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High-speed turboexpander for ORC-based waste heat recovery
Vortex breakdown as an aerodynamic control
Waste heat to produce electricity in cars
Performance evaluation of acoustic absorbers in cars
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Intelligent digital twins for assessing and predicting bridge road traffic demands
4D urban model of the city of Sion
Roadmap for the implementation of BIM in the State of Geneva
Exoskeleton for road construction assistance
Strengthening of a railway bridge
Sociology
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Mobility surveys exploration
Social networks and spatial mobility biographies
Analysis of mode choice among cross-border population
Autonomous car: what future for mobility?
An application to like public transport in real-time
How to make building sites acceptable?
Toward an innovative mobility for teenagers in Europe
Are the inhabitants of Sion ready to make their mobility habits evolve?
Urban environments, lifestyles and leisure mobility
Long-distance «reversible» mobilities in Europe
Lifestyles, modal choices and mobility behaviors in Strasbourg
Nyon Paléo Festival without car
Analysis of household travel survey 2010 for Lausanne and Geneva
Access to the Nyon Paléo Festival
Creative state of the art on mobility
Modal choice in swiss agglomerations
Potentials for modal shift toward public transport in greater Nice
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Real-time pollution monitoring
Interoperability platform between Building Information Modeling and Building Energy Modeling
An analysis tool for the Geneva airport energy system
Comparison of storage solutions in car batteries
Improving the performance of hydraulic fracturing of unconventional reservoirs
Energy harvesting from fluid flow for autonomous actuators
Crowdsourcing high-resolution air quality sensing
Underwater robotics and water quality
Feasibility study for the project “Ocean trash program”
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Facility location integrated with vehicle routing based on demand
Modular logistics units in share co-modal networks
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Physical internet: simulation
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Team sports analysis via image-based tracking
Assistive control strategies with lower limb exoskeletons
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Swisscom Digital Lab 3D digital mock-up
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Qiagen QiaCube automated DNA/RNA extraction
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Workshop, Nov 24, 2021
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MSE-636 | Scanning Electron Microscopy Techniques
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DUV (λ = 248nm) inline track & stepper
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ASML PAS 5500/350C
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ASML 4x reticle template
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TEL Clean Track ACT-8
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Süss ACS200 GEN3
EVG 150 – AUTOMATIC RESIST PROCESSING CLUSTER
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Hamatech HMR900
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ATMsse OPTIspin SB20
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ATMsse OPTIspin SB20 Manual
Sawatec LSM-250 & HP-200
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Sawatec LSM-250 & HP-200 Manual
Sawatec LSM-200 & HP-401-Z
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Sawatec LSM-200 & HP-401-Z Manual
Sawatec LSM-250 for MISC polymers
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Sawatec LSM-250 MISC Manual
Exposure tools: laser writers
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Heidelberg Instruments VPG200
Heidelberg Instruments MLA150
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MLA150 Manual
HIMT “convert” Manual (MLA150)
Nanoscribe Photonic Professional GT+
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Nanoscribe PPGT+ Manual
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Describe Manual
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Süss MA6Gen3
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MA6 Gen3 Manual
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MJB4 Manual
Photolithography wet benches
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Plade Solvent Z01
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Plade Solvent, Lift-off Manual
Coillard Solvent Z06
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Arias Solvent Z13
Arias Base Z13
Arias “Lift-off” Z12
Additional hot plates / ovens
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YES III, HMDS primer oven
Accuplate, hotplate for SU-8 PEB and hardbake
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Accuplate Manual
Dataplate, hotplate for SU-8 softbake, PEB or hardbake
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Dataplate Manual
Heraeus T6060, multipurpose oven
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Ion Beam Etching
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Veeco Nexus IBE350
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STS Multiplex ICP
Alcatel AMS 200 SE
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SPTS uEtch
SPTS Xactix X4 – XeF2 Silicon etching system
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STEAG MECAPOL 460 – CMP (CHEMICAL MECHANICAL POLISHING)
Alpsitec E460 F – CMP (Chemical Mechanical Polishing)
Post CMP Cleaning System GnP Cleaner 428
DAG810 – AUTOMATIC SURFACE GRINDER
Wet Etching
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UFT Piranha
UFT Resist
Plade Oxide
Plade Metal
Plade Six Sigma KOH
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Protek Protective Stop Layer
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Arias Acid
Thin films
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LPCVD / Dry or wet oxidation / Alloying / Doping / Diffusion / Densification / Annealing / ALD
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Centrotherm furnaces
Plade RCA
ATOMIC LAYER DEPOSITION BENEQ TFS200 (ALD 1)
ATOMIC LAYER DEPOSITION BENEQ TFS200 (ALD 2)
RTP JETFIRST 200
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Alliance-Concept EVA 760
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Leybold Optics LAB 600H
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Vacotec
Vacotec VACO 250
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Pfeiffer SPIDER 600
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Alliance-Concept DP 650
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Pulsed Laser Deposition
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Solmates SMP 800
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Available PVD targets in CMi
Electroplating / Parylene coating
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Desaules, wet bench for electroplating
Silicet Electroplating unit, Cu
Comelec C-30-S
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AFM
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Bruker FastScan AFM
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FEI Nova 600 NanoLab
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Tencor Alpha-Step 500
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Krüss DSA-30E
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Krüss DSA-30E Manual
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Krüss Surface Free Energy Models
Sopra GES 5E
Woollam RC2
Bruker Contour X
Nanospec AFT-6100
FilMetrics F20-UV
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Toho Technology FLX 2320-S
Bruker VERTEX70 FT-IR
Electrical measurement
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Filmetrics R50 – 200 – 4PP
MPI TS150 Prober Station
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Süss PM8 Manual
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Microscopes at CMi
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Leica DM8000
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Mitutoyo, inspection microscope
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Bonding
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Süss SB6
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OPTEC LSV3
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Disco DAD321
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PDMS line
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Ebeam Lithography
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L-Edit installation
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AZ 1512 HS
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AZ 40XT
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LOR 5A / AZ 1512 HS
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LOR 5A Datasheet
AZ NLOF 2020
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AZ nLOF 2020 Datasheet
AZ 15nXT
SU-8
M108Y
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M108Y Datasheet
M35G
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ECPS – Laminar-turbulent patterns
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