching through Stencil

G. Villanueva; J. Brugger 

Micro Nano cantilever Sensors 2008 (MNCS 08), Mainz, Germany, May 19-21, 2008.

Sub-100 nm-scale Aluminum Nanowires by Stencil Lithography: Fabrication and Characterization

O. Vazquez-Mena; V. Savu; K. Sidler; G. Villanueva; M. A. F. van den Boogaart et al. 

2008. 3rd IEEE International Conference of Nano/Micro Engineered and Molecular Systems, Sanya, Hainan Island, China, January 6-9, 2008.. p. 807 – 811. DOI : 10.1109/NEMS.2008.4484447.

Resistivity Measurements of Gold Wires Fabricated by Stencil Lithography on Flexible Polymer Substrates

K. Sidler; O. Vazquez Mena; V. Savu; G. Villanueva; M. A. F. van den Boogaart et al. 

2008. 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007. p. 1108 – 1111. DOI : 10.1016/j.mee.2007.12.069.

Etching of sub-micrometer structures through Stencil

G. Villanueva; O. Vazquez-Mena; M. A. F. van den Boogaart; K. Sidler; V. Savu et al. 

2008. 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), 23-26 Sept, 2007, Copenhagen, Denmark, Copenhagen, Denmark, 23-26 Sept, 2007. p. 1010 – 1014. DOI : 10.1016/j.mee.2007.12.068.

Stress and aging minimization in photoplastic AFM probes

C. Martin; A. Llobera; G. Villanueva; A. Voigt; G. Gruetzner et al. 

2008. 34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008. DOI : 10.1016/j.mee.2008.12.033.

Stress and aging minimization in photoplastic AFM probes

C. Martin; A. Llobera; G. Villanueva; A. Voigt; G. Gruetzner et al. 

34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.

Discontinuous Palladium Nanostructures for H2 Sensing

C. Fournier; T. Kiefer; L. G. Villanueva; F. Fargier; R. Penner et al. 

Pacific Rim Meeting on Electrochemical and Solid-State Science (PRIME2008), Honolulu, Hawaii, October 12-17 2008.

Discontinuous Palladium Nanostructures for H2 Sensing

C. Fournier; T. Kiefer; L. G. Villanueva; F. Fargier; J. Brugger et al. 

2008. ECS Transactions, Hawaii, 2008. p. 457 – 463. DOI : 10.1149/1.2981151.

Etching of sub-micrometer structures through Stencil

G. Villanueva; O. Vazquez-Mena; M. A. F. van den Boogaart; K. Sidler; K. Pataky et al. 

Microelectronic Engineering. 2008. Vol. 85, p. 1010 – 1014. DOI : 10.1016/j.mee.2007.12.068.

Direct fabrication of NIL stamps using Stencil Lithography

L. G. Villanueva; O. Vazquez Mena; T. Kiefer; J. Brugger 

Eurosensors XXII, Dresden, Germany, September 7-10, 2008.

Resistless ion implantation of sub-micron scale features through nano-stencil

G. Villanueva; C. Martin; O. Vazquez-Mena; J. Montserrat; P. Langlet et al. 

34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.

Novel methods to pattern polymers for microfluidics

C. Martin; A. Llobera; T. Leïchlé; G. Villanueva; A. Voigt et al. 

Microelectronic Engineering. 2008. Vol. 85, p. 972 – 975. DOI : 10.1016/j.mee.2008.01.052.

Novel methods to pattern polymers for microfluidics

C. Martin; A. Llobera; T. Leïchlé; G. Villanueva; A. Voigt et al. 

2008. 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007. p. 972 – 975. DOI : 10.1016/j.mee.2008.01.052.

Ion Beam Etching: Replication of Micro Nano-structured 3D Stencil Masks

P. Weber; E. Guibert; S. Mikhailov; J. Brugger; G. Villanueva 

2008. 20th International Conference on the Application of Accelerators in Research and Industry (CAARI), Fort Worth, USA, 2008. p. 539 – 541. DOI : 10.1063/1.3120093.

Dynamic stencil lithography on full wafer scale

V. Savu; M. van den Boogaart; J. Brugger; J. Arcamone; M. Sansa et al. 

Journal of Vacuum Science and Technology B. 2008. Vol. 26, p. 2054 – 2058. DOI : 10.1116/1.2987953.

