GaN MOVPE horizontal reactor

MO sources:

TMGa – Trimethylgallium (CH₃)₃Ga
TEGa – Triethylgallium (C₂H₅)₃Ga
TMAl – Trimethylaluminium (CH₃)₃Al
TMIn – Trimethylindium (CH₃)₃In

Dopant sources:

Cp₂Mg – Magnesocene C₁₀H₁₀Mg

Silane – Siliciumtetrahydride SiH₄

Carrier gases:

H2    N2

GaN

AlN

AlGaN

InGaN

AlInN

2”