2023
A 3D-Printed Functional Mems Accelerometer
2023 Ieee 36Th International Conference On Micro Electro Mechanical Systems, Mems
2023-01-01
36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Munich, GERMANY, Jan 15-19, 2023.p. 594-597
DOI : 10.1109/MEMS49605.2023.10052385
2022
Optical Properties of Aluminium Nitride on Insulator for Integrated Photonics
2022 European Conference On Optical Communication (Ecoc)
2022-01-01
European Conference on Optical Communication (ECOC), ELECTR NETWORK, Sep 18-22, 2022.Optimization of Edge Profile for Improved Anti-Resonance Quality Factor in Lithium Niobate SH0 Resonators
2022 Ieee International Ultrasonics Symposium (Ieee Ius)
2022-01-01
IEEE International Ultrasonics Symposium (IUS), Venice, ITALY, Oct 10-13, 2022.DOI : 10.1109/IUS54386.2022.9957511
2021
Fully Reconfigurable Coupled-Resonator Optical Waveguides (CROWs) with 10 nW Static Power MEMS
2021 Conference On Lasers And Electro-Optics (Cleo)
2021-01-01
Conference on Lasers and Electro-Optics (CLEO), ELECTR NETWORK, May 09-14, 2021.DOI : 10.1364/CLEO_SI.2021.STh1Q.5
16-Core Recirculating Programmable Si Photonic MEMS
2021 Conference On Lasers And Electro-Optics (Cleo)
2021-01-01
Conference on Lasers and Electro-Optics (CLEO), ELECTR NETWORK, May 09-14, 2021.DOI : 10.1364/CLEO_SI.2021.STh1Q.6
Resonance Frequency Dependence Of A1 Lamb Mode On The Pitch Of The Electrode Structure
2021 Joint Conference Of The European Frequency And Time Forum And Ieee International Frequency Control Symposium (Ieee Eftf-Ifcs 2021)
2021-01-01
Joint Conference of the European-Frequency-and-Time-Forum / IEEE International Frequency Control Symposium (EFTF/IFCS), ELECTR NETWORK, Jul 07-17, 2021.DOI : 10.1109/EFTF/IFCS52194.2021.9604331
Study on the Performances of AlScN based SAW/BAW Hybrid Resonators A Parametric Analysis of Acoustic Wave Resonators with Large Figure of Merit
2021 Joint Conference Of The European Frequency And Time Forum And Ieee International Frequency Control Symposium (Ieee Eftf-Ifcs 2021)
2021-01-01
Joint Conference of the European-Frequency-and-Time-Forum / IEEE International Frequency Control Symposium (EFTF/IFCS), ELECTR NETWORK, Jul 07-17, 2021.DOI : 10.1109/EFTF/IFCS52194.2021.9604342
Towards a N77 Electroacoustic Filter Using Thin Films of Crystalline Y-cut Lithium Niobate
2021 Ieee Mtt-S International Microwave Filter Workshop (Imfw)
2021-01-01
IEEE MTT-S International Microwave Filter Workshop (IMFW), Perugia, ITALY, Nov 17-19, 2021.p. 112-114
DOI : 10.1109/IMFW49589.2021.9642292
Proof Of Concept Of A Graphene-Based Resonant Accelerometer
2021 34Th Ieee International Conference On Micro Electro Mechanical Systems (Mems 2021)
2021-01-01
34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ELECTR NETWORK, Jan 25-29, 2021.p. 838-840
DOI : 10.1109/MEMS51782.2021.9375187
FABRICATION AND ANALYSIS OF THIN FILM LITHUM NIOBATE RESONATORS FOR 5GHz FREQUENCY AND LARGE k(t)(2) APPLICATIONS
2021 34Th Ieee International Conference On Micro Electro Mechanical Systems (Mems 2021)
2021-01-01
34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ELECTR NETWORK, Jan 25-29, 2021.p. 967-969
DOI : 10.1109/MEMS51782.2021.9375401
Thin Film Devices For 5G Communications
2021 34Th Ieee International Conference On Micro Electro Mechanical Systems (Mems 2021)
2021-01-01
34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ELECTR NETWORK, Jan 25-29, 2021.p. 450-453
DOI : 10.1109/MEMS51782.2021.9375400
2020
Comb Transducer for Generation of SH0 Mode in Crystalline Piezoelectric Membrane
Proceedings Of The 2020 Ieee International Ultrasonics Symposium (Ius)
2020-01-01
IEEE International Ultrasonics Symposium (IEEE IUS), Las Vegas, NV, Sep 07-11, 2020.DOI : 10.1109/IUS46767.2020.9251395
Attenuation of Lamb Modes and SH Waves near cut-off Frequencies
2020 Joint Conference Of The Ieee International Frequency Control Symposium And International Symposium On Applications Of Ferroelectrics (Ifcs-Isaf)
