- Student projects in LMIS1
- We offer a variety of projects for students for both semester and master projects in the field of Micro- & Nanoengineering. Mostly, the proposed projects are linked to our ongoing research topics for PhD projects, postdocs or senior scientist, that are funded by EPFL or third party funds (SNF, CTI/KTI, EU, etc). In that way, the student is involved in real-life topics with clearly assigned tasks that are complementary but in collaboration with the laboratory’s research staff. Alternatively, we also invite Master students to propose their own idea on the realization of a new technology or device in the field of Micro- & Nanoengineering. If you have a concrete idea, please don’t hesitate to talk to Prof. J. Brugger and Prof. G. Boero directly or to one of the staff members to see if a Semester or Master project can be defined around the idea generated by you.
- Download all the available projects here
- All student projects are also listed on IS-academia
Nanostencil for Single Ion Doping
At LMIS1 we are also taking part on the research for new quantum technologies by using nanostencils (consisting into a very thin Si3N4 membrane with nanoapertures patterned into it) as masks for the precise placement of single ions into silicon in order to use their nuclear or electronic spins as quantum entities to be utilized as qubits for quantum computing. We are currently exploring different strategies such as ion implantation or ion diffusion to achieve single ion doping and improve the state-of-the-art.
Even though no specific student project is currently available on this topic, proactive students, interested in our research, are encouraged to get in touch with us for eventually discussing about “out-of-the-box” intuitions and ideas. In the case you are motivated to carry out a student project, please, directly contact Pol Torres Vila ([email protected]), Dr. Arnaud Bertsch ([email protected]) or Prof. Jürgen Brugger ([email protected]).
Grayscale nanolithography for 2D nanoelectronics
While nanolithography has historically focused on downscaling, there is now a growing interest in grayscale nanolithography for introducing or enhancing functionality in micro-nanodevices applied to optics and fluidics. Grayscale thermal scanning probe lithography (t-SPL) achieves single-digit nanometer spatial resolution and sub-nanometer depth control. In t-SPL, a heated nanotip is used to pattern a temperature-sensitive resist. The fine control over the indentation depth of the tip via an electrostatic potential between the tip and the substrate allows the fabrication of grayscale patterns with high precision.
Even though no specific student project is currently available on this topic, proactive students, interested in our research, are encouraged to get in touch with us for eventually discussing about “out-of-the-box” intuitions and ideas. In the case you are motivated to carry out a student project, please, directly contact Berke Erbas ([email protected]), Shulang Shen ([email protected]), Chenhao Wang ([email protected]) or Prof. Jürgen Brugger ([email protected]).
Transient electronics made by stencil lithography
At LMIS1, our research efforts in stencil lithography have yielded significant advancements. The recent invention of the bridge stencil has allowed us to pattern a wider range of shapes with greater precision. Expanding on this success, we are now shifting our focus to materials. Leveraging the resistless nature of stencil lithography and its ability to avoid liquid processes, we aim to utilize transient materials like magnesium and zinc for patterning. Our ultimate objective is to establish an electronic library in transient form, showcasing the potential of stencil lithography in the patterning of more kinds of materials.
Optimization of Ion Beam Etching for IGZO Thin-Film Transistors on Biodegradable Substrates
Type: Master/Semester Project
Section: Microengineering – Physics – Electric Engineering – Materials Science
Electronic waste has become an increasingly severe environmental issue, with traditional non-degradable substrates contributing significantly to this problem. One potential solution is to replace these conventional substrates with biodegradable materials, such as Polyvinyl Alcohol (PVA), cellulose, or silk. However, these materials often face challenges, including low fabrication thermal budgets and poor water or chemical resistance. As a result, it is essential to adapt the material choices and fabrication processes to overcome these limitations while still maintaining performance in electronic applications.
At LMIS1, the research focuses on using Indium-Gallium-Zinc Oxide (IGZO) as the semiconductor channel for thin-film transistors (TFTs) on biodegradable substrates. IGZO is a widely used n-type semiconductor in display technology, known for its room-temperature deposition via RF sputtering and its moderate electrical properties, including a carrier mobility of approximately 20 cm²/(V·s) in its amorphous state. The team employs stencil lithography for patterning the IGZO film, enabling a liquid-free, room-temperature fabrication process. So far, the team has successfully achieved clear patterning with 5 µm structures, and electrical properties have been validated through resistivity and Hall effect measurements. Additionally, a trial using ion beam etching (IBE) was conducted, which resulted in a 5 µm blurring with 25 nm etching depth.
The goal of this student project is to optimize the ion beam etching parameters for IGZO films patterned with stencil lithography. The focus will be on achieving the steepest possible edge with a controllable etching speed. The project will begin with IGZO films on solid substrates, such as silicon chips with a thermal oxide layer, and may extend to soft and biodegradable substrates if time allows. The use of stencils with bridges to pattern closed-loop structures, such as isolating IGZO islands, will also be explored. The final objectives will be tailored to the student’s interests, capabilities, and available time, providing a hands-on opportunity to contribute to the development of electronic devices on biodegradable substrates.
Figure 1 : (a) A stencil chip. (b) Process flow of IBE with stencil. (c) Optical image and (d) SEM of IGZO structures patterned by IBE through stencil, with (e) and (f) AFM scans of it, showing a blurring of 5 µm by etching 25 nm in depth.
Possible tasks:
- Optimize ion beam etching (IBE) parameters to achieve steep edge and controllable etching rate.
