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2023 Summer School: Tribology and Surfaces Interactions
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EPFL – AMI course: Nanoparticles, from fundamentals to applications
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Qiagen QiaCube automated DNA/RNA extraction
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Workshop, Nov 24, 2021
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Microscopes CIME Lausanne
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SEM Zeiss Gemini
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TEM Titan Themis
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Bachelor-Master
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Introduction to microscopy + Laboratory work
Experimental methods in physics
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MSE-636 | Scanning Electron Microscopy Techniques
MSE-637 | Transmission Electron Microscopy and Diffraction
MSE-735 | Scanning and Analytical Transmission Electron Microscopy
MSE-704 | 3D Electron Microscopy and FIB-Nanotomography
CH-633 | Advanced Solid State and Surface Characterization
CIME Workshop on STEM
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General information
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Bonding with the Solid-Liquid Interdiffusion (SLID) process
Laser Welding CTI Project
Solid Oxide Fuel Cell
Focused Ion Beam, ultimate TEM specimen preparation
Superconductors for High magnetic fields
Focused Ion Beam, 3D Microscopy
Focused Ion Beam, cross-sectioning, micromachining
Angular resolved low loss EELS
NaPhoD nanohybrids for Photonic devices
Structure of the adult sensory neocortex
Photovoltaics and thin films
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Image of the moment – winners
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Images for the contest 2021
Images for the contest 2022
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Other analytical resources and platforms at EPFL
Center of MicroNanoTechnology
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About CMi
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Ebeam lithography
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Raith EBPG5000 – Ebeam tool
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Writing Strategy
Conductive Substrate
Opaque Reflective Surface
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CATS
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MMA / PMMA
ZEP 520A
CSAR 62
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nLOF
Electra 92
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ATMsse OPTIspin SB20 coater
Plade Solvents wet bench
Water / Base wet bench
Präziterm hot plate
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Terra universal nitrogen cabinet
Photolithography
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DUV (λ = 248nm) inline track & stepper
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ASML PAS 5500/350C
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ASML 4x reticle template
ASML 4x reticle visual guide
ASML 4x reticle design guide
TEL Clean Track ACT-8
Automatic coaters and developers
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Süss ACS200 GEN3
EVG 150 – AUTOMATIC RESIST PROCESSING CLUSTER
RITETRACK 88 SERIES – AUTOMATIC COATER AND DEVELOPER TRACKS
Hamatech HMR900
Manual coaters
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ATMsse OPTIspin SB20
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ATMsse OPTIspin SB20 Manual
Sawatec LSM-250 & HP-200
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Sawatec LSM-250 & HP-200 Manual
Sawatec LSM-200 & HP-401-Z
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Sawatec LSM-200 & HP-401-Z Manual
Sawatec LSM-250 for MISC polymers
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Sawatec LSM-250 MISC Manual
Exposure tools: laser writers
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Heidelberg Instruments VPG200
Heidelberg Instruments MLA150 – 1 & 2
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MLA150 Manual
HIMT “convert” Manual (MLA150)
Nanoscribe Photonic Professional GT+
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Nanoscribe PPGT+ Manual
Nanoscribe Alignment Manual
Describe Manual
Exposure tools: mask-aligners
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Süss MA6Gen3
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MA6 Gen3 Manual
MA6 Gen3 Assisted Alignment Manual
MA6 Gen3 Film Masks Manual
Süss MA6/BA6
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MA6 Manual
BA6 Manual
Süss MJB4
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MJB4 Manual
Photolithography wet benches
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Plade Solvent Z01
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Plade Solvent, Lift-off Manual
Coillard Solvent Z06
Plade Solvent Z06
Arias Solvent Z13
Arias Base Z13
Arias “Lift-off” Z12
Additional hot plates / ovens
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YES 310TA, Vacuum cure & HMDS vapor prime oven
Accuplate, hotplate for SU-8 PEB and hardbake
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Accuplate Manual
Dataplate, hotplate for SU-8 softbake, PEB or hardbake
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Dataplate Manual
Heraeus T6060, multipurpose oven
Despatch LCD1-16NV-3, biocompatible oven
Etching
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Ion Beam Etching
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Veeco Nexus IBE350
Plasma Etching
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STS Multiplex ICP
Alcatel AMS 200 SE
SPTS APS
TEL Unity Me
SPTS Rapier
Resist Strip and Descum
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Oxford PRS900
Tepla 300
Tepla GiGAbatch
ESI 3511 Downstream Plasma Asher
Jelight UVO Cleaner
Gas Etching
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SPTS uEtch
SPTS Xactix X4 – XeF2 Silicon etching system
Grinding / Polishing
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STEAG MECAPOL 460 – CMP (CHEMICAL MECHANICAL POLISHING)
Alpsitec E460 F – CMP (Chemical Mechanical Polishing)
Post CMP Cleaning System GnP Cleaner 428
DAG810 – AUTOMATIC SURFACE GRINDER
Wet Etching
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UFT Piranha
UFT Resist
Plade Oxide
Plade Metal
Plade Six Sigma KOH
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Protek Protective Stop Layer
Tousimis Automegasamdri 915B – Critical Point Dryer
Arias Acid
Thin films
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LPCVD / Dry or wet oxidation / Alloying / Doping / Diffusion / Densification / Annealing / ALD
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Centrotherm furnaces
Plade RCA
ATOMIC LAYER DEPOSITION BENEQ TFS200 (ALD 1)
ATOMIC LAYER DEPOSITION BENEQ TFS200 (ALD 2)
RTP JETFIRST 200
ROVAK Flash Lamp Annealing System Semi-Line 3.0
PECVD
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Oxford Instruments PlasmaPro 100 ICPCVD
Evaporation
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Alliance-Concept EVA 760
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User Manual
Recipes
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Leybold Optics LAB 600H
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User Manual
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Vacotec
Vacotec VACO 250
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Boats
Plassys MEB550SL3 UHV Evaporator
Sputtering
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Pfeiffer SPIDER 600
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Alliance-Concept DP 650