2020-01-01
Joint Conference of the IEEE International Frequency Control Symposium (IEEE IFCS) and IEEE International Symposium on Applications of Ferroelectrics (IEEE IFAS), ELECTR NETWORK, Jul 19-23, 2020.DOI : 10.1109/IFCS-ISAF41089.2020.9234848
2019
Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters
2019 20Th International Conference On Solid-State Sensors, Actuators And Microsystems & Eurosensors Xxxiii (Transducers & Eurosensors Xxxiii)
2019-01-01
20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS), Berlin, GERMANY, Jun 23-27, 2019.p. 1752-1755
DOI : 10.1109/TRANSDUCERS.2019.8808179
Acoustic Actuation Of Suspended Graphene For Linear Excitation Of 2D Nems
2019 20Th International Conference On Solid-State Sensors, Actuators And Microsystems & Eurosensors Xxxiii (Transducers & Eurosensors Xxxiii)
2019-01-01
20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS), Berlin, GERMANY, Jun 23-27, 2019.p. 2380-2383
DOI : 10.1109/TRANSDUCERS.2019.8808246
Phase Noise Measurements Of Aluminum Scandium Nitride Oscillators
2019 20Th International Conference On Solid-State Sensors, Actuators And Microsystems & Eurosensors Xxxiii (Transducers & Eurosensors Xxxiii)
2019-01-01
20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS), Berlin, GERMANY, Jun 23-27, 2019.p. 909-912
DOI : 10.1109/TRANSDUCERS.2019.8808738
Analysis of XBAR resonance and higher order spurious modes
2019 Ieee International Ultrasonics Symposium (Ius)
2019-01-01
IEEE International Ultrasonics Symposium (IUS), Glasgow, ENGLAND, Oct 06-09, 2019.p. 185-188
DOI : 10.1109/ULTSYM.2019.8925993
Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters
2019 Ieee Mtt-S International Microwave Symposium (Ims)
2019-01-01
IEEE-MTT-S International Microwave Symposium (IMS), Boston, MA, Jun 02-07, 2019.p. 512-515
DOI : 10.1109/MWSYM.2019.8700876
Temperature fluctuations in M/NEMS
2nd Frontiers in Nanoelectromechanical Systems (FNS), Palm Springs, February 2019.
2018
Piezoelectric Suspended Microchannel Resonators (SMRs)
15th International Workshop on Nanomechanical Cantilever Sensors (NMC), Seoul, June 2018.
Molybdenum Disulfide (MoS2) Nanoelectromechanical Resonators With On-Chip Aluminum Nitride (AlN) Piezoelectric Excitation
The 31st IEEE International Conference on Micro Electro Mechanical Systems, Belfast, Ireland, 21-25 January, 2018.
2017
Fabrication of 2D Material Based NEMS Resonators
Nonlinearities and Frequency Stability in NEMS
14th International Workshop on NanoMechanical Sensors, Kona, Hawaii, April 2017.
Nonlinearities in NEMS
2017 IEEE International Ultrasonics Symposium (IUS), Washington DC, September 2017.
Frequency stability of PZE actuated suspended micro-channel resonators
Frequency stability of PZE actuated suspended micro-channel resonators
NanoFluidics and NanoMechanics Workshop, Turin, September 14-15, 2017.
Piezoelectric Nanoelectromechanical Systems
2017-07-27
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, Taiwan, June 18-22, 2017.DOI : 10.1109/TRANSDUCERS.2017.7994010
FEM modeling of energy dissipation in SMRs
Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 – 15 September, 2017.
Experimental setup and o-ring based μfluidic interface for suspended microchannel resonators
Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 – 15 September, 2017.
Energy dissipation in Suspended Microchannel Resonators as function of channel off-axis placement
Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 – 15 September, 2017.
Dielectric Transduction of NEMS
2017 NAMIS International Workshop, Freiburg, September 2017.
Graphene Based Membrane Resonators
Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 – 15 September, 2017.
Assembly of Silicon Nitride Channels
Micro and Nano Engineering (MNE) 2017, Braga, Portugal, 18 – 22 September, 2018.
