Dataplate, hotplate for SU-8 softbake, PEB or hardbake

( Right ) Dataplate ramped hotplate with cover and integrated controller

To be read first:

  • Used with aluminum protection foil only. Users should ask the staff to change it if unexpected contamination or damage are visible.
  • Please immediately inform the CMi staff in case of problems with the equipment.


  1. Reservation names must correspond to operators.


  1. Introduction
  2. Equipement description
  3. Users manuals
  4. Links
  5. Pictures gallery

I. Introduction

Dataplate is a fully integrated (with controller) and programmable  hotplate with a closed cover and exhaust. It can operate with two distinct modes: 1) fixed temperature or 2) programmed multi-step temperature profile.

It is mainly used, as a backup to the Sawatec HP 401-Z, for SU-8 softbake, PEB and hardbake steps.

Other types of thermal processes should be discussed with the equipment responsibles.

II. Equipment description

Technical characteristics:

  • Large-area integrated hotplate & controller
  • Five 4″ wafers maximum
  • Maximum temperature 220 °C, precision +/- 0.5 °C
  • Ramp speed up to 55 °C/hour
  • Hotplate surface > 250 mm x 250 mm
  • Programmable temperature profile


The documentation for the SU-8 process is found here:

III. User manuals

IV. Links

V. Pictures gallery