MEMS-Enhanced Wireless Sensing and Localization

MEMS Spike Train Filter

MEMS (micro-electro-mechanical-system) filters convert RF signals into acoustic vibrations through the piezoelectric effect, then filter and process the signal in the acoustic domain before converting it back to the RF domain. We leverage overtone resonators that have an assortment of equally spaced resonance frequencies. The filter will pass the signals in these resonance frequencies and filter out the rest before converting the signal back to the RF domain. This creates an RF filter with very narrow, sharp, and periodic passbands across a wideband spectrum.

Microscope Image of MEMS Spike-Train Filter