(MOVPE)
Metal-organic precursors are kept within stainless steel containers (the “bubblers”) at constant, regulated pressure and temperature. By flowing through the bubbler, the carrier gas picks up the precursor and transports it to the growth chamber via the gas mixing manifold.
Different groups of precursors are injected in the growth chamber through separate lines in order to minimize interactions between precursors and guarantee a high material purity.
The gas mixture builds a laminar flow in the growth chamber where the precursors are thermally decomposed and diffuse towards the growth surface. Metallic elements (such as Gallium and Arsenic) are incorporated layer by layer in the growing material.
Reaction products and unreacted precursors are carried away through the pumping system to the scrubbers before they can be safely released to the atmosphere.
