Advanced Inspection and Metrology Solution
This advanced solution offers automated high-precision inspection and comprehensive data analysis, specifically designed to enhance micro- and nanofabrication processes.
Overview
InSPEC integrates powerful imaging and analysis capabilities, enabling precise characterization of patterns, structures, and critical dimensions. Ideal for both research and rigorous quality control and detailed inspection, InSPEC helps ensure accuracy, repeatability, and compliance with stringent fabrication standards.
Key Features:
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Automated Inspection: Efficiently automate measurement processes to save time and reduce operator errors : image registration and autofocus.
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High Accuracy and Precision: Achieve high resolution critical for cutting-edge applications.
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Comprehensive Data Analysis: Generate detailed reports and analytics to support process optimization and yield improvement. Organization of large data sets. Flow Edition and script capabilities for post-processing.
Applications at CMi
At CMi, the InSPEC system is particularly valuable for:
- Process calibration:
- Electron beam lithography process verification, dose test inspection
- DUV optical lithography: determine the optimal energy dose and focus for exposure
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Characterization of etched and deposited microstructures
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Quality control in nanofabrication and semiconductor processes
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R&D support in microfluidics, photonics, and MEMS development
Training and availability
The InSPEC system is now available for training through our CMi reservation platform. New users are invited to participate in dedicated training sessions organized regularly to ensure proper usage and maximize tool capabilities. This solution is available, after training, only to users who have previously been trained on the SEM Crossbeam, and therefore have completed the SEM Merlin training and gained sufficient experience to operate the equipment confidently.
Training on InSPEC is divided into two separate steps:
- Step 1: Introduction to the InSPEC solution (1 hour, BM1138)
This session includes a presentation of the tool, an overview of the available functionalities, and a demonstration of how to build an automated metrology workflow. By the end of this session, the user will understand the basics required to structure their job file, which will later be tested on the equipment in the cleanroom.
This first session lasts approximately one hour and takes place in room BM1138. The user must bring a *.gds file containing the unit cell of their design. - Step 2: Script implementation on the SEM Crossbeam (1.5 hour, zone 15)
Once the script has been finalized, the second step takes place directly in the cleanroom on the SEM Crossbeam, during a dedicated training slot. The user must bring a *.job file containing the full metrology script, as well as a sample matching the design used. Unless previously discussed, the sample should be conductive or metal-coated to facilitate proper measurements.
This session is scheduled as an extended 1.5 hour training slot on the SEM Crossbeam.
Quickstart guide
A Quickstart Guide will be soon available there