Conference papers

2025

Beyond the Mask: Advancing Fabrication and Immersive Learning

Q. Shan; B. Erbas; J. Park; P. Torres-Vila; C. Zhang et al. 

2025. 2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Orlando, FL, USA, 2025-06-29 – 2025-07-03. p. 112 – 117. DOI : 10.1109/transducers61432.2025.11111244.

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3D Lipid Microrobots for Simultaneous Delivery of Lipophilic and Hydrophilic Drugs

J. Park; A. Bertsch; J. Brugger 

2025. 2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Orlando, FL, USA, 2025-06-29 – 2025-07-03. p. 1961 – 1964. DOI : 10.1109/transducers61432.2025.11111541.

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Combination of Thermal Scanning Probe Lithography and Directed Self-Assembly of Block Copolymers

I. Uranga-Granados; B. Erbas; P. Torres-Vila; A. Bertsch; J. Llobet et al. 

2025. SPIE Advanced Lithography + Patterning (2025), San Jose, United States, 2025-02-22 – 2025-02-27. DOI : 10.1117/12.3050036.

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2024

MixedLAB: Mixed Reality to Teach Students Experimental Knowledge in Microfabrication

Q. Shan; J. Chatain; M. Kapur; J. Brugger 

2024. 52nd Annual Conference of the European Society for Engineering Education, Lausanne, Switzerland, 2024-09-02-2024-09-05. DOI : 10.5281/zenodo.14256909.

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Optical Ring Resonators in Sputtered Aluminum Nitride on Insulator for Integrated Photonic MEMS

J. Spettel; N. Andrianov; F. Dubois; H. Furci; M. S. Azeem et al. 

2024. International Conference on Optical MEMS and Nanophotonics, San Sebastian, Spain, 2024-07-28 – 2024-08-01. DOI : 10.1109/OMN61224.2024.10685232.

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2023

LIQUID-IN-A-MEMS: ENCAPSULATION OF LIQUID IN A MICROCAPSULE BY INKJET PRINTING

J. Park; A. Bertsch; J. Brugger 

2023. 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Kyoto, Japan, 2023-06-25 – 2023-06-29.

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Biodegradable Implantable Microsystems

J. Park; J. Brugger 

2023. 2022 International Electron Devices Meeting (IEDM), San Francisco, CA, USA, December 3-7, 2022. p. 29.4.1 – 29.4.4. DOI : 10.1109/IEDM45625.2022.10019376.

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2021

A Low Power 35 GHz HEMT Oscillator for Electron Spin Resonance Spectroscopy

N. Sahin-Solmaz; A. V. Matheoud; G. Boero 

2021. 2021 IEEE Radio Frequency Integrated Circuits Symposium (RFIC), Atlanta, GA, USA, June 7-9, 2021. p. 19 – 22. DOI : 10.1109/RFIC51843.2021.9490487.

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Printed Polymer Composite Sensors for Low-Power, Near Room-Temperature Detection and Classification of VOCS

M. Mahdi Kiaee; T. Maeder; J. Brugger 

2021. 34th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021), Gainesville, FL, USA (virtual event), January 25-29, 2021. p. 274 – 277. DOI : 10.1109/MEMS51782.2021.9375208.

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A Glass-Like Carbon Mems Strain Sensor

J. Jang; G. Panusa; G. Boero; J. Brugger 

2021. 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), ELECTR NETWORK, Jun 20-25, 2021. p. 871 – 874. DOI : 10.1109/TRANSDUCERS50396.2021.9495726.

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2020

Design Concerns for In-body Antennas Based on Frequency Analysis of Fundamental Radiation Limitations

Z. Sipus; M. Bosiljevac; D. Nikolayev; A. Skrivervik 

2020. 14th European Conference on Antennas and Propagation (EuCAP), Copenhagen, DENMARK, Mar 15-20, 2020. DOI : 10.23919/EuCAP48036.2020.9135679.

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3D Printed Micro-Scaffolds Loaded by Inkjet Printing With in-Precise Amount of Drug

F. Zheng; J. Jang; C. Tse; J. Brugger 

2020. IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS), ELECTR NETWORK, Sep 27-30, 2020. p. 426 – 429. DOI : 10.1109/NEMS50311.2020.9265525.

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2019

Harnessing Poisson Effect to Realize Tunable Tunneling Nanogap Electrodes on PDMS Substrates for Strain Sensing

H. S. Yu; G. Boero; J. Brugger 

2019. 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, Germany, June 23-27, 2019. p. 2368 – 2371. DOI : 10.1109/TRANSDUCERS.2019.8808819.

