Publication List

We here list a selection of recent highlight publications. For a full publication list, please refer to the google scholar profile. The links provided below lead to the publisher’s edition of the scientific publications. We strongly support open access publication, and accordingly, most of the publications are freely available on the publisher’s website. If you cannot access a particular publication, please inquire directly with Niels Quack.

Micro- and Nanofabrication Processes for Single Crystal Diamond

Single Crystal Diamond is hard – and so is the precision structuring of diamond! We here demonstrate several innovative methods, exploiting micro- and nanofabrication processes for the precision structuring of single crystal diamond. These processes can for example find applications in mechanical components, optical devices, or the improvement of diamond crystal surfaces.

• Reactive Ion Etching of Diamond – Review
  Toros et al., DRM, 107839, 2020.
• Surface Polishing by Ion Beam Etching: Mi et al., DRM, 92, 2019.
• Diamond Micromechanical Components by Reactive Ion Etching: Toros et al., Nature Microsystems & Nanoengineering, 4, 12, 2018.

Optical Components in Single Crystal Diamond

Diamond has for long been enchanting humankind with its unequalled gleam and richness of tones – properties for which it is so valued in jewelry; yet the same optical qualities make it a prime material for novel technologies and future applications in photonics, quantum optics and biosensing, for which we have demonstrated several key components:

• Review on Diffractive Optical Elements in Diamond
  M. Kiss, S. Mi, G. Huszka & N.Quack, AOT, 2020.
• Diffractive Optical Elements
  T. Wildi, M. Kiss & N.Quack, OL, 45, 13, 2020.
  
• Blazed Diffraction Gratings and Fresnel Microlens Arrays 3D Nanoprinting and Pattern Transfer: Toros et al, OSA Continuum, 2, 12, 2019.
• Diffraction Gratings by Crystallographic Etching: Optics Express 27, 21, 2019
• Beam Splitters: Kiss et al., Procedings SPIE, 2018.

Silicon Photonic MEMS

We exploit mechanics at the micro- and nanoscale to efficiently address optical functions on-chip. The following articles are recent examples of specific devices or mechanical effects in photonics, and address questions related to scaling to very large-scale photonic integrated circuits.

• Review on Silicon Photonic MEMS: Errando-Herranz et al. IEEE JSTQE,  2019
• Devices & Circuits: Quack et al. IEEE JQE 2019
• Phase Shifter: Sattari et al. Optics Express, 2019
• Bistable Photonic MEMS Switches: Sattari et al., Proceedings SPIE, 2019

Diamond Photonic Devices

Photonic Components based on Single Crystal Diamond provide a basis for future technologies in quantum optics or quantum sensing:

• Integrated Photonic Devices – Review
  Mi et al 2020 J. Phys. Photonics 2 042001
• Micro-Disk resonators by Focused Ion Beam Milling: Graziosi et al., APL Photonics, 3, 126101, 2018.
• Self-Organized Gold Nanoparticles on Diamond: Mi et al., IEEE OMN 2018.

Previous Contributions

We have been working on a variety of topics for Photonic Micro- and Nanosystems previously. The following selection is a choice of important contributions to the field:

• Photonic MEMS Switch Arrays: Seok et al., Optical, 3, 1, 2016.
• Row-/Column Addressing of Silicon Photonic MEMS Switch Arrays: Quack et al., IEEE PTL, 2016.
• Packaged Photonic Switch Matrix: Hwang et al., IEEE Photonics Journal, 2017.
• Miniaturized LIDAR by 3D Integration: Behroozpour et al., IEEE JSSCC, 2017.
• MEMS Lens Scanner: Chou et al., JMEMS 2014.
• Through Silicon Via by Inket-Printed Gold Nano-Particle Ink: Quack et al., Proceedings Transducers 2013.
• Wafer-Scale Optomechanical Oscillators: Grutter et al., CLEO 2012.
• Mid-Infrared Microspectrometer: Felder et al., Physics Procedia, 2010.
• Mid-Infrared Microspectrometer: Quack et al., Journal of Optics A, 2008.
• Hall Sensors by Focused Electron Beam Induced Deposition: APL, 86, 4, 2005.

Doctoral Thesis

Niels Quack, Micromirrors for integrated tunable mid-infrared detectors and emitters. Doctoral Thesis ETH Zürich, (2009), Diss. ETH No. 18702, ETH Zürich, Switzerland.