Dynamic Stencil Lithography on Full Wafer Scale

M. van den Boogaart; V. Savu; J. Brugger 

2008. 52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2008), Portland, Oregon, May 27–30, 2008.

Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro- /nanopatterns on surfaces

S. Krishnamoorthy; M. A. F. Van den Boogaart; J. Brugger; C. Hibert; R. Pugin et al. 

Advanced Materials. 2008. Vol. 20, num. 18, p. 3533 – 3538. DOI : 10.1002/adma.200702478.

Dynamic Stencil Lithography on Full Wafer Scale

M. van den Boogaart; V. Savu; J. Brugger 

The 52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2008), Portland, Oregon, May 27–30, 2008.

The gas flow rate increase obtained by an oscillating piezoelectric actuator on a micronozzle

R. Wiederkehr; M. Salvadori; J. Brugger; F. Degasperi; M. Cattani 

Sensors and Actuators A. 2008. Vol. 144, p. 154 – 160. DOI : 10.1016/j.sna.2007.12.024.

Quick and Clean: Stencil Lithography for Wafer-Scale Fabrication of Superconducting Tunnel Junctions

V. Savu; J. Brugger; J. Kivioja; J. Ahopelto 

2008. Applied Superconductivity Conference 2008 (ASC 2008), Chicago, Illinois USA, August 17-22 2008. DOI : 10.1109/TASC.2009.2019075.

Controlled synthesis of silicon nanocrystals into a thin SiO2 layer synthesized by stencil-masked ultra-low energy ion implantation

C. Dumas; J. Grisolia; G. BenAssayag; C. Bonafos; S. Schamm et al. 

French Symposium on Emerging Technologies for Micro-nanofabrication, Toulouse, France, November 19 – 21 2008.

Charging dynamics of localized 2D layers of Si nanocrystals embedded into SiO2 by stencil masked ultra low energy ion implantation process

C. Dumas; J. Grisolia; J. Carrey; A. Arbouet; V. Paillard et al. 

2008. European Materials Research Society (EMRS 2008): Symposium H: Materials and emerging technologies for non-volatile-memory devices, Strasbourg, France, June 26-30 2008..

Mechanical stabilisation and design optimisation of masks for stencil lithography: Numerical approach and experimental validation

M. Lishchynska; M. van den Boogaart; V. Savu; J. Greer; J. Brugger 

Microelectronic Engineering. 2008. Vol. 85, p. 2243 – 2249. DOI : 10.1016/j.mee.2008.07.009.

Bismuth nanowires with stencil lithography

V. Savu; S. Neuser; J. Brugger 

34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.

KFM detection of quantified charges injected into a thin SiO2 layer containing Si nps embedded by ultra low energy ion implantation using stencil lithography

C. Dumas; L. Ressier; J. Grisolia; A. Arbouet; V. Paillard et al. 

European Materials Research Society (EMRS 2008): Symposium H: Materials and emerging technologies for non-volatile-memory devices, Strasbourg, France, June 26-30 2008.

Nanostructured ZnO-based layers deposited by non reactive rf magnetron sputtering on ultra-thin SiO2/Si through a stencil mask

A. Barnabé; M. Lalanne; L. Presmanes; P. Tailhades; C. Dumas et al. 

2nd International Symposium on Transparent Conductive Oxides, Hersonissos, Crete, Greece, October 22 – 26 2008.

Optical transmission properties of corrugated nanoscale hole arrays in thin gold films

M. Klein; M. Guillaumée; L. A. Dunbar; R. Eckert; H. Heinzelmann et al. 

34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, Sept 15-18, 2008.

Nanopatterned Self-Assembled Monolayers by Using Diblock Copolymer Micelles as Nanometer-Scale Adsorption and Etch Masks

S. Krishnamoorthy; R. Pugin; J. Brugger; H. Heinzelmann; C. Hinderling 

Advanced Materials. 2008. Vol. 20, num. 10, p. 1962 – 1965. DOI : 10.1002/adma.200702005.

