Equipment hourly rates (CHF/h)

Processing fees (CHF/h) depend on the categories of tools and the status of the user.

EPFL users

#Categories CHF/runCHF/hourProcess overcharge 1Required consumables 2
E01E-Beam Writer & DUV Stepper35.0051.00Ebeam resist bottles
E02Packaging35.0062.00
E03Laser Writer & Mask Aligner12.0032.00
E04Coater Developer (Auto)12.00100.00
E05Coater Developer (Manual)12.0037.00Photo resist, SU8,
PI bottles
E06Dry Etcher12.0033.00
E07LPCVD, ALD, PVD12.0055.00ALD precursor cycles, Precious metals
E08Thermal Process12.0029.00
E09Wet bench12.0045.00
E10Measurement tools12.0018.00AFM probes, Prober needles
E11Other Tools4.0012.00PDMS crosslinker dosesW boats,
tubes of metal

Swiss Academics users

#Categories CHF/runCHF/hourProcess overcharge 1Required consumables 2
E01E-Beam Writer & DUV Stepper42.0061.00Ebeam resist bottles
E02Packaging42.0074.00
E03Laser Writer & Mask Aligner14.0038.00
E04Coater Developer (Auto)14.00120.00
E05Coater Developer (Manual)14.0044.00Photo resist, SU8,
PI bottles
E06Dry Etcher14.0040.00
E07LPCVD, ALD, PVD14.0066.00ALD precursor cycles, Precious metals
E08Thermal Process14.0035.00
E09Wet bench14.0054.00
E10Measurement tools14.0022.00AFM probes, Prober needles
E11Other Tools5.0014.00PDMS crosslinker dosesW boats,
tubes of metal

International Academics users

#Categories CHF/runCHF/hourProcess overcharge 1Required consumables 2
E01E-Beam Writer & DUV Stepper56.0082.00Ebeam resist bottles
E02Packaging56.0099.00
E03Laser Writer & Mask Aligner19.0051.00
E04Coater Developer (Auto)19.00160.00
E05Coater Developer (Manual)19.0059.00Photo resist, SU8,
PI bottles
E06Dry Etcher19.0053.00
E07LPCVD, ALD, PVD19.0088.00ALD precursor cycles, Precious metals
E08Thermal Process19.0046.00
E09Wet bench19.0072.00
E10Measurement tools19.0029.00AFM probes, Prober needles
E11Other Tools6.0019.00PDMS crosslinker dosesW boats,
tubes of metal

Industry users

#Categories CHF/runCHF/hourProcess overcharge 1Required consumables 2
E01E-Beam Writer & DUV Stepper113.00120.00Ebeam resist bottles
E02Packaging113.00105.00
E03Laser Writer & Mask Aligner36.0067.00
E04Coater Developer (Auto)36.00177.00
E05Coater Developer (Manual)36.0059.00Photo resist, SU8,
PI bottles
E06Dry Etcher36.0073.00
E07LPCVD, ALD, PVD36.00121.00ALD precursor cycles, Precious metals
E08Thermal Process36.0046.00
E09Wet bench36.0072.00
E10Measurement tools36.0045.00AFM probes, Prober needles
E11Other Tools13.0024.00PDMS crosslinker dosesW boats,
tubes of metal
1.
Billed separately.
2.
To be ordered online.