Dataplate, hotplate for SU-8 softbake, PEB or hardbake

( Right ) Dataplate ramped hotplate with cover and integrated controller

To be read first:

  • Used with aluminum protection foil only. Users should ask the staff to change it if unexpected contamination or damage are visible.
  • Please immediately inform the CMi staff in case of problems with the equipment.

RESERVATION RULES AND BOOKING FEES POLICY:

  1. Reservation names must correspond to operators.

Contents:

  1. Introduction
  2. Equipement description
  3. Users manuals
  4. Links
  5. Pictures gallery

I. Introduction

Dataplate is a fully integrated (with controller) and programmable  hotplate with a closed cover and exhaust. It can operate with two distinct modes: 1) fixed temperature or 2) programmed multi-step temperature profile.

It is mainly used, as a backup to the Sawatec HP 401-Z, for SU-8 softbake, PEB and hardbake steps.

Other types of thermal processes should be discussed with the equipment responsibles.

II. Equipment description

Technical characteristics:

  • Large-area integrated hotplate & controller
  • Five 4″ wafers maximum
  • Maximum temperature 220 °C, precision +/- 0.5 °C
  • Ramp speed up to 55 °C/hour
  • Hotplate surface > 250 mm x 250 mm
  • Programmable temperature profile

Process:

The documentation for the SU-8 process is found here:

III. User manuals

IV. Links

V. Pictures gallery