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Planar plasmonic antenna arrays resolve transient nanoscopic heterogeneities in biological membranes

P. M. Winkler; R. Regmi; V. Flauraud; H. Rigneault; J. Brugger et al. 

2019. Joint 12th EBSA European Biophysics Congress / 10th IUPAP International Conference on Biological Physics (ICBP), Madrid, SPAIN, Jul 20-24, 2019. p. S107 – S107.

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Film Morphology Effect on VOC Sensor Performance Fabricated by Drop-On-Demand Inkjet-Printing

M. M. Kiaee; T. Maeder; J. Brugger 

2019. 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS), Berlin, Germany, Jun 23-27, 2019. p. 1361 – 1364. DOI : 10.1109/TRANSDUCERS.2019.8808652.

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Wearable Triboelectric Generator based on a Hybrid Mix of Carbon Nanotube and Polymer Layers

M. Su; J. Brugger; B. J. Kim 

2019. 18th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Daytona Beach, FL, Dec 04-07, 2018. DOI : 10.1088/1742-6596/1407/1/012047.

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Multi-ReRAM synapses for artificial neural network training

I. Boybat; C. Giovinazzo; E. Shahrabi; I. Krawczuk; J. Giannopoulos et al. 

2019. IEEE International Symposium on Circuits and Systems (IEEE ISCAS), Sapporo, JAPAN, May 26-29, 2019. DOI : 10.1109/ISCAS.2019.8702714.

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2018

Fabrication and Characterization of Biodegradable, Thermal-Responsive Silk Composite Membrane

Y. Wang; X. Zhang; J. Brugger 

2018. The International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Singapore, 22-26, April 2018. p. 479 – 482. DOI : 10.1109/NEMS.2018.8556951.

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The key impact of incorporated Al2O3 barrier layer on W-based ReRAM switching performance

E. Shahrabi; C. Giovinazzo; J. Sandrini; Y. Leblebici 

2018. 15th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD) / 14th Conference on PhD Research in Microelectronics and Electronics (PRIME), Prague, CZECH REPUBLIC, Jul 02-05, 2018. p. 69 – 72. DOI : 10.1109/PRIME.2018.8430371.

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2017

Self-assembly of micro/nanosystems across scales and interfaces

M. Mastrangeli 

2017. 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017), Kaohsiung, Taiwan, June 18-22, 2017. p. 676 – 681. DOI : 10.1109/TRANSDUCERS.2017.7994139.

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A transparent silk-fibroin-based triboelectric microgenerator for airflow energy harvesting

X. Zhang; Y. Guo; Y. Wang; H. Zhang; J. Brugger 

2017. IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Los Angeles, CA, USA, April 9-12, 2017. p. 65 – 68. DOI : 10.1109/NEMS.2017.8016975.

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Flexible fabric-based wearable solid-state supercapacitor

J-H. Huang; Y. Song; X-X. Chen; X. Zhang; L-M. Miao et al. 

2017. IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Los Angeles, CA, USA, April 9-12, 2017. p. 169 – 172. DOI : 10.1109/NEMS.2017.8016998.

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2016

Plasmonic photoconductance in free-standing monolayered gold nanoparticle membranes

E. Terver; M. Gauvin; T. Alnasser; I. Abid; A. Mlayah et al. 

2016. 11th IEEE Nanotechnology Materials and Devices Conference (NMDC), Toulouse, FRANCE, OCT 09-12, 2016. DOI : 10.1109/NMDC.2016.7777131.

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Spark discharge synthesis of semiconductor nanoparticles for thick-film metal oxide gas sensors

A. A. Efimov; I. A. Volkov; V. Ivanov; A. A. Vasiliev; A. Varfolomeev et al. 

2016. 30th Eurosensors Conference, Eurosensors 2016, Budapest (HU), 4-7.9.2016. p. 1036 – 1039. DOI : 10.1016/j.proeng.2016.11.334.

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Penciling A Triboelectric Power Source On Paper

X. Zhang; J. Brugger; B. Kim 

2016. 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, PEOPLES R CHINA, JAN 24-28, 2016. p. 1169 – 1172. DOI : 10.1109/MEMSYS.2016.7421844.

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2014

Automated Real-Time Control of Fluidic Self-Assembly of Microparticles

M. Mastrangeli; F. S. Schill; J. Goldowsky; H. Knapp; J. Brugger et al. 

2014. 2014 IEEE International Conference on Robotics and Automation (ICRA 2014), Hong Kong (China), May 31 – June 7, 2014. p. 5860 – 5865. DOI : 10.1109/ICRA.2014.6907721.