- Evaluate etching quality with AFM and SEM.
- Transfer process to biodegradable substrates.
- Fabricate closed-loop IGZO structures with bridge stencils.
Contact: Chenxiang Zhang ([email protected])
Droplet Microfluidics for Advanced Additive Manufacturing
Under the umbrella of multi-material 4D printing, at LMIS1, we are developing an innovative microfluidic-based additive manufacturing technique that can deposit polymerizable microdroplets encapsulating multiple materials with variable space resolutions. This technological advancement offers flexibility and accuracy in constructing complex structures and objects with enhanced functionalities while maintaining a similar production rate to existing AM techniques.
In-Air Droplet Generation & Solidification via Microfluidics
Type: Master/Semester Project
Section: Additive Manufacturing, Microengineering, Material Science
Project Overview
Join us in pioneering a novel 3D printing approach that leverages in-air droplet microfluidics to fabricate microscale polymer beads for voxel-by-voxel assembly of 3D structures. Traditional water-oil microfluidics pose challenges for direct printing. This project explores air-assisted droplet generation as an innovative solution. We investigate how polymerizable resin droplets can be formed mid-air using co-axial nozzles and immediately solidified via UV light before substrate deposition. Foreseeable challenges include optimizing nozzle geometry, droplet trajectory, and scaling up via multi-nozzle systems.
(Left): Illustration of a voxel-based 3D printing process. Resin droplets, formed through focused air flow at a co-axial glass nozzle, undergo UV-induced polymerization mid-air before reaching the substrate. (Middle): Various nozzle configurations are investigated to improve droplet formation consistency and increase printing throughput. (Right): Top: A printed structure composed of large resin droplets generated using a single-nozzle setup. Bottom: High-resolution capture of a resin droplet detaching from the nozzle during the printing process.
What You’ll Work On
Tasks will be tailored to your background and interests and may include:
- Designing 3D-printed units for assembling co-axial glass capillary nozzles
- Generating resin droplets using air flow in microfluidic devices
- Characterizing droplet size, frequency, and dispersity as functions of flow parameters
- Exploring in-air UV polymerization for real-time droplet solidification
- Developing multi-nozzle setups for high-throughput 3D printing
References:
[1] Zhang, et al. Trends in Biotechnology (2023).
[2] Takagi, et al. Microfluidics and Nanofluidics 25.9 (2021)
[3] Yang, et al. International Journal of Bioprinting 10.1 (2024).
Contact: Tao Zhang (tao.zhang@epfl.ch)
Dr. Arnaud Bertsch (arnaud.bertsch@epfl.ch)
Prof. Jürgen Brugger ([email protected])
Mixed reality learning for microfabrication practical
At LMIS1, we are currently embarking on a novel journey to integrate mixed reality into learning methods for microfabrication processes. This approach presents a promising avenue as it allows hands-free interaction and diminishes cognitive load during learning. Our research is dedicated to creating interactive mixed-reality content to revolutionize microfabrication and cleanroom training practices. As we scrutinize the effectiveness and feasibility of multimodal learning within a mixed reality framework, we are embracing various learning strategies including gamification, scaffolding, and multimodal interaction.
Designing MR Guidance for Microfabrication via Real-World Interaction
Type: Master/Semester Project
Section: Additive Manufacturing, Microengineering, Material Science
Project Overview
In LMIS1, we have been developing different affordances of a mixed reality system for microfabrication learning. This is a continuous work based on the previous project. In this project, we would like to handle the learning task by using Unity 3D and extensions. We have already developed and implemented a mixed reality platform, and are looking forward to a low-threshold implementation in the lab with real-world object interaction. Additionally, this project requires organizing a small-scale study and testing the usability and microfabrication experimental practices’ adaptability. Based on the feedback and data, an iterative design and development for improvement is needed.
What You’ll Work On
Tasks will be tailored to your background and interests and may include:
- Exploring real-world sensor events through Azure IoT Hub/Socket for secure messaging
- Developing and prototyping new communication solutions for HoloLens
- Designing 3D models that fit the microfabrication process, for example, plasma generation.
- Exploring the network communication for collaboration synchronization.
- Exploring the low-cost implementation of a virtual reality system based on the current project
- Evaluate and assess the usability test for the mixed-reality platform
Why Join?
- Hands-on design and development experience for mixed reality
- The cutting-edge extended reality (XR) development experience
What do we expect?
- A proactive student who would like to contribute to the challenging problem
- Able to program at least one language fluently, preferably C# or Python
- Previous project experience or related background knowledge in communication
- Curious about the mixed reality technology, if you also have a microengineering background, it will also be preferred
Contact: Qinglan Shan ([email protected])
ESR and NMR Spectroscopy
Electron Spin Resonance (ESR) spectroscopy is a widely used technique for the recognition of chemical radicals and species. At LMIS1 we are currently working on the optimization of ESR sensors’ sensitivity, especially for samples in the nanoliter and sub-nanoliter range, through the use of superconducting resonating structures.
While no specific student project is currently available on this topic, proactive students, interested in our research, are encouraged to get in touch with us for eventually discussing about “out-of-the-box” intuitions and ideas. In the case you are motivated to carry out a student project, please, directly contact Xinwei Li ([email protected]), Mohammadparsa Mirzaeisarmad ([email protected]) or Prof. Giovanni Boero ([email protected]).