Definitions
- Wet etching
- Dry etching
- Terms and vocabulary
- Etch acronyms
Tips and Tricks
This section offers tips and advices to help for successful etching !
End-Pointing Capabilities
- Optical Emission Spectroscopy (OES)
- Laser interferometry/reflectometry
- Secondary Ions Mass Spectroscopy (SIMS)
Tool Selector
A guide for selecting the more adequate tool for a target material, with notions of compatibility with others, and as a first vision of the possibilities before requesting staff process flow approval !