Release area confinement in Contour Mode Resonators
2017 IEEE International Ultrasonics Symposium (IUS)
2017
IEEE International Ultrasonics Symposium (IUS), Washington, DC, SEP 06-09, 2017.DOI : 10.1109/ULTSYM.2017.8092127
2016
3D FEM dissipation model of suspended micro channel resonators
5th Micro and Nano Flows Conference (MNF 2016), Milan, Italy, September 11-14, 2016.
Parylene-Based Hollow Nanomechanical Resonators For Bioapplications
42nd Micro and Nano Engineering Conference, Vienna, Austria, September 19-23, 2016.
50 nm thick AlN Films for Actuation and Detection of Nanoscale Resonators
42nd Micro and Nano Engineering Conference, Vienna, Austria, September 19-23, 2016.
Graphene Based Mechanical Resonators Fabricated via Direct Dry Transfer
42nd Micro and Nano Engineering Conference, Vienna, Austria, September 19-23, 2016.
Anchor Losses Dependence on Electrode Material in Contour Mode Resonators
2016 IEEE International Frequency Control Symposium (IFCS)
2016
2016 IEEE International Frequency Control Symposium, New Orleans, Luisiana, USA, May 9-12, 2016.p. 100-103
DOI : 10.1109/FCS.2016.7546736
2015
Fabrication of suspended micro-resonator integrated with PZE electrodes
NanoBioTech-Montreux, Montreux, Switzerland, November 16-18, 2015.
NEMS Oscillators – Future Challenges and Workarounds
15th IEEE Conference on Nanotechnology (IEEENano), Rome, July 2015.
Fabrication of suspended hollow micro-resonators integrated with PZE electrodes
18th Conference in NanoBioTech, Montreux, November 2015.
2014
Laser Detection Back-Action in Cantilevers
40th International Conference on Micro- and Nano- Engineering (MNE), 2014, Lausanne, September, 2014.
Position Dependent Optical Back-Action in Cantilever Resonators
11th International Workshop on Nanomechanical Cantilever Sensors (NMC), Madrid, May 2014.
Metal-Insulator Interface Losses in Multimaterial Resonators
11th International Workshop on Nanomechanical Cantilever Sensors (NMC), Madrid, May 2014.
Optical detection of radio waves through a nanomechanical transducer
Frontiers in Optics Laser Science (FiO/LS 2014), 2014, Tucson, 2014.
Interface Losses In Multimaterial Resonators
2014 Ieee 27Th International Conference On Micro Electro Mechanical Systems (Mems)
2014
27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, CA, USA, 26-30 Jan. 2014.p. 632-635
DOI : 10.1109/MEMSYS.2014.6765720
2013
Pyrolysed carbon resonators – Fabrication and characterization
39th International Conference on Micro- and Nano- Engineering (MNE), 2013, London, September, 2013.
Resonant Photothermal Spectroscopy Of Nanoparticulate Matter
10th International Workshop on Nanomechanical Cantilever Sensors (NMC), Stanford, 2013.
Optical Detection of Radio-Frequency Signals via a Strongly Coupled Nano-Electromechanical System
CLEO, San Diego, USA, 2013.
Optical Readout of Coupling Between a Nanomembrane and an LC Circuit at Room Temperature
2013 Conference on Lasers & Electro-Optics Europe & International Quantum Electronics Conference CLEO EUROPE/IQEC
2013
CLEO Europe – IQEC, Munich, Germany, 2013.DOI : 10.1109/CLEOE-IQEC.2013.6801215
2012
Novel Oscillator Topologies
NEMS Workshop, Barcelona, Spain, 2012.
A novel high-throughput on-wafer electromechanical sensitivity characterization system for piezoresistive cantilevers
26th IEEE International Conference on Microelectronic Test Structures (ICMTS)
2012
26th IEEE International Conference on Microelectronic Test Structures (ICMTS), San Diego, USA, 2012.p. 55-60
DOI : 10.1109/ICMTS.2012.6190613
2011
Nonlinear dynamics in NEMS
2nd international workshop in NEMS, Toulouse, France, 2011.
Self sensing cantilevers for the measurement of (biomolecular) forces
8th Spanish Conference on Electron Devices (CDE)
2011
8th Spanish Conference on Electron Devices (CDE), Palma de Mallorca, Spain, 2011.p. 1-4
DOI : 10.1109/SCED.2011.5744171
Control of Nonlinearity in a Doubly-Clamped Nanomechanical Beams
IEEE International Frequency Control Symposium (IFCS), San Francisco, USA, 2011.