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Single-Cell 3D Bio-Mems Environment With Engineered Geometry And Physiologically Relevant Stiffnesses

M. Marelli; N. Gadhari; G. Boero; M. Chiquet; J. Brugger 

2014. 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, CA, JAN 26-30, 2014. p. 177 – 180. DOI : 10.1109/MEMSYS.2014.6765603.

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Shift Dynamics of Capillary Self-Alignment

G. Arutinov; M. Mastrangeli; E. C. P. Smits; G. van Heck; H. F. M. Schoo et al. 

2014. International Precision Assembly Seminar (IPAS 2014), Chamonix, FR, February 16-18, 2014. p. 61 – 68. DOI : 10.1007/978-3-662-45586-9_9.

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Grazing angle X-ray fluorescence from periodic structures on silicon and silica surfaces

S. H. Nowak; D. Banas; W. Blchucki; W. Cao; J. -C. Dousse et al. 

2014. 15th International Conference on Total Reflection X-ray Fluorescence Analysis and Related Methods / 49th Annual Conference on X-ray Chemical Analysis (TXRF), Osaka, JAPAN, SEP 23-27, 2013. p. 65 – 75. DOI : 10.1016/j.sab.2014.03.015.

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Liquid-Filled Sealed Mems Capsules Fabricated By Fluidic Self-Assembly

M. Mastrangeli; L. Jacot-Descombes; M. R. Gullo; J. Brugger 

2014. IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014), San Francisco (USA), January 26-30, 2014. p. 56 – 59. DOI : 10.1109/MEMSYS.2014.6765572.

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2013

In-liquid MEMS assembly by optical trapping

M. R. Gullo; L. Jacot-Descombes; J. Brugger 

2013. 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), Taipei, Taiwan, 20-24 01 2013. p. 78 – 81. DOI : 10.1109/MEMSYS.2013.6474181.

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High aspect ratio etching of nanopores in PECVD SiC through AAO mask

S. Wu; M-O. Bammatter; W. Tang; V. Auzelyte; H. X. Zhang et al. 

2013. 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Suzhou, China, April 7-10, 2013. p. 986 – 989. DOI : 10.1109/NEMS.2013.6559887.

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Polymeric hemispherical pico-liter micro cups fabricated by inkjet printing

L. Jacot-Descombes; M. R. Gullo; V. J. Cadarso; M. Mastrangeli; J. Brugger 

2013. 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Suzhou, China, 7-10 04 2013. p. 1119 – 1122. DOI : 10.1109/NEMS.2013.6559918.

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Al2O3/W hetero-structured nanopore membranes: From native to tunable nanofluidic diodes

S. Wu; F. Wildhaber; A. Bertsch; J. Brugger; P. Renaud 

2013. 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Suzhou, China, April 7-10, 2013. p. 998 – 1001. DOI : 10.1109/NEMS.2013.6559890.

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2012

Sub micrometer ceramic structures fabricated by molding a polymer-derived ceramic

J. Grossenbacher; R. M. Gullo; R. Grandjean; T. Kiefer; J. Brugger 

2012. Micro- and Nano-Engineering (MNE) 2011, Berlin, Germany, September 19-23, 2011. p. 272 – 275. DOI : 10.1016/j.mee.2012.04.024.

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Biomimetic soft lithography on curved nanostructured surfaces

V. Auzelyte; V. Flauraud; C. Busto; V. Javier; T. Kiefer et al. 

2012. September 19-23, Berlin, Germany, p. 269 – 271. DOI : 10.1016/j.mee.2012.03.013.

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Stencil-nanopatterned back reflectors for thin-film amorphous silicon n-i-p solar cells

C. Pahud; V. Savu; M. Klein; O. Vazquez-Mena; K. Soederstroem et al. 

2012. 38th IEEE Photovoltaic Specialists Conference (PVSC). p. 694 – 696. DOI : 10.1109/PVSC.2012.6317704.

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Integrated long-range thermal bimorph actuators for parallelizable bio-AFM applications

J. Henriksson; R. M. Gullo; J. Brugger 

2012. 11th IEEE Sensors Conference, Taipei, Taiwan, October 28-31, 2012. p. 789 – 792. DOI : 10.1109/ICSENS.2012.6411507.

