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20.12.14-Prof. Mackenzie Mathis
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High-speed turboexpander for ORC-based waste heat recovery
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4D urban model of the city of Sion
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YES III, HMDS primer oven
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STEAG MECAPOL 460 – CMP (CHEMICAL MECHANICAL POLISHING)
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UFT Piranha
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ATOMIC LAYER DEPOSITION BENEQ TFS200 (ALD 1)
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RTP JETFIRST 200
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Alcatel EVA 600
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Vacotec VACO 250
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Alliance-Concept DP 650
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Pulsed Laser Deposition
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Solmates SMP 800
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Electroplating / Parylene coating
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Comelec C-30-S
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AFM
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Bruker FastScan AFM
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FEI Nova 600 NanoLab
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Tencor Alpha-Step 500
Bruker Dektak XT
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Krüss DSA-30E
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Krüss DSA-30E Manual
Krüss / ImageJ Surface Tension Manual
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Sopra GES 5E
Veeco Wyko NT1100
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Toho Technology FLX 2320-S
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KLA Tencor OmniMap RS75
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Microscopes at CMi
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Leica DM8000
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Bonding
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Süss SB6
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Süss SB6 Manual
TPT HB10
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OPTEC LSV3
T-Tech QC5000S-E
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Disco DAD321
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NanoImprint EHN-3250
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PDMS line
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Surfx Atomflo 400L
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Ebeam Lithography
Photolithography
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L-Edit installation
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Photoresists available in CMi
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AZ 1512 HS
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AZ 1512 HS Datasheet
AZ ECI 3007
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AZ ECI 3007 Datasheet
AZ ECI 3027
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AZ ECI 3027 Datasheet
AZ 10XT-07
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AZ 10XT-20 Datasheet
AZ 10XT-60
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AZ 10XT-60 Datasheet
AZ 40XT
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AZ 40-XT Datasheet
LOR 5A / AZ 1512 HS
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LOR 5A Datasheet
AZ NLOF 2020
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AZ nLOF 2020 Datasheet
SU-8
M108Y
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M108Y Datasheet
M35G
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M35G Datasheet
PI 2610 & PI 2611
Photolithography Nomenclature
HMDS
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