Opto-thermal actuation in double layer polymer microcantilevers
Nano-Opto-Mechanical Systems (Noms)
2011
Nano-Opto-Mechanical Systems (NOMS), San Diego, USA, 2011.DOI : 10.1117/12.897353
Ultra-low power palladium-coated MEMS resonators for hydrogen detection under ambient conditions
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
2011
16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Beijing, China, 5-9 June, 2011.p. 787-790
DOI : 10.1109/TRANSDUCERS.2011.5969266
2010
Piezoelectric Nanomechanical Devices
IEEE International Frequency Control Symposium (IFCS), Newport Beach, USA, 2010.
Pd-functionalized MEMS resonator for hydrogen gas sensing
Nano-Tera Annual Plenary Meeting, Bern, Switzerland, April 29, 2010.
Fabrication of Metallic Nanodots by Stencil Lithography for Localized Surface Plasmon Resonance Biosensing
Functionalized Plasmonic Nanostructures for Biosensing, Ascona, Switzerland, April 18-23, 2010.
Pd-functionalized MEMS resonator for hydrogen gas sensing at ambient pressure
7th International Workshop on Nanomechanical Cantilever Sensors, Banff, Canada., May 26-28, 2010.
Flexible Membranes Improve Resolution in Stencil Lithography
The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication, Anchorage, Alaska, U.S.A., June 1- 4, 2010.
Metallic Nanodot Arrays Fabricated by Stencil Lithography on SiO2 and Polymer Substrates
The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication, Anchorage, Alaska, U.S.A., June 1-4, 2010.
Very Large Scale Arrays of Chemo-Mechanical Nano-Switches for Ultralow Power Hydrogen Sensing
23rd International IEEE Conference on Micro Electro Mechanical Systems MEMS’2010
2010
23rd International IEEE Conference on Micro Electro Mechanical Systems MEMS’2010, Hong Kong, 24-28 January, 2010.DOI : 10.1109/MEMSYS.2010.5442547
2009
All through stencil MOSFET fabrication
Fall meeting of the American Vacuum Society (AVS), San Jose, CA, USA, 2009.
Silicon microcantilevers with MOSFET detection
Trends in Nanotechnology (TNT), Oviedo, Spain, September 07-11, 2009.
Silicon microcantilevers with MOSFET detection
Microelectronic Engineering
2009
35th International Conference on Micro- and Nano- Engineering (MNE), Gent, Belgium, 2009.p. 1245-1247
DOI : 10.1016/j.mee.2009.11.125
Silicon microcantilevers with piezoresistive and MOSFET detection
7th Spanish Conference on Electron Devices (CDE)
2009
7th Spanish Conference on Electron Devices (CDE), Santiago de Compostela, Spain, 2009.p. 428-31
DOI : 10.1109/SCED.2009.4800525
Mechanically tuneable microoptical structure based on PDMS
Proceedings of the Eurosensors XXIII conference
2009
XXIII Eurosensors Conference, Lausanne, Switzerland, September 6-9, 2009..p. 560-563
DOI : 10.1016/j.proche.2009.07.140
Stencilled Conducting Bismuth Nanowires
Proceedings of the 53rd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication
2009
53rd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Marco Island, FL, USA, May 26-29, 2009.DOI : 10.1116/1.3292630
Direct Etching of High Aspect structures through a Stencil
Proceedings of the 22nd IEEE International Conference on Micro Electro Mechanical Systems 2009
2009
MEMS 2009, Sorrento, Italy, January 25-29, 2009.DOI : 10.1109/MEMSYS.2009.4805339
Analysis and Applications of Nanostructures Created by Stencil Lithography
15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
2009
15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Denver, USA, 2009.DOI : 10.1109/SENSOR.2009.5285463
Minimized Blurring in Stencil Lithography using a Compliant Membrane
15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
2009
15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Denver, USA, 2009..DOI : 10.1109/SENSOR.2009.5285768
Analysis and Applications of Nanostructures Created by Stencil Lithography
The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25, 2009.
Minimized Blurring in Stencil Lithography using a Compliant Membrane
The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25 2009.
2008
Ion Beam Etching: Replication of Micro Nano-structured 3D Stencil Masks
20th International Conference on the Application of Accelerators in Research and Industry (CAARI)
2008
20th International Conference on the Application of Accelerators in Research and Industry (CAARI), Fort Worth, USA, 2008.p. 539-541
DOI : 10.1063/1.3120093
Stencil Lithography: Quick and Clean
Smart Systems Integration (SSI), Barcelona, Spain, 2008.