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2011

Use of Vertically-Aligned Carbon Nanotube Array to Enhance the Performance of Electrochemical Capacitors

M. Guittet; A. I. Aria; M. Gharib 

2011. IEEE Nano, Portland, Oregon, USA, August 15-18 2011. p. 80 – 85. DOI : 10.1109/NANO.2011.6144354.

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Vertically-Stacked Si Nanowire FETs with sub-micrometer Gate-All-Around polysilicon gates patterned by nanostencil lithography

D. Sacchetto; S. Xie; A. V. Savu; M. Zervas; G. De Micheli et al. 

2011. 37th International Conference on Micro and Nano Engineering (MNE), Berlin, Germany, September 19-23, 2011.

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New inks for the direct drop-on-demand fabrication of polymer lenses

A. Voigt; U. Ostrzinski; K. Pfeiffer; J. Y. Kim; V. Fakhfouri et al. 

2011. 36th International Conference on Micro & Nano Engineering (MNE), Genoa, Italy, September 19-22, 2010. p. 2174 – 2179. DOI : 10.1016/j.mee.2010.12.004.

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Robust PECVD SiC membrane made for stencil lithography

S. Xie; V. Savu; W. Tang; O. Vazquez Mena; K. Sidler et al. 

2011. 36th International Conference on Micro & Nano Engineering (MNE), Genoa, Italy, September 19-22, 2010. p. 2790 – 2793. DOI : 10.1016/j.mee.2010.11.056.

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Characterization of Hydrophobic Forces for in Liquid Self-Assembly of Micron-Sized Functional Building Blocks

R. M. Gullo; L. Jacot-Descombes; L. Aeschimann; J. Brugger 

2011. 2010 MRS Fall Meeting, Boston, Massachusetts, USA, November 30-December 2, 2010. DOI : 10.1557/opl.2011.466.

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Ultra-low power palladium-coated MEMS resonators for hydrogen detection under ambient conditions

J. Henriksson; L. G. Villanueva; J. Brugger 

2011. 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Beijing, China, 5-9 June, 2011. p. 787 – 790. DOI : 10.1109/TRANSDUCERS.2011.5969266.

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Solid-state Nanopore Array Membranes Patterned by Electron Beam Lithography, Nanosphere Lithography and Aluminum Anodization

S. Wu; M. J. K. Klein; O. Vazquez-Mena; V. Auzelyte; V. Savu et al. 

2011. 8th International Conference on Multi-Material Micro Manufacture (4M 2011)’, u’8th International Conference on Multi-Material Micro Manufacture (4M 2011)’]. p. 225 – 229. DOI : 10.3850/978-981-07-0319-6_200.

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Fabrication of polymeric micro structures by controlled drop on demand inkjet printing

L. Jacot-Descombes; R. M. Gullo; V. J. Cadarso Busto; J. Brugger 

2011. 22nd Micromechanics and Micro systems Europe Workshop, Toensberg, Norway, June 19-22, 2011. p. 97 – 100.

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Heated membranes prevent clogging of apertures in nanostencil lithography

S. Xie; A. V. Savu; J. Brugger 

2011. The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’11 ), Beijing, China, June 5-9, 2011. p. 998 – 1001. DOI : 10.1109/TRANSDUCERS.2011.5969501.

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Three-level stencil alignment fabrication of a high-k gate stack organic thin film transistor

N. V. Cvetkovic; K. Sidler; V. Savu; J. Brugger; D. Tsamados et al. 

2011. 36th International Conference on Micro & Nano Engineering (MNE), Genoa, Italy, September 19-22, 2010. p. 2496 – 2499. DOI : 10.1016/j.mee.2010.12.086.

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2010

Millimeter waves for NMR enhancement

A. Macor; E. de Rijk; G. Boero; J-P. Ansermet; S. Alberti 

2010. 35th Int. Conference on Infrared, Millemeter and Terahertz Waves (IRMMW-THz 2010), 2010. DOI : 10.1109/ICIMW.2010.5612362.

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High-density, high-aspect ratio epoxy microstructures by Direct Write Laser Patterning

V. J. Cadarso; K. Pfeiffer; U. Ostrzinski; J-B. Bureau; G-A. Racine et al. 

2010. 36th International Conference on Micro & Nano Engineering (MNE), Genoa, Italy, September 19-22, 2010.

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Ambipolar silicon nanowire FETs with stenciled sub-µm metal gate

D. Sacchetto; V. Savu; G. De Micheli; J. Brugger; Y. Leblebici 

2010. 36th International Conference on Micro and Nano Engineering (MNE 2010), Genova, Italy, September 19-22, 2010.

