To be read first:
- Never touch the objective lenses.
- Do not attempt to clean the objectives.
- Keep the stage surroundings clear.
Contents:
1.Introduction
The Keyence VHX-X1 is a fully motorised digital microscope designed for high-resolution inspection of wafers. It combines automated focusing, multiple illumination modes, image stitching, measurement tools and advanced image enhancement in a single platform.
The system is suitable for routine inspection, process monitoring, defect analysis and documentation of fabricated devices.
2.Equipment description
- Magnification from 20× to 2500×
- Brightfield and darkfield illumination
- Fully motorised 100 mm XY stage
- Automatic focusing
- High-resolution image acquisition
- Image stitching for large samples
- Extended depth-of-field imaging
- 2D measurements (distance, angle, area)
- 3D surface reconstruction
- Image comparison and documentation