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YES 310TA, Vacuum cure & HMDS vapor prime oven
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STEAG MECAPOL 460 – CMP (CHEMICAL MECHANICAL POLISHING)
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UFT Piranha
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Oxford Instruments PlasmaPro 100 ICPCVD
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Solmates SMP 800
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Bruker FastScan AFM
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ECPS – Laminar-turbulent patterns
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