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Direct polymer patterning by high energy reactive ion beam through stencil masks

S. Brun; E. Guibert; A. V. Savu; O. Vazquez Mena; J. Brugger et al. 

2010. Micro and Nano Engineering (MNE) 2010, Genova, Italy, September 19-22, 2010.

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Very Large Scale Arrays of Chemo-Mechanical Nano-Switches for Ultralow Power Hydrogen Sensing

T. Kiefer; A. Salette; L. G. Villanueva; J. Brugger 

2010. 23rd International IEEE Conference on Micro Electro Mechanical Systems MEMS’2010, Hong Kong, 24-28 January, 2010. DOI : 10.1109/MEMSYS.2010.5442547.

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Direct write laser at visible wavelength for patterning of high aspect ratio epoxy materials

V. J. Cadarso; K. Pfeiffer; U. Ostrizinski; A. Voigt; G. Gruetzner et al. 

2010. EIPBN- The 54th International Confrence on Electron, Ion, Photon Beam Technology and Nanofabrication, Anchorage, Alaska, USA, June 1-4, 2010.

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Silicon nanowire AFM tips grown on released scanning probe cantilevers from stencil-deposited catalysts

A. V. Savu; D. Engstrom; X. Zhu; W. Milne; P. Boggild et al. 

2010. M36th International Conference on Micro & Nano Engineering (MNE’2010), Genova, Italy, September 19-22, 2010.

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Nanoporous SiN membranes patterned by wafer-scale nanosphere lithography

V. Savu; M. J. K. Klein; F. Montagne; O. Vazquez-Mena; J. Brugger et al. 

2010. EIPBN’2010. The 54th International Confrence on Electron, Ion, Photon Beam Technology and Nanofabrication., Anchorage, Alaska, U.S.A., June 1-4, 2010.

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Magnetic nanocrystal modified epoxy photoresist for microfabrication of AFM probes

C. Ingrosso; C. Martin Olmos; A. Llobera; C. Innocenti; C. Sangregorio et al. 

2010. MEMSWAVES 2010 and MEMS, Italy, 2010. p. 580 – 584.

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2009

High-Fidelity Printing Strategies for Printing 3D Vascular Hydrogel Structures

K. Pataky; M. Ackermann; T. Braschler; M. Lutolf; P. Renaud et al. 

2009. 25th International Conference on Digital Printing Technologies, Louisville, KY, Sep 20-24, 2009. p. 411 – 414.

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Structured ZnO-based contacts deposited by non-reactive rf magnetron sputtering on ultra-thin SiO2/Si through a stencil mask

A. Bernabé; M. Lalanne; L. Presmanes; J. Soon; P. Tailhades et al. 

2009. 2nd International Symposium on Transparent Conductive Oxides, Hersonissos, Crete, Greece, October 22 – 26 2008. p. 1044 – 1047. DOI : 10.1016/j.tsf.2009.03.232.

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Direct Fabrication of Polymer Micro lens Arrays having Tunable Optical Properties using Drop-On-Demand Ink-Jet Printing Technology

J. Y. Kim; V. Fakhfouri; K. Pfeiffer; A. Voigt; M. Fink et al. 

2009. 25th International Conference on Digital Printing Technologies, Louisville, KY, Sep 20-24, 2009. p. 803 – 805.

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Minimized Blurring in Stencil Lithography using a Compliant Membrane

K. Sidler; G. Villanueva; O. Vazquez-Mena; J. Brugger 

2009. 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Denver, USA, 2009.. DOI : 10.1109/SENSOR.2009.5285768.

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Analysis and Applications of Nanostructures Created by Stencil Lithography

O. Vazquez-Mena; T. Sannomiya; M. Tosun; J. Voros; G. Villanueva et al. 

2009. 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Denver, USA, 2009. DOI : 10.1109/SENSOR.2009.5285463.

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NEMS/CMOS sensor for monitoring deposition rates in stencil lithography

M. Sansa; J. Arcamone; J. Verd; A. Uranga; G. Abadal et al. 

2009. Eurosensor XXIII conference, Lausanne, Switzerland, September 6-9, 2009. p. 425 – 428. DOI : 10.1016/j.proche.2009.07.106.

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Stencilled Conducting Bismuth Nanowires

V. Savu; S. Neuser; L. G. Villanueva; O. Vazquez-Mena; K. Sidler et al. 

2009. 53rd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Marco Island, FL, USA, May 26-29, 2009. DOI : 10.1116/1.3292630.

