Park FX200 is Park Systems’ latest atomic force microscope (AFM), designed to accommodate samples up to 200 mm. With a low noise floor, minimal thermal drift, and enhanced mechanical stability, the FX200 allows true non contact mode measurement for non destructive
- Automatic probe exchange
- Automatic laser beam alignment
- Full 200 mm sample view camera
- Scan range of Z-scanner 7.6 μm (Up to 15 μm is possible if needed)
- Scan range of XY-scanner 100 μm
- Tilted stage for side walls measurement (available as service by CMi staff for users already trained on the tool)
- Additional capabilities: automated scan parameter optimization, optical autofocus, sequential measurements across multiple position.
True Non-Contact™ Mode is a proprietary technology exclusively offered by Park Systems.
True Non-contact mode obtains topography by detecting the attractive van der Waals force between the AFM tip and the sample surface. The tip oscillates at a frequency slightly higher than its resonance frequency, where the frequency-amplitude curve has its steepest slope.
As the tip approaches the sample, the attractive force causes a downshift in the effective resonance frequency, leading to a decrease in oscillation amplitude at the driving frequency. The Z-servo maintains this new amplitude, keeping a constant tip-sample interaction while the tip scans in the XY direction.
A major advantage of True Non-Contact™ Mode, compared to tapping mode, is the prevention of tip wear and sample damage.
- Typical tip length: 10 – 15 μm
- Typical tip radius: <10 nm
- k = ~42 N/m, f = ~330 kHz
ElectriMulti75-G for PFM, KPFM, EFM
- Backside reflective coating (Cr-Pt)
- Conductive tip for electrical application, coated with Cr-Pt
- Typical tip length: ~17 μm
- Typical tip radius: <25 nm
- k = ~3 N/m, f = ~75 kHz
AR5T-NCHR for narrow trenches measurement (on request for experienced AFM User)
- Non-contact cantilever with high aspect ratio tip (>5:1)
- Backside reflex coating (Al)
- Tip tilt compensation: 13°
- Typical spike length: ~2 μm
- Typical tip radius: <15 nm
- k = ~42 N/m, f = ~330 kHz
User manual:
More information available on :
https://www.parksystems.com/en/products/research-afm/large-sample-afm/fx200