EPiX Facilities
EPiX, as the EPFL Epitaxy Core Facility offer access and provide trainings to the following equipment:
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For III-nitride semiconductors: one Aixtron Aix 200 horizontal MOVPE reactor, one Aixtron closed coupled showerhead MOVPE reactor and one Riber MBE reactor
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For III-V (arsenides/phosphides) and GeSi semiconductors: Aixtron Aix200/4 dual chamber MOVPE reactor
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For ZnP alloys: one Veeco MBE reactor
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A High Resolution Brucker D80 Discovery X-ray Diffractometer
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C-V and Hall effect set-ups
