Electron backscattered diffraction (EBSD)
Crystallographic analysis technique using SEM. Some of the electrons from the beam impinging on the sample are scattered by atomic planes in such a way as to satisfy the Bragg condition. The Bragg-reflected electrons can be detected on a phosphor screen placed at a high angle relative to the sample surface, on which they form patterns of Kikuchi lines similar to those observed by CBED in the TEM. These Kikuchi line patterns are indicative of crystal structure, orientation and unit cell size. Therefore, with the use of appropriate software, EBSD can be used to determine crystal phases and orientations. With point-by-point acquisition across the sample surface, EBSD maps can be made, allowing, for instance, determination of grain sizes, textures, and orientation relationships. In general, a very flat/polished surface is required for successful analysis.