Accuplate, hotplate for SU-8 PEB and hardbake

( Left ) Accuplate ramped hotplate (controller under the table)

To be read first:

  • The Accuplate is not equipped with an exhaust. Due to this it should never be used for polymer (SU-8, photoresists,…) softbake, to avoid evaporation of solvents into the zone.
  • Used with aluminum protection foil only. Users should ask the staff to change it if unexpected contamination or damage are visible.
  • Please immediately inform the CMi staff in case of problems with the equipment.


  1. Reservation names must correspond to operators.


  1. Introduction
  2. Equipement description
  3. Users manuals
  4. Links
  5. Pictures gallery

I. Introduction

Accuplate is a large-area (up to nine 4″ wafers) hotplate controlled by a Präzitherm PR 5 SR unit. It operates with two distinct modes: 1) fixed temperature or 2) programmed multi-step temperature profile.

It is mainly used, as a backup to the Sawatec HP 401-Z, for SU-8 PEB and hardbake steps.

Other types of thermal processes should be discussed with the equipment responsibles.

II. Equipment description

Technical characteristics:

  • Large-area hotplate combined with PR 5 SR controller
  • Nine 4″ wafers maximum
  • Maximum temperature 350 °C, precision +/- 0.5 °C
  • Hotplate surface > 300 mm x 300 mm
  • Programmable temperature ramps with up to 5 steps


The documentation for the SU-8 process is found here:

III. User manuals

IV. Links

V. Pictures gallery