Controlled synthesis of silicon nanocrystals into a thin SiO2 layer synthesized by stencil-masked ultra-low energy ion implantation

C. Dumas; J. Grisolia; G. BenAssayag; C. Bonafos; S. Schamm et al. 

2008. French Symposium on Emerging Technologies for Micro-nanofabrication, Toulouse, France, November 19-21, 2008.

Bismuth nanowires with stencil lithography

V. Savu; S. Neuser; J. Brugger 

2008. 34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008..

Charging dynamics of localized 2D layers of Si nanocrystals embedded into SiO2 by stencil masked ultra low energy ion implantation process

C. Dumas; J. Grisolia; J. Carrey; A. Arbouet; V. Paillard et al. 

European Materials Research Society (EMRS 2008): Symposium H: Materials and emerging technologies for non-volatile-memory devices, Strasbourg, France, June 26-30 2008.

2007

Fabrication of planar chiral photonic meta-materials on SU- 8 using nanoimprint lithography technique

B-R. Lu; S-Q. Xie; Y. Sun; Y. Chen; X-P. Qu et al. 

2007. International Conference on Nanoscience & Technology (Chinanano), Beijing, China, June 4-6, 2007.

The Light at the End of the Tunnel Junction – Improving the Energy Resolution of UV Single-Photon Spectrometers using Diffusion Engineering

A. V. Savu 

Yale University, 2007. 

Focused electron beam induced deposition of nickel

A. Perentes; G. Sinicco; G. Boero; B. Dwir; P. Hoffmann 

2007. 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, Denver, CO, May 29-Jun 01, 2007. p. 2228 – 2232. DOI : 10.1116/1.2794071.

Enhancing the energy resolution of a singles photon STJ spectrometer using diffusion engineering

V. Savu; L. Frunzio; D. E. Prober 

IEEE Transactions on Applied Superconductivity. 2007. Vol. 17, num. 2, p. 324 – 327. DOI : 10.1109/TASC.2007.898612.

Microfabricated electrically conducting and wear-resistant nanoprobes for scanning probe applications

J. Steen / J. Brugger (Dir.)  

Lausanne, EPFL, 2007. 

Integrated Nickel Micro-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy

S. Mouaziz; C. Imboden; G. Boero; R. Popovic; J. Brugger 

14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, 10-14 June, 2007.

A Compact and Low-Power CMOS Circuit for Fully-Integrated NEMS Resonators

J. Arcamone; B. Misischi; F. Serra-Graells; M. A. F. van den Boogaart; J. Brugger et al. 

IEEE Transactions on Circuits and Systems II. 2007. Vol. 54, num. 5, p. 377 – 381. DOI : 10.1109/TCSII.2007.892228.

Highly Sensitive Si Cantilevers, with and without Magnetic Tip, for Magnetic Resonance Force Microscopy

S. Mouaziz; A. Dysli; G. Boero; J. Brugger 

14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, 10-14 June, 2007.

Nanostenciling for fabrication and interconnection of nanopatterns and microelectrodes

H. Guo; D. Martrou; T. Zambelli; J. Polesel-Maris; A. Piednoir et al. 

Applied Physics Letters. 2007. Vol. 90, num. 9, p. 093113. DOI : 10.1063/1.2710473.

Towards Reliable 100-Nanometer Scale Stencil Lithography on Full Wafer: Progress AND Challenges

O. Vazquez Mena; M. van den Boogaart; J. Brugger 

14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, 10-14 June, 2007.

Synthesis of localized 2D-layers of silicon nanoparticles embedded in a SiO2 layer by a stencil-masked ultra-low energy ion implantation process

C. Dumas; J. Grisolia; L. Ressier; A. Arbouet; V. Paillard et al. 

Physica Status Solidi (a). 2007. Vol. 204, num. 2, p. 487 – 491. DOI : 10.1002/pssa.200673232.

Improved and new properties of resist materials by doping with nanoparticles and nanocrystals

A. Voigt; M. Heinrich; G. Gruetzner; C. Ingrosso; M. Striccoli et al. 

Solutions for the Microsystems Technology Market (Microsys 2007 Congress), Berlin, Germany, 7- 8 March, 2007.

Stencil Lithography – Quick & Clean Surface Patterning at Mesoscopic Scales

J. Brugger 

AVS 54th International Symposium & Exhibision, Seattle, WA, USA, 14-19 October, 2007.