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Recipes
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User Manual
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Pulsed Laser Deposition
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Solmates SMP 800
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Available PVD targets in CMi
Electroplating / Parylene coating
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Desaules, wet bench for electroplating
Silicet Electroplating unit, Cu
Comelec C-30-S
Metrology
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AFM
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Bruker FastScan AFM
FIB / SEM / EDX / ProSEM
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FEI Nova 600 NanoLab
Zeiss LEO 1550
Zeiss MERLIN
EDX
ProSEM software
XPS / AES available at MHMC
Mechanical profilometers
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Tencor Alpha-Step 500
Bruker Dektak XT
KLA Tencor D600
Optical measurement
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Krüss DSA-30E
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Krüss DSA-30E Manual
Krüss / ImageJ Surface Tension Manual
Krüss Surface Free Energy Models
Sopra GES 5E
Woollam RC2
Bruker Contour X
Nanospec AFT-6100
FilMetrics F20-UV
Filmetrics F54
Toho Technology FLX 2320-S
Bruker VERTEX70 FT-IR
Electrical measurement
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Filmetrics R50 – 200 – 4PP
AIT CMT-SR2000N 4-Point Probe Measurement System
MPI TS150 Prober Station
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Süss PM8 Manual
Optical microscopy
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Microscopes at CMi
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Leica DM8000
Nikon Optiphot 200, inspection microscope
Nikon Optiphot 150, inspection microscope
Nikon MM 40, inspection and 2-D metrology microscope
Mitutoyo, inspection microscope
Nikon Eclipse LV150 microscope
Packaging – Miscellaneous
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Bonding
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Süss SB6
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Süss SB6 Manual
TPT HB10
F&S Bondtec 56i
Laser Machining – Milling
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OPTEC LSV3
T-Tech QC5000S-E
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Disco DAD321
Graphtec RoboPro CE5000-40-CRP
Printing
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NanoImprint EHN-3250
Miscellaneous
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PDMS line
Dry Film Laminators
Surfx Atomflo 400L
Idonus shadow mask aligner
Neytech Qex Furnace
Furnace ATV PEO-601
Furnace ATV SRO-702
III/V Lab – IPHYS
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Ebeam Lithography
Photolithography
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Layout design
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L-Edit installation
Mask Fabrication
Photoresists available in CMi
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AZ 1512 HS
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AZ 1512 HS Datasheet
AZ ECI 3007
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AZ ECI 3007 Datasheet
AZ ECI 3027
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AZ 10XT-07
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AZ 10XT-20
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AZ 10XT-20 Datasheet
AZ 10XT-60
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AZ 40XT
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AZ 40-XT Datasheet
LOR 5A / AZ 1512 HS
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LOR 5A Datasheet
AZ NLOF 2020
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AZ nLOF 2020 Datasheet
AZ 15nXT
SU-8
M108Y
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M108Y Datasheet
M35G
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M35G Datasheet
PI 2610 & PI 2611
Photolithography Nomenclature
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Available PVD targets in CMi
PVD definitions
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Silicon Wafers
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Flow Cytometry Core Facility
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The Team
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LSRII and Fortessa
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Gene Expression Core Facility
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Next Generation Sequencing
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ORF & cDNA Collections
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Overview
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ORFeome Collaboration (OC)
CCSB-Broad lentiviral expression library (CB-Lenti)
Collection of assorted human ORFs (CAHOS)
Mouse ORFs assorted in a collection (MOUSAIC)
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My ORF of interest is missing
I need another expression vector
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C1 Single-Cell Auto Prep system
10x Genomics Chromium Single Cell Controller
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Bertarelli Foundation Gene Therapy Core Facility
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Gaseous Helium Recovery System
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SubSynchronous Resonance
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Short Circuit of a Large Power Plant
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Leica DM5500
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Leica SP8 UP2
Leica SP8 STED 3X
NIKON SIM/STORM
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Olympus Cell xCellence
Olympus Slide Scanner 1
Olympus Slide Scanner 2
PerkinElmer Operetta
Visitron CSU-W1
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Zeiss LSM700 IN1
Zeiss LSM700 IN2
Zeiss LSM700 UP2
Zeiss LSM710
Zeiss LSM980
Zeiss PALM Microbeam
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Protein Production and Purification
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Get a free account
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ECPS – Laminar-turbulent patterns
LEB — Super-resolution fluorescence microscopy
MIP:lab — BrainNets: Extracting Functional Brain Networks from Massive Data Acquisition Initiatives
Laboratory of Astrophysics
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Laboratory of Theoretical Physics of Nanosystems
Reconfigurable Robotics Lab
iCeBOUND2
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Laboratory for Multiscale Mechanics Modeling
LASTRO – Lenstool
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Fidis
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Why do we conduct research with animals?
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Species
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3R – Replace, Reduce, Refine
FAQ – Research with animals
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Postdocs Center
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Find funding and prepare your proposal
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EPFL-Stanford Exchange Programme, funded by Firmenich
EPFLeaders4impact
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CYD Fellowships: proof of concept
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CYD proof of concept
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EPFL Call for Solutions4Sustainability
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EPFL Day of International Research 2022
EPFL Foundations Day 2022
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