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Nanostencil and InkJet Printing for Bionanotechnology Applications

K. Pataky; O. Vazquez-Mena; J. Brugger 

2009. Nano-Net 2009, 4th International ICST Conference on Nano-Networks, Luzern, Switzerland, October 18-20, 2009..

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Mechanically tuneable microoptical structure based on PDMS

V. J. Cadarso; A. Llobera; G. Villanueva; J. A. Plaza; J. Brugger et al. 

2009. XXIII Eurosensors Conference, Lausanne, Switzerland, September 6-9, 2009.. p. 560 – 563. DOI : 10.1016/j.proche.2009.07.140.

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Double-Gate Pentacene TFTs with Improved Control in Subthreshold Region

N. V. Cvetkovic; D. Tsamados; K. Sidler; J. Bhandari; V. Savu et al. 

2009. 39th European Solid-State Device Research Conference (ESSDERC), Athens, Greece, September 14-18, 2009. p. 205 – 208. DOI : 10.1109/ESSDERC.2009.5331352.

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Organic Thin Film Transistors on Flexible Polyimide Substrates Fabricated by Full Wafer Stencil Lithography

K. Sidler; N. V. Cvetkovic; V. Savu; D. Tsamados; A. M. Ionescu et al. 

2009. XXIII Eurosensors Conference, Lausanne, Switzerland, September 6-9, 2009.. DOI : 10.1016/j.proche.2009.07.190.

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Direct Etching of High Aspect structures through a Stencil

G. Villanueva; O. Vazquez-Mena; C. Hibert; J. Brugger 

2009. MEMS 2009, Sorrento, Italy, January 25-29, 2009. DOI : 10.1109/MEMSYS.2009.4805339.

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A Low-Noise CMOS Receiver Frontend for NMR-based Surgical Guidance

J. Anders; S. Reymond; G. Boero; K. Scheffler 

2009. 13th International Conference on Biomedical Engineering (ICBME), Singapore, SINGAPORE, Dec 03-06, 2008. p. 89 – 93. DOI : 10.1007/978-3-540-92841-6_22.

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2008

Optical Transmission Properties of Corrugated Nanoscale Hole Arrays in Thin Gold Films

M. Klein; M. Guillaumée; L. A. Dunbar; R. Eckert; H. Heinzelmann et al. 

2008. 34th International Conference on Micro- and Nano Engineering 2008, Athens, Greece, Sept 15-18, 2008.

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Bismuth nanowires with stencil lithography

V. Savu; S. Neuser; J. Brugger 

2008. 34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008..

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Charging dynamics of localized 2D layers of Si nanocrystals embedded into SiO2 by stencil masked ultra low energy ion implantation process

C. Dumas; J. Grisolia; J. Carrey; A. Arbouet; V. Paillard et al. 

2008. European Materials Research Society (EMRS 2008): Symposium H: Materials and emerging technologies for non-volatile-memory devices, Strasbourg, France, June 26-30 2008..

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KFM detection of quantified charges injected into a thin SiO2 layer containing Si nps embedded by ultra low energy ion implantation using stencil lithography

C. Dumas; L. Ressier; J. Grisolia; A. Arbouet; V. Paillard et al. 

2008. European Materials Research Society (EMRS 2008): Symposium H: Materials and emerging technologies for non-volatile-memory devices, Strasbourg, France, June 26-30 2008..

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Dynamic Stencil Lithography on Full Wafer Scale

M. van den Boogaart; V. Savu; J. Brugger 

2008. 52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2008), Portland, Oregon, May 27–30, 2008.

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Magnetic Nanocrystals Modified Epoxy Photoresist for fabrication of NEMS and MEMS

C. Martin; C. Ingrosso; A. Llobera; F. Perez-Murano; C. Sangregorio et al. 

2008. 34th International Conference on Micro and Nano Engineering (MNE’2008), Athens, Greece, September 15-18, 2008.

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Ion Beam Etching: Replication of Micro Nano-structured 3D Stencil Masks

P. Weber; E. Guibert; S. Mikhailov; J. Brugger; G. Villanueva 

2008. 20th International Conference on the Application of Accelerators in Research and Industry (CAARI), Fort Worth, USA, 2008. p. 539 – 541. DOI : 10.1063/1.3120093.

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Sub-100 nm-scale Aluminum Nanowires by Stencil Lithography: Fabrication and Characterization

O. Vazquez-Mena; V. Savu; K. Sidler; G. Villanueva; M. A. F. van den Boogaart et al. 

2008. 3rd IEEE International Conference of Nano/Micro Engineered and Molecular Systems, Sanya, Hainan Island, China, January 6-9, 2008.. p. 807 – 811. DOI : 10.1109/NEMS.2008.4484447.