Quad beam polymeric optomechanical systems
International Symposium on Optomechatronic Technologies
2008
International Symposium on Optomechatronic Technologies, San Diego, USA, 2008.p. 72660T (12 pp.)
DOI : 10.1117/12.807287
Research activities at LMIS1-EPFL
5th NAMIS International workshop, Freiburg, Germany, April 4th-5th, 2008.
Hydrogen Sensors based on Nanoscaled Discontinuities in Palladium
NAMIS International autumn school, Tokyo, Japan, September 2008.
Discontinuous Palladium Nanostructures for H2 Sensing
ECS Transactions
2008
ECS Transactions, Hawaii, 2008.p. 457-463
DOI : 10.1149/1.2981151
Stress and aging minimization in photoplastic AFM probes
34th International Conference on Micro and Nano Engineering 2008 (MNE 2008)
2008
34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.DOI : 10.1016/j.mee.2008.12.033
Discontinuous Palladium Nanostructures for H2 Sensing
Pacific Rim Meeting on Electrochemical and Solid-State Science (PRIME2008), Honolulu, Hawaii, October 12-17 2008.
Direct fabrication of NIL stamps using Stencil Lithography
Eurosensors XXII, Dresden, Germany, September 7-10, 2008.
Resistless ion implantation of sub-micron scale features through nano-stencil
34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.
Design and optimization of nanogap array sensors
Eurosensors XXII, Dresden, Germany, September 7-10, 2008.
Stress and aging minimization in photoplastic AFM probes
34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.
Fabrication of Highly Ordered Vertical Nanogap Arrays and Networks on a Large Scale
34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.
Resistivity Measurements of Gold Wires Fabricated by Stencil Lithography on Flexible Polymer Substrates
Microelectronic Engineering
2008
33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.p. 1108-1111
DOI : 10.1016/j.mee.2007.12.069
Direct fabrication of NEMS by etching through Stencil
Micro Nano cantilever Sensors 2008 (MNCS 08), Mainz, Germany, May 19-21, 2008.
Sub-100 nm-scale Aluminum Nanowires by Stencil Lithography: Fabrication and Characterization
IEEE-NEMS 2008 Proceedings
2008
3rd IEEE International Conference of Nano/Micro Engineered and Molecular Systems, Sanya, Hainan Island, China, January 6-9, 2008..p. 807-811
DOI : 10.1109/NEMS.2008.4484447
Etching of sub-micrometer structures through Stencil
Microelectronic Engineering Journal
2008
33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), 23-26 Sept, 2007, Copenhagen, Denmark, Copenhagen, Denmark, 23-26 Sept, 2007.p. 1010-1014
DOI : 10.1016/j.mee.2007.12.068
Novel methods to pattern polymers for microfluidics
Microelectronic Engineering
2008
33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.p. 972-975
DOI : 10.1016/j.mee.2008.01.052
2007
Piezoresistive micro cantilevers for Biomolecular force detection
6th Spanish Conference on Electron Devices (CDE)
2007
6th Spanish Conference on Electron Devices (CDE), Sevilla, Spain, 2007.p. 212-215
DOI : 10.1109/SCED.2007.384029
DRIE based novel technique for AFM probes fabrication
Microelectronic Engineering
2007
32nd International Conference on Micro- and Nano- Engineering (MNE), Barcelona, Spain, 2006.p. 1132-1135
DOI : 10.1016/j.mee.2007.01.078
Novel cantilever design with high control of the mechanical performance
Microelectronic Engineering
2007
32nd International Conference on Micro- and Nano- Engineering (MNE), Barcelona, Spain, 2006.p. 1292-1295
DOI : 10.1016/j.mee.2007.01.111
Polymer microoptoelectromechanical systems: Variable optical attenuators and accelerometers
14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
2007
14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Lyon, France, 2007.p. U544-U545
DOI : 10.1109/SENSOR.2007.4300321
Piezoresistive cantilevers for biomolecular detection
4th International Workshop on Nanomechanical Sensors (NMC), Montreal, Canada, 2007.
Etching of sub-micrometer structures through Stencil
33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.
Focused Ion Beam Engineered Nanogap in a Palladium Microwire as a Mechanical Switch for Hydrogen Detection
33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.
Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching
33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.
