Laurell WS-650-23

To be read first:

  • SOP validation: Any material that is being spin-coated on the Laurell manual coater must be approved by the CMi Staff! A standard operating procedure (SOP) is required and must be validated to use any new material on the system.
  • Cross-Contamination: Different materials with non-compatible chemistry are being coated on the Laurell coater. Make sure to clean the chuck after each working session and, if necessary, exchange aluminum foils in the coater bowl. A dedicated trash-bin is available to throw away contaminated material.

  • Please immediately inform the CMi staff in case of problems with the equipment.


  1. No booking restrictions.
  2. 24/7 booking/use is possible with CMi+1 extended access.
  3. Reservation names must correspond to operators.


  1. Introduction
  2. Equipement description
  3. Users manuals
  4. Links
  5. Pictures gallery

I. Introduction

The Laurell manual coater line is equipped with a Laurell WS-650-23 spin-coating unit and two Präzitherm PZ 28-2 ET / PR 5 SR hotplate & controller units from Harry Gestigkeit GMBH. One hotplate is equipped with a cover and input for nitrogen gas for baking under N2 flow.

The Laurell coater line is dedicated to the coating of non-standard (i.e. other than novolak-based photoresists) thin films. This includes but is not restricted to:

  • Polymer molecules in aqueous solution for sacrificial layer applications: DEXTRAN, PAA, PSS, PVA, …
  • Spin-on dielectrics/glass, spin-on dopants (boron, phosphorous, etc…)
  • Conductive polymers: PEDOT:PSS, Nafion
  • Unsafe polymer/photoresists diluted with non-traditional, unsafe solvent: Omnicoat, ELPAC PA-5500 H, Solvene/PVDF, …

II. Equipment description

Laurell manual coater:

  • Compact spin-coater with in-deck configuration
  • Handle wafers up to 6″ diameter or 6″ x 6″ plates
  • Minimum chip size: 10mm * 10mm with adptator ring
  • Rotation speeds up to 12’000 RPM (recommended MAX 6000 RPM)
  • Acceleration up to 30’000 RPM/s

Available chucks:

Three different chucks (or adaptator) for different wafer sizes:

Präzitherm hotplates:

  • Precision hotplates PTZ 28-2 ET combined with PR 5 SR controller
  • Maximum tempearture 350 °C, precision +/- 0.5 °C
  • Hotplate surface 280 mm x 200 mm
  • Programmable temperature ramps with up to 5 steps
  • Second hotplate equipped with cover and N2 line for nitrogen ambiant curing

III. User manuals

IV. Links

V. Pictures gallery