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Discontinuous Palladium Nanostructures for H2 Sensing

C. Fournier; T. Kiefer; L. G. Villanueva; F. Fargier; J. Brugger et al. 

2008. ECS Transactions, Hawaii, 2008. p. 457 – 463. DOI : 10.1149/1.2981151.

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Controlled synthesis of silicon nanocrystals into a thin SiO2 layer synthesized by stencil-masked ultra-low energy ion implantation

C. Dumas; J. Grisolia; G. BenAssayag; C. Bonafos; S. Schamm et al. 

2008. French Symposium on Emerging Technologies for Micro-nanofabrication, Toulouse, France, November 19-21, 2008.

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Inkjet printing of SU-8 for polymer-based MEMS a case study for microlenses

V. Fakhfouri; N. Cantale; G. Mermoud; J. Y. Kim; D. Boiko et al. 

2008. 21st IEEE International Conference on Micro Electro Mechanical Systems 2008, Tucson, Arizona, USA, Jan 13-17, 2008. p. 407 – 410. DOI : 10.1109/MEMSYS.2008.4443679.

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Development of novel SU-8 based nanoimprint lithography

S-Q. Xie; B-R. Lu; J. Wan; R. Yang; Y. Chen et al. 

2008. The 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT), Beijing, China, October 20-23, 2008.

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Novel methods to pattern polymers for microfluidics

C. Martin; A. Llobera; T. Leïchlé; G. Villanueva; A. Voigt et al. 

2008. 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007. p. 972 – 975. DOI : 10.1016/j.mee.2008.01.052.

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Drop-on-demand Ink-jet printing of functional materials: Case studies of SU-8 and NCs-embedded Polymer nanocomposites

J. Y. KIM; V. Fakhfouri; C. Ingrosso; M. Striccoli; M. L. Curri et al. 

2008. International Conference on Digital Fabrication Technologies, Pittsburgh, Pennsylvania, USA, September 7-12, 2008..

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Silicon nanoparticles synthesized in SiO2 pockets by stencil-masked low energy ion implantation and thermal annealing

J. Grisolia; C. Dumas; G. Ben Assayag; C. Bonafos; S. Schamm et al. 

2008. Meeting of the European-Materials-Research-Society, Strasbourg, FRANCE, May 28-Jun 01, 2007. p. 395 – 401. DOI : 10.1016/j.spmi.2007.12.013.

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Stress and aging minimization in photoplastic AFM probes

C. Martin; A. Llobera; G. Villanueva; A. Voigt; G. Gruetzner et al. 

2008. 34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008. DOI : 10.1016/j.mee.2008.12.033.

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Resistivity Measurements of Gold Wires Fabricated by Stencil Lithography on Flexible Polymer Substrates

K. Sidler; O. Vazquez Mena; V. Savu; G. Villanueva; M. A. F. van den Boogaart et al. 

2008. 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007. p. 1108 – 1111. DOI : 10.1016/j.mee.2007.12.069.

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Pentacene – SiO2 interface: Role of the environment prior to pentacene deposition and its impact on TFT DC characteristics

N. V. Cvetkovic; D. Tsamados; K. Sidler; J. Brugger; A. M. Ionescu 

2008. 26th International Conference on Microelectronics (MIEL 2008), Nis, Serbia, May 11-14, 2008. DOI : 10.1109/ICMEL.2008.4559282.

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Quick and Clean: Stencil Lithography for Wafer-Scale Fabrication of Superconducting Tunnel Junctions

V. Savu; J. Brugger; J. Kivioja; J. Ahopelto 

2008. Applied Superconductivity Conference 2008 (ASC 2008), Chicago, Illinois USA, August 17-22 2008. DOI : 10.1109/TASC.2009.2019075.

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Etching of sub-micrometer structures through Stencil

G. Villanueva; O. Vazquez-Mena; M. A. F. van den Boogaart; K. Sidler; V. Savu et al. 

2008. 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), 23-26 Sept, 2007, Copenhagen, Denmark, Copenhagen, Denmark, 23-26 Sept, 2007. p. 1010 – 1014. DOI : 10.1016/j.mee.2007.12.068.

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2007

Fabrication of planar chiral photonic meta-materials on SU- 8 using nanoimprint lithography technique

B-R. Lu; S-Q. Xie; Y. Sun; Y. Chen; X-P. Qu et al. 

2007. International Conference on Nanoscience & Technology (Chinanano), Beijing, China, June 4-6, 2007.

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Integrated Nickel Micro-Nano-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy

S. Mouaziz; C. Imboden; C. Santschi; O. Vazquez Mena; R. Popovic et al. 

2007. 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, June 10-14, 2007. p. 2589 – 2592. DOI : 10.1109/SENSOR.2007.4300701.