2006
Piezoresistive cantilevers for intermolecular force detection
3rd International Workshop on Nanomechanical Sensors (NMC), Copenhagen, Denmark, 2006.
Transfer of small structures by bonding
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems
2006
International Workshop on Wafer Bonding for MEMS (WWB), Halle, 11-12 October 2004.p. 455-461
DOI : 10.1007/s00542-005-0041-7
Piezoresistive cantilevers in a commercial CMOS technology for intermolecular force detection
Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN)
2006
Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), Baltimore, USA, 2006.p. 1302-1305
Piezoresistive cantilevers in a commercial CMOS technology for intermolecular force detection
Microelectronic Engineering
2006
31st International Conference on Micro- and Nano- Engineering (MNE), Vienna, Austria, 2005.p. 1302-1305
DOI : 10.1016/j.mee.2006.01.223
Development of a diagnosis tool based on the measurement of molecular interactions using CMOS-integrated piezoresistive microcantilevers
3rd International Workshop on Nanomechanical Sensors (NMC)
2006
3rd International Workshop on Nanomechanical Sensors (NMC), Copenhagen, Denmark, 2006.p. 212-215
2005
Development of an artificial nose integrating NEMS and biological olfactory receptors
5th Spanish Conference on Electron Devices (CDE), Tarragona, 2005.
FIB and DRIE combination for nanotip fabrication
5th Spanish Conference on Electron Devices (CDE)
2005
5th Spanish Conference on Electron Devices (CDE), Tarragona, Spain, 2005.p. 443-446
DOI : 10.1109/SCED.2005.1504477
Polysilicon piezoresistive cantilevers for intermolecular force detection
5th Spanish Conference on Electron Devices (CDE)
2005
5th Spanish Conference on Electron Devices (CDE), Tarragona, Spain, 2005.p. 495-498
DOI : 10.1109/SCED.2005.1504494
Fabrication of AFM Probes: Tip, Cantilever and Chip micromachining by DRIE
19th European Conference on Sensors and Actuators (Eurosensors), Barcelona, Spain, 2005.
Artificial nose integrating biological olfactory receptors and NEMS
International Symposium on Olfaction and Electronic Nose (ISOEN)
2005
International Symposium on Olfaction and Electronic Nose (ISOEN), Barcelona, Spain, 2005.p. 529-532
Development of an artificial nose integrating NEMS and biological olfactory receptors
5th Spanish Conference on Electron Devices (CDE)
2005
5th Spanish Conference on Electron Devices (CDE), Tarragona, SPAIN, 2005.p. 529-532
DOI : 10.1109/SCED.2005.1504506
Focused ion beam production of nanoelectrode arrays
19th European Conference on Sensors and Actuators (Eurosensors), Barcelona, Spain, 2005.
Fabrication and characterization of Co-Ni magnetic cantilevers
5th Spanish Conference on Electron Devices (CDE)
2005
5th Spanish Conference on Electron Devices (CDE), Tarragona, Spain, 2005.p. 201-204
DOI : 10.1109/SCED.2005.1504357
2004
DRIE and FIB combination for nanotip fabrication
30th International Conference on Micro- and Nano- Engineering (MNE), Rotterdam, 2004.
Submicron piezoresistive cantilevers in a CMOS-compatible technology for intermolecular force detection
Microelectronic Engineering
2004
29th International Conference on Micro- and Nano- Engineering (MNE), Cambridge, UK, 22-25 September 2003.p. 480-486
DOI : 10.1016/j.mee.2004.03.021
CMOS-integrated, cantilever-based sensor devices: the Biofinger project
1st International Workshop on Nanomechanical Sensors (NMC)
2004
1st International Workshop on Nanomechanical Sensors (NMC), Madrid, 2004.p. 212-215
Nanosensors based on biological olfactory receptors
8th European Conference on Micro&Nanoscale Technologies for Biosciences (Nanotech), Montreux, 2004.
Fabrication of nanoelectrodes combining standard microfabrication processes and focused ion beam (FIB)
Trends in Nanotechnology (TNT), Segovia, 2004.
Immobilization of streptavidin on aminoterminated functionalised gold using microcontact printing to obtain biosensors
3rd International Conference on Nanoimprint and NanoTechnologies (NNT), Wien, 2004.
Co-Ni material for magnetic cantilevers
18th European Conference on Sensors and Actuators (Eurosensors), Rome, 2004.
2003
E-beam defined polysilicon piezoresistive cantilevers for intermolecular force detection
4th Spanish Conference on Electron Devices (CDE), Calella, 2003.