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Highly Sensitive Cantilevers, with and without Magnetic Tip, for Magnetic Resonance Force Microscopy

S. Mouaziz; A. Dysli; J. Brugger; G. Boero 

2007. 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, June 10-14 , 2007. p. 1537 – 1540. DOI : 10.1109/SENSOR.2007.4300438.

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Towards Reliable 100-Nanometer Scale Stencil Lithography on Full Wafer: Progress AND Challenges

O. Vazquez Mena; M. van den Boogaart; J. Brugger 

2007. 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, 10-14 June, 2007. p. 195 – 198. DOI : 10.1109/SENSOR.2007.4300104.

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Focused electron beam induced deposition of nickel

A. Perentes; G. Sinicco; G. Boero; B. Dwir; P. Hoffmann 

2007. 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, Denver, CO, May 29-Jun 01, 2007. p. 2228 – 2232. DOI : 10.1116/1.2794071.

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2006

Surface Micromachining of Polyureasilazane Based Ceramic-MEMS using SU-8 Micromolds

V. Fakhfouri; S. Jiguet; J. Brugger 

2006. CIMTEC 2006 (11th International Conferences on Modern Materials and Technologies), Sicily, Italy, 4-9 June, 2006. p. 1293 – 1298.

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Full wafer integration of NEMS on CMOS by nanostencil lithography

J. Arcamone; M. van den Boogaart; F. Serra-Graells; S. Hansen; J. Brugger et al. 

2006. 2006 IEEE international Electron Devices, Electron Devices Meeting, Electron Devices Meeting, 2006. IEDM ’06. International, December 11-13, San Francisco, U.S.A., December 11-13, 2006. p. 1 – 4. DOI : 10.1109/IEDM.2006.346830.

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2003

Micro- and nano-patterning using local deposition through miniaturized shadow mask

G. M. Kim; J. Brugger 

2003. 5th Korean MEMS Conference, Jeju, Korea, 15-17 May, 2003.

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Exploring microstencils for sub-micron patternig using Pulsed Laser Deposition

F. Vroegindeweij; J. Steen; J. Brugger; D. H. A. Blank 

2003. 7th International Conference on Laser Ablation, Hersonissos, Crete, Greece, 5-10 Oct, 2003.

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Micromechanical testing of SU-8 cantilevers

M. Hopcroft; T. Kramer; G. M. Kim; K. Takashima; Y. Higo et al. 

2003. International Conference on Advanced Technology in Experimental Mechanics 2003 (ATEM’03), Nagoya, Japan, 10-12 Sep, 2003.

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90 MHz nanomechanical structures fabricated by stencil deposition and dry etching

G. M. Kim; M. A. F. van den Boogaart; S. Kawai; H. Kawakatsu; J. Brugger 

2003. 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’03), Boston, USA, 8-12 June, 2003. p. 883 – 886. DOI : 10.1109/SENSOR.2003.1215616.

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Fabrication of an active nanostencil with intergrated microshutters

R. W. Tjerkstra; P. Ekkels; G. Krijnen; S. Egger; E. Berenschot et al. 

2003. 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’2003), Boston, USA, 8-12 June, 2003. p. 1651 – 1654. DOI : 10.1109/SENSOR.2003.1217099.

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2002

Top down meets bottom up: Nano-engineering for link between nm- and μm-scale

G. M. Kim; B. J. Kim; J. Holleman; J. Huskens; E. ten Have et al. 

2002. 3rd Korea-Switzerland Joint Symposium in MEMS and Nano-technologies, Jeju, Korea, 19-20 June, 2002.

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2001

SAMs meet MEMS – surface modification with self-assembled monolayers for the dry-demolding of photoplastic MEMS/NEMS

B. J. Kim; G. M. Kim; M. Liebau; J. Huskens; D. N. Reinhoudt et al. 

2001. IEEE International Workshop on MEMS 2001, Interlaken, Switzerland, 21-25 Jan, 2001. p. 106 – 109. DOI : 10.1109/MEMSYS.2001.906490.

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Photoplastic shadow-masks for rapid resistless multi-layer micropatterning

G. M. Kim; B. J. Kim; J. Brugger 

2001. 11th International Conference on Solid-State Sensors and Actuators (Transducers ’01) and Eurosensors XV, Munich, Germany, 10-14 June, 2001. p. 1632 – 1635. DOI : 10.1007/978-3-642-59497-7_379.

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